5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series or less VFS2230 VFS2220 0.35 1 4 1 8 1 4 1 8 1 4 1 8 1 4 Closed center VFS2320 VFS2330 0.42 600 40 or less Exhaust center VFS2420 VFS2430 600 40 or less 0.42 Pressure center VFS2530 VFS2520 0.42 600 40 or less Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.
20 44 45.5 101 to 400 263 299.9 258.4 299.5 161.5 32 20 to 100 262.7 88.2 17.1 291.3 116.8 17.1 251.1 76.6 17.1 290.6 116.1 17.1 156 13 25 51 56.5 101 to 500 292.7 321.3 281.1 320.6 186 Size Stroke range [mm] H J K L M O1 R PA PB V S T U PC Y 25 15 to 100 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 15.4 8.2 40 45 46.5 1.5 15.9 71.5 101 to 400 32 20 to 100 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 15.4
-X 20Data 10-13-6 10-13-7 5 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 How to Order ML2B 25 500 L Y7BW Number of auto switch Applicable counter/Controller Basic type Series CEU1 Series CEU5 Series CEU2 Nil S n 2 pcs. 1 pc. n pcs.
-X 20Data 10-13-6 10-13-7 5 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 How to Order ML2B 25 500 L Y7BW Number of auto switch Applicable counter/Controller Basic type Series CEU1 Series CEU5 Series CEU2 Nil S n 2 pcs. 1 pc. n pcs.
300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.
-A-40. 9-10 9.4.3 HRSH090-W-20-HRSH090-W-40. 9-11 Pump capacity . 9-12 9.4.4 HRSH090-A-20/40-HRSH090-W-20/40. 9-12 9.5 Types of hazard labels . 9-13 9.5.1 Locations of Hazard Labels . 9-14 9.6 Compliance standard . 9-15 9.7 Sample DoC. . 9-16 9.8 Daily Check Sheet . 9-17 Chapter 10 Product Warranty . 10-1 HRSH Series HRX-OM-R026 Contents HRSH Series HRX-OM-R026 Chapter 1 Safety Instructions
(Example) VV5Z3-40-031-M5 1 pc. (Manifold base) VZ3140-5G-M52 pcs. (Valve) DXT192-13-1A1 pc. (Blanking plate assembly) VV5Z3-43-031-C41 pc. (Manifold base) VZ3140-5LZ1 pc. (Valve) VZ3240-5LZ1 pc. (Valve) DXT192-13-1A1 pc. (Blanking plate assembly) EVS VFN The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
40 40 50,63 40 40 40 32 32 32 32 32 32 11 (5) 10 20 30 50 40 51 100 101 300 200 11 (5) 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 110 (50) 110 (50) 100 100 100 80 80 80 Load mass m lbs (kg) Load mass m lbs (kg) 100 100 80 80 100 22 (10) 22 (10) 80 11 (5) 10 100 20 29 30 5051 300 200 11 (5) 10 100 20 29 30 50 51 300 200 Stroke (
Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Mass (g) -X YB-05 50, 63 120 11 12 22 60 6.5 YU-03 17 15.8 14 M8 x 1.25 8 25 11 7 6 YU-05 50, 63 Individual -X 17 19.8 18 M10 x 1.5 10 40 13 7 6 YB-08 80 230 14 16 28 75 8.5 YU-08 80 M16 x 2 22 24.8 23 13 90 20 9 8 YB-10 100 455 18 18 36 90 10.5 YU-10 100 M20 x 2.5 26 29.8 28 14 160 26 11 10 833 Series CLQ Minimum Auto Switch Mounting Stroke
40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.
0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35
13 A B SMC SMC SMC B B B A A A A A PA PA PA A B A B L1 L2 L1 L2 A B SMC PA A B PA L side R side L side R side D side 40 (53) D side (2n-Rc1/8) 17 2 82.5 34 14 154 (single) 82.5 4n-Rc3/8, 1/2 175.5 (double) 154 (single) 59 62 94 175.5 (double) 180.5 175.5 (3 position) 180.5 175. 5 (3 position) Bottom port drawing 171.5 183.5 139 14 12 PA PB P 40 (41.5) 67 80.5 R2 R1 38 (27) 4-Rc1/8 5 1 3
Ht BY IA 43 25 40 Max.Wc 36 35 13 D 30 Width across flats K Ws Width across flats 44 Clevis width CLK1A: 16.5 R15 0.050 0.093 +0.027 0 Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 CLK1B: 19.5 Z + Stroke S + Stroke 1.5 27 2 40 57 97 ZZ + Stroke Approx.
Ht BY IA 43 25 Max.Wc 40 36 35 13 D 30 Width across flats K Ws Width across flats 44 R15 Clevis width CLK1A: 16.5 0.050 0.093 +0.027 0 Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 CLK1B: 19.5 Z + Stroke S + Stroke 1.5 27 2 40 57 97 ZZ + Stroke Approx.
10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 11 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control
How to Order H N 40 B8 ZPX B01 Pad diameter (mm) Mounting thread 100, 125 40 50 40 50 40, 50 63, 80 B8 B10 M8 x 1.25 63 63 M10 x 1.5 80 80 B12 M12 x 1.75 100 100 125 125 Vacuum entry B01 Rc 1 8 Material Pad type N S NBR Silicon rubber H Heavy duty U Urethane rubber F Fluoro rubber E EPR 13-11-77 10 Series ZPX ZPX H-B01-B (Female thread) 40 50 ZPX H-B01-B (Female thread) 63 80 Hexagon width
Symbol 2 to 8 10 to 16 20 to 32 40, 50 02 04 06 08 10 13 16 20 25 32 40 50 Suffix 2 4 6 8 10 13 16 20 25 32 40 50 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 B4 M4 x 0.7 Female thread Applicable cylinder model Symbol M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Nil ZC(D)UK 16 to 32 M10 x 1.25 B10 Material Note) -X11 pad: 2 to 8 diameter and flat style
to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196
B1 C D E F 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20