3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

IDX-OM-U010

13 Inspection record . 13-1 13.1 INSPECTION RECORD . 13-1 IDFC60/70/80/90 Series IDX-OM-U010 Chapter 1 Safety Instructions Chapter 1 Safety Instructions 1.1 Before Using Air Dryer.

RSH/RS1H

13 Series RSH/RS1H Specific Product Precautions 1 Be sure to read before handling.

RSH/RS1H

13 Series RSH/RS1H Specific Product Precautions 1 Be sure to read before handling.

Parallel Type Air Gripper

Internal C 13 38 57 83 161 267 gripping force Open/close stroke (Both sides (mm) 4 6 10 14 22 30 230 420 715 1,275 Note 2) Weight (g) D 55 115 SC 235 425 760 1,370 Note 1) Values based on pressure of 0.5 MPa, gripping point L=20 mm, at center of stroke. Note 2) Values excluding weight of auto switch. 4 - 2. Operating method or operation 2-1. Design precautions Warning 1.

MHx-OMU0057

: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60 D 11 34 42 65 158 254 1 N 17 45 66 104 193 318 S 7.1 27 33 45 131 217 C 13 38 57 83 161 267 mm 4 6 10 14 22 30 2 g D 55 115 230 420

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 93 11 20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension

Electro-Pneumatic Positioner Series IP8000/8100

Within 1%F.S. Within 2%F.S. Within 0.75%F.S. Within 1%F.S. Within 0.5%F.S.

Digital Flow Switches Series PF2A

0.8 8 OUT1 80 mA 65 180 45 104 79 65 Rc11/2, NPT11/2, G11/2 Rc2, NPT2, G2 46 M6 x 1 9 Load Black 0 V or 75 220 55 114 89 75 56 M6 x 1 9 50 msec 50 msec PF2A7H-(-M) 68 69 Analog output 1 to 5 VDC 4 to 20 mADC 20 5 Analog output [V] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate

ZSE F/ISE

) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

Intrinsically Safe Valve

2position 1 (P) port 1/4 N.C.

AC Servo Motor Driver (Pulse input type)

Regenerative error (Note 1) (Note 1) (Note 1) Alarms AL.31 1 0 1 Overspeed AL.32 1 0 0 Overcurrent AL.33 0 0 1 Overvoltage AL.35 1 0 1 Command pulse frequency alarm AL.37 0 0 0 Parameter error AL.45 0 1 1 Main circuit device overheat (Note 1) (Note 1) (Note 1) AL.46 0 1 1 Servo motor overheat (Note 1) (Note 1) (Note 1) AL.47 0 1 1 Cooling fan alarm AL.50 0 1 1 Overload 1 (Note 1) (Note 1)

0.5

in 1 m increments from 1 m to 20 m.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP ZCUK Add or deduct the mass shown in the table on the left for order materials.

IDX-OM-W095

. 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

PSxx-OMT0001CN

13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMT0001CN-E 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(G ) H 13 13.6 19 -23No.PS-OMT0001CN-E

MXF

. (3) Allowable load weight coefficient : Graph (1) Wa = 1 x 1 x 4 = 4 K = 1 = 1 Wmax = 4 1 = 0.5/4 = 0.125 Find the allowable load weight Wa (kg).

MHS

MH*-OMM0056 MHS2-D MHS3-D MHS4-D MHSJ3-D MHSH(J)3-D 1. 23 2. 2-1. 45 3. 3-1. 6 3-2. 67 3-3. 713 3-4. 13 3-5. 14 3-6. 14 3-7. 14 4. 4-1. 14 4-2. 1518 4-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D

Compact Guide Cylinder

4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x