PSE200

Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

MM GA Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20

1.63

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

MHY2/MHW2

or main body. 2.8-12 180 Angular Gripper Series MHY2 MHY2-20D 2-M5 X 0.8 Depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 +0.030 0 4H9 Depth 4 2-M4 X 0.7 2-M5 X 0.8, 10 deep (Thread for mounting attachment) 8 10 0.005 0.025 (Mounting thread) 5 9 2-5.5 (Mounting hole) 2-M5 X 0.8 Depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 MHZ2 21H9 Depth

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

CQM

NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 8 80 41 14 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7-5-8 9 Series CQM Compact

KB

24 27 18.0 27.0 2.1-77 Piping Module Series KB 2 Air Supply Port Male connector socket: KBB H (Hex.) 8 10 14 19 T Connecting thread M5 X 0.8 M6 X 1 Rc(PT) Rc(PT) Weight (g) Part No.

Compact Cylinder

x 1.25 6 14 26 19 19 19.5 20 M12 x 1.25 7 17 30 22 19 19.5 20 M12 x 1.25 7 17 30 22 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8 x 1.25 10.5 13.5 11

Table of Contents

22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

M5 thread With 3.2 One-touch fittings With 4 One-touch fittings With 6 One-touch fittings M5 thread 2(B) (A)4 Side ported 5 (R1)5 1 (P) 3(R2) Note) For double solenoid specification, the function symbol below is D.

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

When ordering SI manifolds add suffix "X11" at end of P/N 7 Series VQ100 How To Order How to Order Valve VQ1 1 0 5 L M5 Subplate option Without subplate With M3 subplate With M5 subplate M3 M5 Series VQ Compact 3 port valve Manual override Type of valve actuation Normal close type Non-locking recessed type Latching type : Locking recessed type Locking tool type 1 B * Note) The manual override

MGG

Dimensions 20 to 50 Reinforcing bracket Mounted in case of 301mm or longer strokes (mm) Width across flats HT Front mounting flange Bore size (mm) R Y HS HT HU B 14 108 28.5 14 30.7 20 14 108 31 14 33.2 25 14 110 34.5 14 36.5 32 HS C D 15 121 39 14 41 40 View C-C' 16 136 49.5 17 46.2 50 16 139 56.5 17 53.2 63 HU 23 165 75.5 23 62.2 80 D' C' 23 165 86 26 72.7 100 A Dimensions other than the

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure

Self-seal Fittings Series KC

L M Nylon Urethane M5 0.8 KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 18 2.1 2.6 2.4 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 4 8 1 8 10 11.8 12 14 M5 0.8 10 16 14 20 27 25 34 43 48 41 19.5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2

Slider Type/Ball Bushing Bearing

7 90 9 18 52 53 39 20 10.5 14 20 8 33.6 8 16 5 7 9.5 66 26.5 24.5 M10 x 1.5 15 100 9.2 110 12 26.5 64 64 47.5 25 11.5 14 25 8 41.6 10 20 5 10 10.5 78 30.5 28.5 M10 x 1.5 15 136 9.2 130 12 35 76 74 56 30 PA (N) (NA) (NB) ta P PB PW Q tb MM NN QW T TT W Z M RW Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 Shock absorber RB0805 45 M5 x 0.8 0.5 M8 x 1.0 M5 x 0.8 70 95 90 1.0 30 12.5 22.5 92 112 8

PA300/500/700

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

MXF

For details, refer to page 8-30-31. 8-6-14

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators 57 54 60 120 120 A C 45 14 14 3 x M4 x 0.7 thread depth 8 25 25 M5 x 0.8 M5 x 0.8 13 M5 x 0.8 Finger closing port P.C.D.36 (Mounting thread) Finger closing port Finger opening port M5 x 0.8 Finger opening port 44 14h9 0 -0.043 18 1.5 55.5 +0.02 +0 3 x 4 depth 8 9 2 (A, B, C common view) 28.5 37 12 (60) 10 21 M5 x 0.8 thread depth 5 Vacuum suction