Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

End Lock Cylinder Series CBJ2

) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7

VP300/500/700

N.O. 112 (55) (X port) (Rc1/8) (R port) Rc 1/2 40 (For mounting) 2-8.5 24 162.2 52 V100 (32) 3(R) 3(R) 3(R) 3(R) 48 86 1(P) 1(P) 1(P) 1(P) MAX.10 D: 173.4 Y: 172.9 SY 162.2 MAX.10 173.4 163 52 (P port) Rc 1/2 SYJ VK (Pitch) 300 Pg9 119.7 129.7 Pg9 Y: 131.7 148.7 (Non-locking) Manual override 41 37 (Lead wire length) 8 L2 129.2 139.2 124.2 134.2 D: 129.7 146.7 L1 VZ Applicable lead wire O.D

25

cartridge) 6 6 5 5 Discharge time (s) Discharge time (s) 4 4 30 Hz 1 Hz 30 Hz 3 3 1 Hz 2 2 1 1 Sensing AC Sensing AC 0 0 2,000 0 500 1,000 1,500 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) 418 Technical Data IZS40/41/42 Series IZS IZS IZS42 1) Without air purge IZN 0 2 4 6 8 10 12 14 16 18 20 IZF 1 Hz 30 Hz Discharge time (s) ZVB IZD IZE IZH 0 50 100 150

240

1 t !

CC

E101. 10-17-16

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30 CXS6-50-XB19 50 63 95 108.5 35 CXS10--XB19 17 S ZZ 15 1 10 7 SS 2-3.4 through 2-6.5 counter bore depth 3.3 2-2.5 x 14l AW (spring pin) 20 Z 9 5 1 35 0.2 35 0.2 33.6 46 44 20 6.3 5 2.1 2-M4 x

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Dryer Piping Caution 1.

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

ZX

NPN open collector 1 output/Trouble detection/ With analog output 24 How to Set Vacuum Pressure Refer to Best Pneumatics Vol.16.

NARM Series

8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

PA3000/5000/PAX1000

1/4 5 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F, N are order

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Compact Cylinder with Solenoid Valve/

Brown Brown Load Load Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from auto switch is 1 mA.

Air cylinder (Series compatible with secondary batteries)

Description Qty 1 Rod cover 1 2 Head cover 1 3 Cylinder tube 1 4 Piston rod 1 5 Piston 1 6 Cushion ring 1 7 Cushion ring B 1 8 Bushing 1 9 Cushion valve 2 10 Tie-rod 4 11 Retaining ring 2 12 Spring washer 8 13 Tie-rod nut 8 14 Wear ring 1 15 Cushion seal 2 16 Rod seal 1 17 Piston seal 1 18 Cushion valve seal 2 19 Cylinder tube gasket 2 20 Piston gasket 1 21 Rod end nut 1 22 Magnet (1) 25

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Series MXP/MXPJ6 11226, 10, 12, 16 Air Slide Table How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicone-free + Low particle generation Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke (mm) Auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table below

Process Pump Series PA3000/5000/PAX1000 Series PB1000

, 3/4 Rc 1/4 5 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F,