ZSE F/ISE

) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50

Series CE1

(Shield) 4.4-8 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3!0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to all PSE56 models. 24 PSE56-C01 PSE56-A2 A 24 B B PSE56-B2 (mm) Model A A 8.2 12 9.2 12.2 15.5 9.5 B R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29 E 9 9 13 13 F R 1/8 NPT 1/8 R 1/4 NPT 1/4 G Rc 1/

Stainless Steel One-touch Fittings Series KG

M5 Nylon Urethane KGT04-M5 KGT04-01 . 15.5 M5 0.8 14 22 15.5 23 13 3.5 4.3 4.3 7 9.5 1 8 4 13 M5 0.8 14 10 10 18 10.4 6.0 6.0 16 1 4 KGT04-02 26 25 19 4.2 13 KGT06-M5 KGT06-01 15 23 17.5 14 25.5 4.3 4.3 16 11.5 7 . 1 8 10 6 10 20 12.8 1 4 KGT06-02 27 27.5 17 17 14 13.9 13.9 21 3 8 KGT06-03 29 29 35 1 8 1 4 KGT08-01 KGT08-02 24.5 28.5 28 30 12 15 23 R(PT) 8 14 18.5 26.3 15.2 18.2 12 23 3 8

SMC Pneumatic Clean Series

Grade 4 M4.5 ISO class 6 10 M5.5 ISO class 7 0.1 0.5 1 1 M6.5 ISO class 8 Particle diameter (mm) Selection procedure (1) Required clean room cleanliness? Class M2.5 or Class M3.5 or Class M4.5? Diagram 1 Air flow (2) Air flow to the workpiece (Refer to Diagram 1.) Workpiece A The air flow is blocked before it reaches the workpiece.

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

AMD

160 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMD250 1 2 3 8 1 2 , AMD350 3 4 1 2 3 4 , AMD450 1 1 1 1 AMD550 AMD650 3 4 1 2 , , 14-20-26 6 Micro Mist Separator Series AMD AMD850 Dimensions Accessory D: With auto-drain (N.O.) for AMD850 female thread Option T: With element service indicator Courtesy of Steven Engineering, Inc.-230

100

7 t e t r !7 i ZL1 Series ZL3/ZL6 Series With valve and pressure switch, Port exhaust !2 !3 !6 !5 !1 !4 Component Parts No.

Process Pump

1/8 With LQ3 fitting With LQ1 fitting (6.35) (1.2) 55 15 FLUID IN FLUID OUT 4.5 30 41 7 (140) (149) 139 87 77 79 2 (2 x R2.25) 4.5 FLUID IN Rc, NPT, G 1/8 With nut (LQ1/LQ3 fittings) 1/4" tube extension Caution 1.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8

Process Valve

(mm) Symbol 1 2 3 Note 2) Port size Rc 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note) 4 Note 2) A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 5 6 Note 2) 7 Valve size 1 to 4 7 Note 2) 11 15 11 10A 3 8 B: Slotted locking

VNB

A: Non-locking extended type 4 Valve size 1 to 4 6A 8A 10A 1 8 1 4 3 8 5 6 24 VDC 12 VDC 1 7 B: Locking slotted type 7 240 VAC 50/60 Hz 9 Other 11 15 11 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 Nil: Non-locking push type 20A 3 4 Valve size 5 to 7 25 4 25A 1 22 11 4 32A 5 32 Electrical entry/ With light/surge voltage suppressor 1 B 22 32 28 40 6 28 40 1 4 32F Flange 11 2 40A GS Grommet

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

35 + Stroke 7 Standard type MQQT 40 + Stroke 8.5 13 to 17 M6 x 1 M5 x 0.8 45 + Stroke 9 50 + Stroke 7.5 16 to 22 M8 x 1.25 M6 x 1 50 + Stroke 6 M4 x 0.7 8 to 11 M3 x 0.5 65 + Stroke 7 5.5 70 + Stroke Lateral load resisting type MQQL (Built-in ball bushing) 8 80 + Stroke M5 x 0.8 M6 x 1 13 to 17 6.5 85 + Stroke 7 105 + Stroke M6 x 1 M8 x 1.25 16 to 22 7 105 + Stroke : Stroke 4 Series MQQ

Air Pilot Operated Series NVSA

NPTF 1 . 1 0 0.83 F | E ANStSymbol i (as a nolmalty closd }way) Cv Ratlng 16, NPTF 2.54 %, NPTF 2.58 4.17 7.'

Air Pilot Operated

NPTF 1 . 1 0 0.83 F | E ANStSymbol i (as a nolmalty closd }way) Cv Ratlng 16, NPTF 2.54 %, NPTF 2.58 4.17 7.'

VCA

OUT (2) Rc G NPT NPTF Nil F N T 1 IN (1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size Orifice size (mm) 3 4 5 7 10 Symbol 3 4 5 7 10 Class 3 Class 2 Class 4 Consult SMC regarding other voltages.

High Purity Chemical Valve

8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5

Pneumatic Transfer System Series MF

508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15 32 15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

3 @1 !4 !3 !8 !3 !4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current