MXS Series Air Slide Table

port 2-Rc(PT)1/8 13 3 J 12 Max.14.5 (With stroke adjuster at retraction end) I 6.5 14 8 Basic type 15 14 12 6.5 NA-M6 X 1 thread 6.5 deep 12 25 6.5 K 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end N-M5 X 0.8 thread 10 deep 6 18 46.5 (With stroke adjuster at extension end) (Helisert) 5 (With stroke adjuster at retraction end) 6 6-M5 X 0.8 thread 8 deep 2 (With stroke

Clamp Cylinder with Lock

87.5 52.5 5.5 14 118.5 230.5 51 63 74 74 20 69 82 72 17 58 M16 x 1.5 M5 x 7 91 53.5 5.5 19 122 234 57.5 Note) Refer to page 14 and 15 for Accessories.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Approx. 216 with AMC610-10 installed (approx. 261.5 with AMC810-14 installed) D side entry (LD) Approx. 100 with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with

XL

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

Electric Actuators

entry) 14.5 (14) 28.5 +0.025 0 3H9 ( ) depth 3 2 x M5 x 0.8 thread depth 9 19 5 J G F 4 +0.025 0 3H9 ( ) depth 3 Note 1) Range within which the rod can move when it returns to origin.

Auto Switch Guide

CP95 Auto switch mounting screw M5 x 0.8 x 16 l 1.

Compact Vacuum Unit

(Fig. 3) Bracket part number for single unit: ZB1-BK1-A Two mounting screws (M2 x 0.55 inch (14 mm), with washer) and two M2 nuts are included. Recommended fittings: KJH04-M5, KJL04-M5, KJW04-M5 Manifold Caution 1.

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

ZP3

M5 x 0.8 Use the connection thread. M5 x 0.8 Use the connection thread. Use the connection thread.

Basic Type/Direct Mount Type

45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11

Auto Switch Guide

MLU ML1C Auto switch mounting screw M5 x 0.8 x 16 l 1.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

High Vacuum Angle Valve, XL Series

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

Air Slide Table Series MXS

(L) 45 31 18 14 40.8 6 8 12 1.4 M4 x 8 20.5 10 15 18.5 M4 x 15 M8 x 1 MXS-BT16 (L) 55 37 23.5 16 46.7 7 10 14 1.4 M5 x 10 23 12 18.5 21 M5 x 18 M10 x 1 MXS-BT20 (L) 70 47 29 23 67.3 11 12 19 12 M5 x 12 27 13 25.5 25 M6 x 25 M14 x 1.5 MXS-BT25 (L) 80 54 35 23 67.3 12 15 19 12 M6 x 16 33 17 25.5 31 M8 x 25 M14 x 1.5 Size of hexagon socket head cap screw It is also available with the symmetric

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

MHF2

18 4.5 18 4.5 1.7 4 2-M4 x 0.7 thread depth 5 Mounting thread 3.3 3 15 Groove for auto switch mounting 90 14 Series MHF2 Dimensions MHF2-16D Scale: 50% 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 57.5 5 M5 x 0.8 Finger closing port 50 72 2-M5 x 0.8 thread depth 5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (mounting hole

CJP

MB MB1 Symbol Bore size (mm) S A A' B B' D F F' GA GB H J K MM NN R 5 st 10 st 15 st 20 st 30 st CA2 6 10 15 35.5 40.5 45.5 30.5 7 M10 x 1.0 7 9 14 14 3 8 6.5 6 6 17 6 8 M3 x 0.5 35.5 40.5 45.5 55.5 30.5 M12 x 1.0 8 10 12 15 17 5 8 6.5 6 7 20 7 8 M4 x 0.7 CS1 M14 x 1.0 35.5 40.5 45.5 55.5 30.5 10 12 14 20 19 6 10 8.5 6 7 24 9 8 M5 x 0.8 C76 Symbol Z C With auto switch Bore size (mm) W 5