Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.
ZB-OM00201-B Revision history A P.19 Recommended tube fittings P.21 Piping to the Manifold Base B P.21 Change of description about tightening of fitting.
Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.
LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.) Port P Port P Port P Model Manifold base model Individual port Rc VVXA211-stations Common port Rc Port A 1 8 1 4 3 8 1 8 1 4 VVXA212-stations VVXA221-stations VVXA222-stations Manifold Manifold Stations B mount 2 to 10 stations 17-3-97 2 The VX series will be revised shortly.
proportional valve (VEP type) Current 5 (R1) 4 (A) 1(P) 2 (B) 3 (R2) IRV Simplifying circuit design Space-saving and piping work eliminated 2 (A) 1 (P) Selection of inlet pressure or atmosphere 3 (R) 5 (R1) 4 (A) VEX1 1(P) 2 (B) 3 (R2) SRH SRP SRF System Diagram ARX20 Power amplifier VEA25 VCHR Control circuit Voltage Current ITV 0 to 5 VDC 4 (A) IC 2 (B) PVQ Electro-pneumatic proportional
l/min VCB 3 Cv = 0.35 3 4 Formula based on effective area (Smm) 1.0 Q = 0.8 S 10.2 P l/min VCB23 Cv = 0.33 VCB25 Cv = 0.65 Q: Flow rate (l/min) P:Pressure differential (P P) P: Upstream pressure (MPa) P: Downstream pressure (MPa) S: Effective area (mm) Cv: Cv factor VCB34 Cv = 0.54 VCB24 Cv = 0.51 0.1 0.001 0.01 0.1 1 10 Pressure differential P = (P P) MPa Note: 1l/min = 0.353SCFM
Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80
Communication connectoe key P o w er su p p ly co n n ecto r key Bus adaptor 6 Sw i t ch set t i ng Saf et y I nst ruct i ons f or Set t i ng Turn of f t he pow er suppl y w hi l e set t i ng t he sw i t ch. I f t here i s f orei gn m at t er or w at er dropl et s around t he sw i t ch cover, cl ean i t of f bef ore openi ng t he cover.
= 10.5 13.3 24 24 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 2 B 2 2 B 2 B B R B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with
Indication Type P. 10-20-23 Band, Rail, Tie-rod Mounting MK(2) RS Q G RS H A RZQ MI W S CEP1 P. 10-20-26 Solid State Switches CE1 CE2 General Purpose Type P. 10-20-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 10-20-37 Direct Mounting 2-color Indication Type P. 10-20-42 Band, Rail, Tie-rod, Direct Mounting 2-color Indication Type with Diagnostic Output P. 10-20-
Type P. 6-16-24 Band, Rail, Tie-rod Mounting MB1 CA2 CS1 C76 C85 C95 P. 6-16-27 Solid State Switches CP95 NCM General Purpose Type P. 6-16-28 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 6-16-39 Direct Mounting 2-color Indication Type P. 6-16-40 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 6-16-46 Band, Rail, Tie-rod Mounting
Type P. 7-9-15 Band, Rail, Tie-rod Mounting MU D-X 20Data P. 7-9-16 Solid State Switches General Purpose Type P. 7-9-17 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 7-9-23 Direct Mounting 2-color Indication Type P. 7-9-25 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 7-9-29 Band, Rail, Tie-rod Mounting Water Resistant 2-color
Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 8-30-31 Direct Mounting 2-color Indication Type P. 8-30-33 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 8-30-39 Band, Rail, Tie-rod Mounting Water Resistant 2-
Type P. 9-15-23 Band, Rail, Tie-rod Mounting CNS CLS CLQ MLGP RLQ MLU P. 9-15-26 Solid State Switches ML1C DGeneral Purpose Type P. 9-15-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 9-15-39 Direct Mounting 2-color Indication Type P. 9-15-42 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 9-15-50 Band, Rail, Tie-rod Mounting
Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 8-30-31 Direct Mounting 2-color Indication Type P. 8-30-33 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 8-30-39 Band, Rail, Tie-rod Mounting Water Resistant 2-
Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 8-30-31 Direct Mounting 2-color Indication Type P. 8-30-33 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 8-30-39 Band, Rail, Tie-rod Mounting Water Resistant 2-
ZB1-PS1-A (PSE541) Rated pressure range Proof pressure Output voltage Output impedance Power supply voltage Current consumption Accuracy Linearity Repeat accuracy Effect of power supply voltage Temperature characteristics 72.5 psi (500 kPa) 1 to 5 VDC Approx. 1 k 10 to 24 VDC10%, Ripple (p-p) 10% or less 15 mA or less 2% F.S.
Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .
Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .