Air Cylinder

11.5 19 31 43 4.5 CS1 16 11 19.5 31.5 43.5 49.5 73.5 91.5 103.5 5 D-M9lV 10 11.5 11.5 19 31 43 4.5 CS2 16 11 11 19.5 31.5 43.5 49.5 73.5 91.5 103.5 5 D-A9l 10 7.5 15 27 39 0.5 16 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 D-A9lV 10 7.5 7.5 15 27 39 0.5 16 7 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 Rail mounting D-F7l/F7lV D-J79/J79C D-A7lH/A80H D-A73C/A80C 10 10.5 10.5 18 30 42 3.5 16 10 10

15

Motor flange Body side hub [Built-in parts] Spider [Built-in parts] Size: 25 Hub Mounting Dimensions [mm] Size: 32 Hub Mounting Dimensions [mm] Size: 40 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 11 NY M2.5 x 10 1.00 8 11 NX M2.5 x 10 1.00 8 5.5 NM1 M3 x 4 0.63 5 11 NM2 M2.5 x 10 1.00 6 11 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX

CRBU

11-3-4.

REA/REB

43 41 6.5 23.5 M6 x 1 x 8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 QW T W X Y LD MM N P PW Q WS Z K L M Model REAR10 14 19.5 20 15 39.5 3.5 M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc

REA/REB

43 41 6.5 23.5 M6 x 1 x 8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 QW T W X Y LD MM N P PW Q WS Z K L M Model REAR10 14 19.5 20 15 39.5 3.5 M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc

TABLE OF CONTENTS

COIL NO. 6 7.8 8.5 12 14 5.4 7 7.7 11 13 3 3.8 4.4 6 7 5C-103-A24 5C-104-A24 5C-105-A24 5C-106-A24 5C-107-A24 5C-3-K24 5C-4-K24 5C-5-K24 5C-6-K24 5C-7-K24 18.5 24 32 39 45 17 22 29 35 41 9 12 16 20 23 5C-108-A24 5C-109-A24 5C-110A24 5C-111-A24 5C-112-A24 5C-8-K24 5C-9-K24 5C-10-K24 5C-11-K24 5C-12-K24 48 54 94 120 153 43 48 85 110 138 24 28 47 60 76 5C-113-A24 5C-114-A24 5C-115-A24 5C-116

Compact Cylinder

9 (6.5) 18.5 11 15.5 27.5 22 15 5 22 15 17.5 37.5 18.5 11 9 (6.5) 18.5 11 16.5 35 ( ): D-A93 For actual setting, check the operation of the auto switch and adjust as necessary.

XM, XY

x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1 U1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Cylinder with Lock Series CLS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Lock Monitor Manual Unlocking Warning Caution 1.

SFOD-OMT0005CN

(P.41) (CN1: EMG OFF 3.(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

Brake mechanism added

25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to 600 40 80 37 131.5 41 116 56.5 25 92 35.5

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Hexagon width across flats 21 11 Width across flats 37 45 Width across flats 24 28 4 x M4 x 0.7 H 3 x M3 x 0.5 H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B D B D Dimensions Model Dimensions (mm) (mm) A B C D E G H I Y A B C D E G H I Y F F Model ZPX40HB-01-B 8 ZPX63HB-01-B10 M8 x 1.25 M10 x 1.5 40 41 28 43 20.5 47 69 13 63 65 46 68 31.5 58 80 21.5 32 43 -B10 -B12 M10 x 1.5 M12 x 1.75 ZPX50HB

CJ2

CM2 Refer to page 6-3-11 for details of the mounting nut.

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Rotary Clamp Cylinders

Weight Unit: g D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Caution 0.5 8 8 7 Lead wire length (m) 3 41 41 38 Precautions 5 68 68 63 Fix the switch with the existing screw installed on the switch body. The switch may be damaged if a screw other than the one supplied is used.

Speed Controller with Indicator

AS301FS, AS311FS AS401FS, AS411FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 06, 07 1000 500 500 0 0 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable tubing

Series: 1 (VQZ1000), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting)

Series: 2 (VQZ2000), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting)

Series: 1 (VQZ1000), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: R (External Pilot)