AS-FPQ/AS-FPG

33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35 35 21.9 30.4 15.2 20 47.5 38 38 23.8 38.3 18.5 41.9 55 59 19.4 30.4 12.8 44.4 57 61 21.9 32.9 15.2 35.6 40.6 41.9 46.9 23 19 R 3/8 20.9 46.1 59 63 23.8 34.6 18.5 47.3 61 65 25 35.8 20.9 50.9 100 107 23.8 36.6 18.5 25.4 42.4 47.4 50.6 55.6 28.6 24 R 1/2 52.5 102 109 25 38.2 20.9 Note 1) Reference dimension

MLGC

33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 21.5 (30.5) 19.5 (28.5) 40 35 37.5 38 8.5 12 10 15.5 14.5 11.5 13.5 Values in parentheses are for long stroke style. 3.2-10

AS-FPQ/AS-FPG

33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35 35 21.9 30.4 15.2 20 47.5 38 38 23.8 38.3 18.5 41.9 55 59 19.4 30.4 12.8 44.4 57 61 21.9 32.9 15.2 35.6 40.6 41.9 46.9 23 19 R 3/8 20.9 46.1 59 63 23.8 34.6 18.5 47.3 61 65 25 35.8 20.9 50.9 100 107 23.8 36.6 18.5 25.4 42.4 47.4 50.6 55.6 28.6 24 R 1/2 52.5 102 109 25 38.2 20.9 Note 1) Reference dimension

Compact Type Dual-Rod Cylinder Series CXSJ

0.2 33 0.2 20 42 8 8 3.4 through 6.5 counterbore with depth 5.5 (Opposite side: Same) 2-M3 x 0.5 through 6.5 2-M4 x 0.7 through M3 x 0.5 x 10 L (Hexagon socket head cap screw) M4 x 0.7 x 14.5 L (Hexagon head bolt) M4 x 0.7 (Hexagon nut) (16) (8+ Stroke) 2-M3 x 0.5 through 4 33 0.2 6 11 Compact Type Dual-Rod Cylinder Series CXSJ Dimensions: 6, 10 Axial Piping CXSJ6P 9 + Stroke 10 0.3 12.8

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35 35 21.9 30.4 15.2 20 47.5 38 38 23.8 38.3 18.5 41.9 55 59 19.4 30.4 12.8 44.4 57 61 21.9 32.9 15.2 35.6 40.6 41.9 46.9 23 19 R 3/8 20.9 46.1 59 63 23.8 34.6 18.5 47.3 61 65 25 35.8 20.9 50.9 100 107 23.8 36.6 18.5 25.4 42.4 47.4 50.6 55.6 28.6 24 R 1/2 52.5 102 109 25 38.2 20.9 Note 1) Reference dimension

OMR0031

Controller Set Up (P.33) Incorrect parameters The actuator is displaced Check that the Basic Parameter Setup in the controller (Card Motor product number and mounting orientation) are correct.

Compact Electric Actuator Series LG1

LG1H202200-F LG1H202300-F LG1H202400-F LG1H202500-F LG1H202600-F LG1H202700-F LG1H202800-F LG1H202900-F LG1H202-1000-F LG1H202-1200-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100 1200 1300 1500 50 150 250 350 450 550 650 750 850 1050 70 170 270 370 470 570 670 770 870 1070 Note) Dimensions

Compact manifold regulator ARM5 Series

Direct mount VBA VBAT DIN rail mount AP100 Mounting position Direct mount Mounting position Symbol L R Left DIN rail mount Right L side end block R side end block L side end block R side end block 33 33 50 50 50 50 SMC SMC SMC SMC 3.5 33 3.5 10 3.5 33 10 3.5 10 12.6 10 12.6 Direct mount DIN rail mount 703 ARM5A/B Series DIN Rail VVQ1000 90 7 L dimension Enter the No. for the desired L dimension

PFxx-OMS0001CN

1]OUT1(29)[F 2]OUT2(47) -23No.PF-OMS0001CN-A <> 1 [P_1][n_1] [] 500 L/min OUT1OUT2[P_2][n_2] [F 1]OUT1(29)[F 2]OUT2(37) 30 (25) -24No.PF-OMS0001CN-A [] 2 [F 0] 2 F99 F1 F0 2 -25No.PF-OMS0001CN-A () () [F 0] [ rEF] [ ANR] 27 [ Uni] 1 [ L] L/min [ oU1] OUT1 [ HYS] [ 1ot] OUT1 [ 1_P] [ 250] 250 L/min(PFMC7501) [ P_1] OUT1 [ 500] 500 L/min(PFMC7102) 29 [F 1] [ 1000] 1000 L/min

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U H with effective thread depth C 4-N through hole 8-O counter bore F F I 26 13 Connector auto switch 20 (22) D D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M E J S B + Stroke L + Stroke L A + 2 strokes Note) The drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.

Swivels

-30 to 180 F Performance Data 90 PS Swivel 150 SUS Oil Flow vs.

SFOD-OMT0012

Step data writing to the controller will begin. 34 No.SFOD-OMT0012-A f) Completion Writing is completed when the progress bar disappeared.

SFOD-OMT0011CN

No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42

SYA3000/5000/7000

/ exhaust center / pressure center SYA7 403 4 5 02 03 3/8, 1/4 (A, B port) 21 22.5 11.5 13.5 71.1 18.6 57 4 2 x M5 x 0.8 (Pilot port) 61 42 B A PE 38 46 B A Manual override P EB EA 2 x 4.3 (For mounting) 21 69 28.6 109.7 SYA SYJA VZA VFA VFRA 26.5 2 x 1.8 (Ventilation hole) VA 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1743

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

Cylinder

Bore6:CO.5 ~ .+~ MM 4>1O, 1S:Cl n\ ~I +I." ~\ 10>1 f!-f.F F ", "I , H I' f.'5., I1tJ F E Rod end without ~ H S R thread , I Z oG H K l MM 1 s I z..q sst I lost IS" , 5" 16!J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

NCA1

Mounting ... 13 Dimensions . 14-40 Double Acting/Double Rod . 14-16 Non-Rotating Rod . 17-19 Stainless Steel Rod (XC6) Low Speed (XB9) . 20 High Temp (XB6)/Low Temp (XB7) . 21 Special Trunnion Location (X46US) . 22-23 Oversized Rod w/ Special Trunnion Location (XB5 X46US) . 24 Stainless Steel Tie Rods/Tie Rod Nuts (X130US) .. 25-31 Rod Boot . 32 Oversized Rod / Non-Rotating (XB5 / X119US) 33

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

D B(B) C A A Q J Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S U 2 x M V W X Approx. 300 Approx. 280 G1/2 33 25 D side Stations 1 2 3 4 5 n U side Y R T 44 E D H F F n-1/8, 1/4 OUT port (Common SUP type) IN port (Individual SUP type) (mm) n (stations) Model Dimension