Possible to transfer a workpiece at low-speed.

49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14 8.6 5 Key dimensions Q S W b L1 US TA TB TC TD TF (H9) TG (H9) TL UW G M N L Size Rotation angle 90 104 4 0 0.03 0 0.1 0 0.1 20 8 9.6 29 11.5 20 59 24.5 1 13.5 27 4 4 2.5 74 15 11 180 130 90 122 4 0 0.03 0 0.1 0 0.1 30 10 11.4 33 13.5 20 65 27 2 19 36 4 4 2.5 83 18 13 180 153

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

0.4

One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153

Manifold Specifications

VZ5000 Type 42 Manifold: Side Ported C6 C8 VV5Z5-42Station 1Manual override (Non-locking) PE port Grommet (G), (H) (Pilot EXH) 6-Rc 1/4 (1(P), 3/5(R) port) (Pitch) C6: MAX. 6 C8: MAX. 6.5 G: 300 mm H: 600 mm (Mounting hole) 2n-One-touch fitting (4(A), 2(B) port) Applicable tubing model C6: T0604 C8: T0806 (Lead wire length) (mm) Stations 2 3 77 49 96 68 20 419 391 L1 L2 4 115 87 5 134 106 6 153

XLAQ/XLDQ

sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153

ZP

82.5 40 180.5 92.5 77 50 190.5 102.5 N S U F GN GS 20 51.5 33.5 Construction p. 118 J K ZP Y B Buffer Assembly p. 126 10 97 63 23 20 135 73 51 30 145 83 40 181 93 77 50 191 103 25 3.5 6 M10 x 1 14 3 52 34 10 102 68 23 20 140 78 51 30 150 88 40 186 98 77 50 196 108 32 57 39 10 142 74 20 139 84 30 149 94 50 194 114 75 50 40 62 44 N6 U6 A14 6 10 M14 x 1 19 4 10 146 78 66 48 50 20 143 88 30 153

•

Type F Y 12 1.7 ZPlOCQ Cl0 10 12 4 13 7.7 > 8 13 . 15, 4 13 7.7 16 18 4 13 8,2 2d 23 4 15 9,5 ZP13CQ C-'3 12 1.8 12.5 1.2 14 1.7 ZP16CQ C16 ZP20CQ G20 ZPlOUO 50UO 00 ZP25CQ G25 25 28 4 15 9.5 14 1.8 32 I 35 4 15 10 ZP32CQ = ZP40CQ C40 .14.5 2.3 40 I 43 7 18 13.7 50 153 7 18 14,7 18.5 3.3 ZPSOCQ G50 Deep type pad -~~ ZPlODO 4000 t" ~F=m-' I S (mm) Part No. r"~ IA 18 IG 10 E U02 2 _2.6 1.2

MY1

socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring) Y Bore size (mm) 16 20 J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153

CRQ2

BC BD BU CA CB F H 90, 180 90, 180 40 90, 180 20 30 10 12 15 8.3 32 30 32 36 M8 x 1.25 M10 x 1.5 M10 x 1.5 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 16 16 5.2 49 78 (13) 76 16 47 18.5 55 40.4 Size K Q S W Keyway dimensions TF (H9) TG (H9) TL Rotating angle JJ US TA TD UW G L TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153

CJ5-S

71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153

MVGQ

DMVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions -X Symbol A E Symbol Bore size (mm) 80 DB E A DB Stroke Bore size (mm) Up to 50 st Over 50 st Up to 50 st Over 50 st 2080 84 143 9.5 25 68.5 93 28 18.5 Data 100 100 89 153 5 30 69 105 36 21 10-16-17 18 Series MVGQ Construction Series MVGQM For 12 to 25: MVGQM12 to 25 Over 50 stroke Courtesy of Steven

CA2

Bore size (mm) Effective thread length Width across flats A D H K MM W ZZ 40 50 63 80 100 32 37 37 37 47 18 22 22 26 31 35 40 40 40 50 20 25 25 30 36 58 71 71 72 85 7 11 11 11 15 M18 x 1.5 9 9 9 0 0 153 172 183 205 228 M22 x 1.5 M22 x 1.5 M26 x 1.5 A B M30 x 1.5 With heavy duty scraper -XC4 Heat resistant (150C) -XB6 4 2 The cylinder seals are changed to a heat resistance (to 150C) material

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

CQM

497 269 295 320 345 370 396 OUT 147 245 344 50 1133 1341 701 740 780 821 500 540 580 620 661 IN 181 302 422 32 With Auto Switch (Built-in magnet) OUT 241 402 563 Unit: g IN 317 528 739 Cylinder stroke (mm) Bore size (mm) 5 40 OUT 377 628 880 10 100 40 45 50 75 15 20 25 30 35 12 IN 495 825 1150 59 52 68 77 84 93 50 16 OUT 589 982 1370 77 66 87 97 107 118 20 213 227 242 257 122 138 153

MU

56 824 698 573 447 321 195 1257 OUT Flange style/Rod side, 20 50 76 47 1327 1131 935 738 542 346 1963 OUT 0.10 0.14 0.23 0.46 0.83 Mounting bracket weight Head side 20 63 61 113 2069 1757 1446 1134 822 510 3117 OUT CUJ Single clevis style 0.06 0.12 0.22 0.40 0.68 12 25 15 30 235 197 159 121 83 46 378 IN Double clevis style (With pin) 0.07 0.16 0.26 0.47 0.76 14 32 24 42 413 348 283 218 153

CXWM/CXWL

800) 258-9200-www.stevenengineering.com 2-Rc 1/8 Cylinder port 2 x 2-M6 x 1.0 thread depth 12 2 x 2-6H7 depth 8 +0.012 0 4-5.5 through 4-9.5 counterbore depth 5.5 2-M10 x 1.0 Adjusting bolt 2-RB1008-X552 Shock absorber (mm) F 31.5 31.5 56.5 56.5 69 81.5 94 106.5 L 41 66 91 116 141 166 191 216 P 65 90 65 90 90 90 90 90 Q 171 221 271 321 371 421 471 521 S 27 52 77 102 127 152 177 202 SS 128 153

Guide Table Series MGF ø40, ø63, ø100 1

Theoretical Output OUT (N) IN (N) (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) Rod size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1256 OUT 251 376 502 628 753 879 1004 1130 1256 40 25 765 IN 153 229 306 382 459 535 612 688 765 3117 OUT 623 935 1246 1558 1870 2182 2493 2805 3117 63 36 2099 IN 419 629 839 1049 1259 1469 1679 1889 2099 7853 OUT 1570 2356 3141

MGQ

138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166 M12 x 1.75 M12 x 1.75 M12 x 1.75 224 190 108 221 170 200 M14 x 2 M14 x 2 M14 x 2 MGQL (Ball bushing bearing) A, DB, E Dimensions MGQM (Slide bearing) A, DB, E Dimensions Bore size (mm) A E DB Symbol Stroke A DB E 50 st or less 53 54 60 61 84 89 Over 50 st 90 90 102 102 143 153

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 MGTM 199 213 228 246 267 291 221 250 80 MGTL 180 192 205 220 237 255 154 62 MGTM 271 288 307 328 353 382 321 356 100 F MGTL 242 257 274 292 313 335 153