Plug-in/Plug Lead: Single Unit

Polarity Lead wire color Dot marking SOL.A 1 () (+) Black None SOL.B 14 () (+) Yellow Black 1 station 1 1 2 3 Stations D side U side 14 SOL.A 2 () (+) Brown None 2 15 VQC SOL.B 15 () (+) Pink Black 2 stations 3 16 4 SOL.A 3 () (+) Red None 17 5 SOL.B 16 () (+) Blue White 3 stations SQ 18 6 19 SOL.A 4 () (+) Orange None 7 SOL.B 17 () (+) Purple None 4 stations 20 VQ0 8 21 SOL.A 5 () (+) Yellow

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

JA/JAH/JB/JS

5 7 8 7 10 13 17 22 27 14.4 19 24.8 29 38.4 49.2 17 23 29.9 33.5 38 47.5 80 210 JS20-8-125 JS32-10-125 M8 x 1.25 M10 x 1.25 43.9 49.5 1100 2500 6000 11000 JS40-14-150 JS63-18-150 M14 x 1.5 M18 x 1.5 60 74.5 11 13.5 Rod end nut (mm) d: Thread nominal size 30 Description H B C D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10

IDG

IN OUT 9 24 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 97 8.5 115 118 Purge air for dehumidification 5 M5 x 0.8 Drain Drain (Maintenance space 100 mm or more) 5.5 M5 x 0.8 With fittings for purge air discharge (Option: P) Purge air discharge tubing port for

JA/JAH/JB/JS

x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10 x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Dimensions with dashed lines stand for a locking knob type or push-locking knob type (latching type). 13 Series VQ100 Non Plug-in Subplate Mounted Valves VQ110-G-M5 28 Manual override 4.9 4.9 12.4 15 E 2-2.7Mounting hole 12 17 2.5 (Lead wire length) About 300 In case of locking knob type SMC SMC VQ110 G 30.7 28 11 7 JAPAN A P (5.9) 5 (5.9) 5 5 (4.1) 4.9 3-M5, (M3) 4.9 8.5 (28) ( ) : In

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5

Modular/F.R.L. Units Series AC

J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter

Series IDG

Page 17 Order Made . Page 33 Model Selection .Page 37 Flow Rate Characteristics . Page 39 Purge Air Flow Rate Charts ... Page 41 Precautions .

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

x 0.8 thread depth 8 2-M6 x 1.0 (Through-hole) 4-M5 x 0.8 thread depth 7.5 30 (Z) 19 11.5 T 9 20 2-M5 x 0.8 thread depth 8 2-M8 x 1.25 thread depth 12 (30) (Z) 8 75 0.2 16 (mm) S SS ZZ Z Part no.

Compact Cylinder

Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 51 52 53 57 44 45 45 49 12 12 16 16 16 16 20 20 46 52 64 74 8.5 9.5 10.5 14.5 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 59 67 82 96 2 3 2 3 14 14 17 17 7 7 8 8 32.5 38 46.5 56.5 5.5 5.5 6.6 6.6 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 9 9 10.5 10.5 14.5 14.5 13.5 15.5 11 11 15 15 5 5 5 5 1 1 1.6 1.6 15 17 17 17 32 40

ZP

Form w 1 Material e Width across flats K A Connection thread 10 13 A5 38 17 2.5 M5 x 0.8 M3 x 0.5 3.5 21 8 4 8 16 38.5 17.5 10 13 43 17 2.5 M6 x 1 M3 x 0.5 3.5 26 8 4 8 16 43.5 17.5 20 25 45 19 C2 N S U F GN GS A6 ZP T U Construction p. 117 32 45.5 19.5 40 50.5 24.5 12 50 51.5 25.5 20 25 A8 Adapter Assembly p. 121 40 24 4 M8 x 1 M5 x 0.8 5 16 12 4 12 32 40.5 24.5 40 4.2 50 41.5 25.5 1 N:

MHF2

screws) Auto Switch Mounting Groove Dimensions 2-2.5H9 +0.025 0 depth 2.5 18 4.5 18 4.5 1.7 4 2-M4 x 0.7 thread depth 5 Mounting thread 3.3 3 15 Groove for auto switch mounting 90 12-3-17 18 Series MHF2 Dimensions MHF2-16D 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 57.5 5 M5 x 0.8 Finger closing port 50 72 2-M5 x 0.8 thread depth 5.5 Mounting

MHF2

M5 x 0.8 Finger closing port 50 72 2-M5 x 0.8 thread depth 5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (Mounting hole) 27 25 25 M5 x 0.8 2-7.5 1.2 1.2 Finger opening port E-E +0.1 0 Close: 0 Open: 161 4-M5 x 0.8 thread depth 5.5 Mounting thread 36 8-M4 x 0.7 thread depth 4 Attachment mounting thread Auto Switch Mounting Groove Dimensions 20 43 2.2 2-3H9 +0.025 0 depth

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 782 MXS 1322Air Slide Table Dimensions: MXS8 1322Basic 2 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 7 2 Vacuum suction port M5 x 0.8 5.5 J 6 Max. 9.5 (Stroke adjuster at retraction

Air Slide Table Series MXW

Width across flats 8 5H9 + 0.030 0 depth 4.5 Operating port M5 x 0.8 6 x M4 x 0.7 thread depth 6 Note) A Operating direction (Insert) 6 (Plug: M-5P) 58 27 46 5 24 26 29 26 103 6.5 Operating port M5 x 0.8 Y Y 26 B Operating direction 5H9 + 0.030 0 depth 4.5 (Plug: M-5P) Operating direction B A 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA 3 4 x M5 x 0.8 thread depth 10 3 x H G

VQ5000

) D side 2-6-16 17 Base Mounted Series VQ5000 Plug-in Unit Bottom ported drawing 2-G 3/4 Conduit port 2n-Rc 1/2 4(A), 2(B) port VQC 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 SQ VQ0 34.5 34 VQ4 n U side 12 X VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Compact Cylinder

Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8 x 1.25 10.5 13.5 11 5 1.6 17 57 49 16 20 74 14.5 M10 x 1.5 96 3 17 8 56.5 6.6 M8 x 1.25 10.5 15.5 11 5 1.6 17 7 ISO Standards