Rotary Actuator/Vane Type

m 2-wire typeD-T99(V)m 1.

e

Load Mass Allowable Moment E-MY2H/M1 E-MY2H/M3 E-MY2H/M2 E-MY2H/m3 60 60 50 60 60 50 50 50 40 40 30 30 30 30 q r w et 20 20 20 20 Load Mass (kg) Moment (NNm) Moment (NNm) Moment (NNm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 MY2H16 4 4 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400 500 1000 1500 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200

Electric Rotary Table

2 2 2 Note 2) Home position (Stroke end) 90 90 L 0 E 1 R 3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.

100

1 o !0 t y i !2 !3 !

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

Fieldbus system PROFIBUS DP compatible SI unit

Station status 2 7 6 5 4 3 2 1 0 Byte 1 0 1 Bit No.

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

60

Model Valve Model Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll 1 2 3 4 7 8 J Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll N.C. N.O.

Possible to transfer a workpiece at low-speed.

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

kPa 2 kPa PSE550 0 2 kPa With LED display for confirming energization 2 mounting types Accuracy 1 % F.S. 1 % F.S.

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

Speed Controller with One-touch Fitting

2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Sensor A-3 Blue 2 2 Shield Electric actuator side Controller side 1 6 5 3 4 Terminal no. 12 13 7 6 (4) Actuator cable for with lock and sensor (8-20m) 9 8 Cable color Terminal signal Terminal no 3 no A B-1 Brown 2 A A-1 4 Terminal no Cable length (L) Red 1 B B-2 5 2 Orange 6 B A-2 1 1 8 8m *1 Yellow 5 COM-A / COM B-3 2 6 Green 3 COM-B / A-3 A 10m *1 5 Blue 4 Shield

Digital Flow Switch (Integrated display type)

For OUT2, all "1" in the chart will be changed to "2".

Vacuum Unit Ejector / Vacuum Pump System

purity class is 2:6:3 of ISO8573-1:2010.

AC Servo Motor Driver (SSCNET Type)

1) (Note 1) 31 Overspeed 32 Overcurrent Alarms 33 Overvoltage 34 Receive error 1 (Note 2) 35 Command frequency error 36 Receive error 2 37 Parameter error 45 Main circuit device overheat (Note 1) (Note 1) (Note 1) 46 Servo motor overheat (Note 1) (Note 1) (Note 1) 47 Cooling fan error 50 Overload 1 (Note 1) (Note 1) (Note 1) 51 Overload 2 (Note 1) (Note 1) (Note 1) 52 Error excessive 8A USB

Digital Flow Switch ( compatible)

Name Lead wire colour Function 1 DC(+) Brown 12 to 24 VDC 2 N.C./OUT2 White Not connected/Switch output 2 (SIO)/Analogue output/External input 3 DC(-) Blue 0 V 4 OUT1 Black Switch output 1 Used as IO-Link device No. Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

4/5 Port Air Operated Valve Series SYJA3000 1

-4.3 (For mounting) 63.6 34 8.5 2-M5 x 0.8 1 (Pilot port) 13 3 1 A B B A 2-M5 x 0.8 34 2-3.2 27 17 A B (Pilot port) (For manifold mounting) 1 35 R1 P R2 31.5 2-3.2 18 35 (For mounting) 63.6 Manual override 74.6 28 29 25 21 1.6 14 74.6 Manual override 55 1/8 2-1.8 (Bleed port) With fiflter (80 mesh) 40 25.5 (Piping port) 20 12 11.5 R1 R2 P 18 22 22 1/4 2-1.8 (Bleed port) 63 27.2 (R1, R2 port