Large Size Vacuum Module: Series ZR

For nozzle size 18, 20 + with function plate ZR1-SR3-93-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate ZR1-SR3-37-A(a set of six threads) ZR1-SR3-41-A(a set of six threads) 10 ZR1-SR3-42-A(a set of six threads) For nozzle size 18, 20 + with function plate ZR1-SR3-46-A(a set of six threads) When the ejector is compatible

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 782 MXS 1322Air Slide Table Dimensions: MXS8 1322Basic 2 x M3 x 0.5 thread depth

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

AC

Applicable Body Size All 31, 41 31, 41 Port Size 1/4 3/8 1/2 Applicable Body Size 21 31 41 Symbol 02 03 04 Filter How To Order Series AF 20 to 40 AF 30 N 03 X480 Z 8 D Filter With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body

Series AC Epoxy Coated F.R.L.

Applicable Body Size All 31, 41 31, 41 Port Size 1/4 3/8 1/2 Applicable Body Size 21 31 41 Symbol 02 03 04 Filter How To Order Series AF 20 to 40 AF 30 N 03 X480 Z 8 D Filter With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

PFxx-OMA1007

(Refer to page 40, 41) [EXA1-30] 10 to 1050 L/min [EXA1-30] 50 L/min Common Standby flow rate (Threshold) [EXA1-40] 20 to 2100 L/min [EXA1-40] 100 L/min Common [EXA1-60] 40 to 4200 L/min [EXA1-60] 200 L/min Common [EXA1-20] 0 to 520 L/min [EXA1-20] 50 L/min Common Sets the standby flow rate (hysteresis).

CLK1

55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 Note) Refer to pages 13 and 14 for accessories.

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

Cylinder with Turntable Series MGT

50 25, 50st 40 10 l 30 5 4 3 m 20 2 10 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) 300 300 200 MGTL80 P = 0.5 MPa 200 MGTM80 P = 0.5 MPa 100 Load mass m (kg) Load mass m (kg) 40 50 Larger than 75st 100 25st 50st 30 Larger than 50st 20 50 25, 50st 10 40 30 MGJ 5 4 3 20 MGP 2 10 1 MGQ 1 2 3 4 5 10 20 30 40 50 100

Clamp Cylinder with Lock Series CLK1

20 2-M6 thread depth 11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

3 Port Solenoid Valve SYJ300/500/700 Series

Non-locking push type With light and surge voltage suppressor 24 VDC 12 VDC M type plug connector Type 20 SYJ500 L type plug connector With light and surge voltage suppressor Non-locking push type N.C. N.O. 24 VDC 12 VDC Type 41 Type 20 SYJ700 L type plug connector Non-locking push type With light and surge voltage suppressor N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

14 22 29 39 41 68 D1 M 4 17 4 4 19.7 10.4 KQB2 M L1 10 L2 A 8 D1 KS KX 6 D2 18.5 10 10 21.8 12.8 10 H Connection threads 8 15.2 20.5 26 18 25.3 12 KM (R) (R) 2 x Applicable tubing 10 18.5 23 41 29 28.4 17 KF 17 L1 20.9 12 24 58 46 30.4 22 M D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Silencer Series AN

Thread connection port size Body size Symbol Port size Applicable model AN05 AN10 AN15/20 AN30 AN40 Symbol Thread type M5 01 02 03 04 05 10 15 20 30 40 M5 x 0.8 M thread 1/8 Nil R 1/4 N NPT 3/8 1/2 Specifications Fluid Compressed air Max. operating pressure Note 1) 145psi (1.0 MPa) Noise reduction 30 dB(A) Note 2) Ambient and fluid temperature 41 to 140F (5 to 60C) Note 3) Note 1) It indicates

VCL

19 M5 8 1/4, 3/8 VCL31 24 (25) 59 (66) 46 57 60 54.5 48.5 101 57 68 104 30 50 86 36.5 13.5 15 32 25 23 M5 8 1/2 26 (26.5) 64.5 (71.5) 48 62.5 62 60 50.5 103 62.5 70 107 22 45 90 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 26 (26.5) 66.5 (73.5) 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 94 41 13.5 17 36 25 23 M5 8 1/2 26 (26.5) 70 (77) 48 68 62 65.5 50.5 103 68 70 119 35 60 102 41 17.5 17 36

Speed Controller with One-touch Fitting

) AS22m1F-02-06PA 6 10.4 23.4 32.7 (32.8) 20 (20) AS22m1F-02-08PA 8 13.2 23.9 33.2 (33.3) 14.2 20 (21) AS22m1F-02-10PA 10 15.9 26.9 36.2 (36.3) 15.6 21 (22) AS32m1F-03-06PA 6 7.2 20.9 30.2 (30.3) 1/4 17 (17.5) 22.6 36.6 35 29 (28.5) 27.4 (26.9) 13 13.3 37 (39) AS32m1F-03-08PA 8 13.2 22.7 33.9 (34.3) 14.2 38 (40) AS32m1F-03-10PA 10 15.9 26.7 37.9 (38.3) 28 15.6 39 (41) AS32m1F-03-12PA 12 18.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500