SFOD-OMT0009CN

(INx) (b)DRIVE ONNo.1(OUTx ) (c)BUSY ONINP OFF() (d)No.1 AREA ON(150mm ) (e)BUSY OFFINP ON(No.1 ) (f)No.2(INx) (g)DRIVEONNo.2((OUTx ) (h)AREA OFFBUSY ONINP OFF() (i)No.2 AREA ON(170mm ) (j)No.2 AREA OFF(130mm ) (k)BUSY OFFINP ON(No.2 ) -50mm No.1 ( 200mm1 150mm2 250mm) No.2 ( 100mm1 130mm2 170mm) No.1 No.2 No.

CC

98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

AMG

SAM, #1 AMG450 SAM, #4 AMG250 SAM, #2 AMG650 SAM, #5 AMG350 SAM, #3 AMG650 SAM, #6 4.4-4 Water Separator Series AMG AMG850 Dimensions Accessory D: With auto drain (N.O. type) for AMG850 HA AT IDl AMG AFF AMl Related products M Mounting Dimensions Model Port size (Nominal size B) A G F E D C B S 6.0 11/2, 2 R 18 Q 110 P 220 O 184 N 120 L 24 K 15 J 30 I 180 H 463.5 13 10 220 57.5 220

End Lock Cylinder Series CBG1

P 2-TC TD D I E 0 -0.05 0 -0.05 E AL TE 2-TC K F TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

3M/SMseries

++t&F Eft!

JXCx-OMT0001CN

(170mm ) (j)No.2 AREA OFF(130mm ) (k)BUSY OFFINP ON(No.2 ) -50mm No.1 (.200mm 1: 150mm 2: 250mm No.2 .100mm 1: 130mm 2: 170mm No.1 No.2 No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-

Brake mechanism added

Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699

Compressed Air Preparation Filter

2 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 0 0 0 5 6 7 8 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 2 1 3 4 5 6 7 8 9 10 11 12 0 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 7 Compressed Air Preparation Filter AFF/AM/AMD Series Dimensions: AFF, AM, AMD H Bracket K L N O J M D C I E P Bracket (Accessory) F B OUT

CL

2 !3 !4 !5 !6 !7 No.

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Compact Hydraulic Cylinder

2 x 5.5 through 4 x 9 counter bore depth 7 CHQ CHQ Rod end male thread H H Approx. 28.5 CHK 10 49 D D CHN 10 CHM 36 CHS 47 36 8 2 x Rc 1/8 (port size) C X L C X L + Stroke 20 20 CH2 5 + Stroke 57 + Stroke 5 67 + 2 strokes CHA Related Products 32 to 100 2 x P (port size) H with effective thread depth C 4 x N through hole 8 x O counter bore DF F I I D D M E Z K M E J B + Stroke L + Stroke

Function: 2 (2 Position Double), Pilot: Internal Pilot, Voltage: 5 (24VDC), Light & Surge Suppressor: U (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Manifold Block: T (Tie Rod Base Type 10 Manifold Block), Manifold Wiring: Double, A, B Port: 02N (NPT1/4)

Stations: 2 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)

Stations: 2 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: R (External Pilot), A, B Port: 02N (NPT1/4)

Series 11-MXJ Air Slide Table

(Through) Note 1) 3 +0.05 0 depth 1.5 6 3.5 11 3 +0.03 0 depth 1.5 Note 1) (Through) M 2 x M1.7 x 0.35 thread depth 2 8 K 1.5 10.5 4 3 Vacuum port M3 x 0.5 J 12 I Operating port 2 x M3 x 0.5 (Plugged when the product is not a symmetric type.) (Plugged when the product is not a symmetric type.)

CG5-S

R V Front flange type (F)/CG5FNS X165US inch rod option dimensional changes GA GB FT 2-Rc P H1 Width across flats B1 Dim.

NCRAI seies

q NC G RA1B with Auto swllch cap"ou,O J T With Auto Swllch Capsbiliry J | | D-withbuin-inmasner J I &-*"-l See above Bor See above ,f The stsrda|d liead wire length is 18 inches. "L' is addecl for 10loot long lead wire.