Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Ionizer IZS40/41/42 Series

RoHS Ionizer IZS40/41/42 Series How to Order Type 40 Standard type IZS 40 IZS 42 1600 1600 10 10 B B Type 40 Type 41/42 Made to Order Bar type Type 41 42 Feedback sensor type Dual AC type IZS41 IZS42 Sensor Symbol Sensor Built-in sensor Feedback sensor Auto balance sensor [High accuracy type] Nil F G Emitter cartridge type/Emitter material Symbol Nil C J K Feedback sensor cannot be used

Ionizer Series IZS40/41/42

RoHS Ionizer Series IZS40/41/42 How to Order Type 40 Standard type IZS 40 IZS 42 1600 1600 10 10 B B Type 40 Type 41/42 Made to Order Bar type Type 41 42 Feedback sensor type Dual AC type IZS41 IZS42 Sensor Symbol Sensor Built-in sensor Feedback sensor Auto balance sensor [High accuracy type] Nil F G Electrode cartridge type/Electrode needle material Feedback sensor cannot be used for the

Air Cylinder Series MB

41 19.6 25.4 31.2 37.0 47.3 47.3 16.5 21 26 31 39 39 79.5 69.5 Note 1) When using cotter pin, flat washer is used together.

SYJA300

SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set (Ex.) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set The asterisk denotes the symbol for assembly.

Series SYJA300 3 Port Air Operated Valve

SS3YJA5-40-031-01 SS3YJA7-41-031-01 SYJA714 1 pc. 2 pcs. 1 pc. 1 pc. 2 pcs. 1 pc. SYJA514 SYJ500-10-3A . SYJ700-10-2A .. Pilot Pressure Range 0.6 Pilot pressure (MPa) Pilot pressure range 0.5 0.4 Caution 0.3 Be sure to read before handing.

Compact Cylinder

Caution 0.5 8 8 7 Operating Precautions 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the switch with the existing screw installed on the switch body.

Compact Cylinder with Solenoid Valve/

Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

2/3 Port Valve for Various

$ ' $ # ' ,*# ./ 01 ( *# ./ 2 01 $ ./ 23 ##4 #1 /47 .81 < :# /4; .71 + + 47 ./1 + /4 ./31 /;3 /;> /3 /3 17-3-4 Series VX / VXZ22/23 VXH22 VXF21/22 VX31/32/33 . !"! !#! !"! !"! !"! 0 !#! 0"!#! !"! 0 !#! 0" #!

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

HAW

AD Accessory (Option) GD Applicable model HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 Auto drain AD402-04 AD600-06 AD600-10 Model Selection (Flow Capacity l/min (ANR)) JIS Symbol Model HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 50C 2000 6000 12000 12000 12000 18000 1000 70C 100C 180C Inlet air temperature

Series HAW Water Cooled Aftercooler 1

HA Accessory (Option) AT HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Applicable model Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 ID Auto-drain AD402-04 AD600-06 AD600-10 AMG Model Selection (Flow Capacity l/min (ANR)) AFF HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model 1000 70C 100C 180C 50C 2000 6000 12000 15000 22000 30 Inlet air temperature

PFxx-OMJ0005CN

/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

type 01 VV5FS2 1 06 01 The insert plug is attached to the manifold block and lead wire is plugged into the valve side.

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

PSxx-OMU0002CN

N01 C4H C6H N7H C4L C6L N7L M5X0.8 R1/8 NPT1/8 4 mm 6 mm 1/4 inch 5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g +39 g 0.15mm 2(AWG26) 1.0 mm (5 ) 3.5 -77No.PS-OMU0002CN-D M5 42.6 7 M50.8 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16

ZQ-OM01301

Maintenance 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 41 -

PSxx-OMU0008CN

ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (1F.S.=1.1000.01=0.011[MPa]) F.S. ( 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] R.D.

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure