AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Vacuum System Peripherals:

3 3 8 1.1 M V VX3334 -03 M V 4 VX3244 -03 1.6 M V VX3344 -03 For Vacuum Pad Orifice dia.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R Port Rc (PT)1/8 40/41 Type How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714-l SYJ714M-l SYJ724-l SYJ724M-l R Port Rc (PT)1/8 R Port Rc (PT)1/4 Valve model P Port Rc (PT)1/8 01 Rc (PT)1/8 A port side P Port Rc (PT)1/4 Stations 40 Type 40 Applicable blank plate ass'y SYJ700-10-2A 2 stations 02 41 Type 41 .. ..

VFA3000

VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

5 Port Air Operated Valve Series VFA3000 1

VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

125

04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket (VEX312 only) Body

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) With 1 pc. 70 75 80 85 95 100 15 D-A9 70 + 40 (n 4)/2 n = 4, 8, 12, 16 80 + 40 (n 4)/2 n = 4, 8, 12, 16 85 + 40 (n 4)/2 n = 4, 8, 12, 16 95 + 40 (n 4)/2 n = 4, 8, 12, 16 100 + 40 (n 4)/2 n = 4, 8, 12, 16 15 + 40 (n 2)/2 n = 2, 4, 6, 8 75 + 40 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

MNB

Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1

MNB

Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1

C95

Contents CK95-32 CK95-40 CK95-50 CK95-63 CK95-80 CK95-100 32 40 50 63 80 100 Kits include items 13 to 17 for 32, 12 to 18 for 40 to 100 from the table above.

MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

VCA

Thread type Rc G NPT NPTF Nil F N T Stations 02 : 10 2 stations : 10 stations D side U side 1 2 3 4 5 How to Order Valves (VCA30/40) VC A 5 1 G 3 4 03 For air Thread type Rc G NPT NPTF Nil F N T Series 3 4 Class 3 Class 4 Port size (OUT) 5 N.C. for manifold Valve type Symbol 03 04 06 Class 3 Port size 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Fluid General air Dry air Nil A Orifice size Orifice

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-L-01 3 4 5 M plug connector (M): SYJ5 40-M-01 3 4 5 DIN terminal (D): SYJ5 40-D-01 3 4 5 M8 connector (W0): SYJ5 40-W0-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 Max. 10 75.4 50.1 [57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 103.4 [107.8] 59.3 123 [127.4] 45.5 45.5 45.5 45.5 18.1 43.3 17 17 17 17 17 17 17

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

PA300/500/700

Model Manifold base model R port model Common Individual Port size Applicable valve model Series VV3PA3-411-02 n VV3PA3-423-02 n VV3PA5-411-03 n VV3PA5-423-03 n VV3PA7-411-04 n VV3PA7-423-04 n Rc Rc Rc Rc Rc Rc 1 4 1 4 3 8 3 8 1 2 1 2 VPA300 VPA344 VPA500 Common Individual VPA544 VPA700 Common Individual VPA744 Option Description Part no.

LEC-OM02904

(1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 .

A

-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

SYA3000/5000/7000

VZA VFA SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.) SY5000-26-2A 1 set (Blanking plate assembly part no.) VFRA Operating pressure MPa The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.