ZCUK

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Set screw (unused) q c r i Switch bracket (Stainless steel) e Dismounting Auto Switch 1. Remove the auto switch mounting screw from the switch holder. 2. Move the auto switch back towards the position where it stops at the lead wire side. 3. Hold up the lead wire side of the auto switch at the angle of around 45 . 4.

High Power Cylinder Series RHC

3 y r t !1 A A Enlarged view of A Component Parts Description No.

Dedicated Controller Series LC1 Uniaxial Type

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

High Power Cylinder:

0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

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Y . u , E 37 | 1/2" NPT M6 0 t 02 03 04 M 6 x 1 . 0 PT1/8 Pr1/4 PT3V8 PT1/2 a a a a a o a a a a a a a a a a a o a a a a a a a a a a a o a a a a a a a a a a a r a a a a a a a r a a a a a a a a o a r a o a a a The use of compact spacer with bracket reduces the total assembled space.

Digital Gap Checker ( compatible)

U8 0 Y 2420 0X0974 6 R/W 6 th letter (11seg) U8 0 Y 7 R/W 7 th letter (11seg) U8 0 Y 8 R/W 8 th letter U8 0 Y LINE name 9 R/W 9 th letter U8 0 Y 1 R/W 1st dot (left side) U8 0 Y 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y 4 R/W 4th dot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 2430 0X097E 5 R/W 5th dot U8 0 Y 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y -100No.PS-OMW0009-C 4

S Couplers

1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.

Air Fittings Fitting Series For Special Environment

(mm) Thread R(PT) Part No.

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Digital Pressure Switch ( compatible)

0x0013 (19) 0 R Product ID Example: ISE20C-L 0x0014 (20) 0 R Product text Pressure sensor Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23) 0 R Software version FW-Vx.y x: Large revision number y: Small revision number 0x0017 (36

IIIIIIIIII

Model Number Description R-800-XX-W/K Precision regulator with adjusting knob R-800-XX-W/S Precision regulator with 1/4" adjusting shaft R-800-XX-W/OS Precision regulator with slotted adjusting shaft R-801-XX Factory pre-set regulator R-810-XX-W/K Non-bleed, non-relieving with adjusting knob R-810-XX-W/S Non-bleed, non-relieving with 1/4" adjusting shaft R-810-XX-W/OS Non-bleed, non-relieving

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Auto switch capable (Water resistant type) Note) RBL (coolant resistant type) shock absorbers are used. 2020 to 50 Front mounting flange Data Dimensions 32 to 50 Front mounting flange R Y + Stroke Front mounting flange 63 Y + Stroke Q X 63 to 100 R Front mounting flange Y + Stroke 63 40 50 25 32 20 Bore size (mm) R 16 15 16 14 14 14 Y 119 Dimensions other than the above are the same as those

MGC

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

R.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Guide Cylinder Series MGG

R Y + Stroke 32 to 50 MGQ Front mounting flange 63 Front mounting flange MGG MGC MGF R Y + Stroke Q X Bore size (mm) R Y (mm) MGZ Y + Stroke 25 32 40 50 63 20 14 14 14 15 16 16 MGT 63 to 100 79 79 81 89 104 119 Front mounting flange Copper and Fluorine-free (For CRT production processes) To prevent the influence of copper ions or halogen ions during CRT manufacturing processes, copper and

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.