MLU I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.
-0.1 -0.2 10 14 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke (mm) Bore size (mm) S Z ZZ CI H 168 177 24 40.5 97.5 20 177 186 30 44.5 102.5 25 16 Series MQM Refer to the standard type on page 14 for other dimensions.
3/4-16 1.13 5.80 1.500 1.81 1/2-20 2.88 4.10 2.75 1.38 5.88 600 (6") 1.375 1-14 1.63 6.90 2.000 1.81 1/2-20 3.13 4.88 3.25 1.63 6.63 800 (8") 1.375 1-14 1.63 9.10 2.000 2.31 5/8-18 EE 1/2 NPT 3/4 NPT 3/4 NPT E 5.50 6.50 8.50 LF+ 4.50 5.00 5.13 3.25 6.44 4.25 1.63 6.75 7 Series NCA1 Cylinder Large Bore Dimension Drawings MF1 Rod side rectangular flange (F) P + Stroke W 2-EE B 4-FB KK MM R
Symbol Bore size (mm) A A' B B' D E F GA GB H J MM NN R FC FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 M3 x 0.5 7 3.4 1.6 24 16 32 M10 x 1.0 10 10 12 15 17 5 13 8 6 7 20 7 M4 x 0.7 8 4.5 1.6 28 18 37 M12 x 1.0 15 12 14 20 19 6 15.5 10 6 7 24 9 M5 x 0.8 10 5.5 2.3 36 22 49 M14 x 1.0 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P
Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P
25 40 NC 14 21.3 32.4 NE 27 35.5 56.5 B 9.5 14 17.5 C 5.4 8.6 10.8 G 8.5 10.7 15.5 LB 87.4 124.7 148.3 (LL) 40 49.6 75 A 80 105 165 LD 5.5 9 11 LE 5 6 8 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PG 10 12.5 20 PH 10.2 13 18.5 PI 41 57.6 72 PB 80 110 132 PC 4 9.4 8.5 PD 23 29.2 36 PA 44 63 113 PE 1 3.4 0.5 RW 69 100 116 SS 9.7 14 21.5 TT 12.5 19.3 35.4 QW 66 98 110 R
20 18 36 10 57.5 195.2 7 11.2 6.6 59 33 158.4 71.5 64 79.5 78 5.5 76.5 8 65.5 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 84.5 46 177.4 97 95 109.5 113 9 107 9 91 80 92 108 60 203 238 14 224 20 30 22 44 14 89.5 Dimensions for auto switch model D-F79W. 10-12-25 25 Series
20 18 36 10 57.5 195.2 7 11.2 6.6 59 33 158.4 71.5 64 79.5 78 5.5 76.5 8 65.5 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 84.5 46 177.4 97 95 109.5 113 9 107 9 91 80 92 108 60 203 238 14 224 20 30 22 44 14 89.5 Dimensions for auto switch model D-F79W. 10-12-25 25 Series
20 18 36 10 57.5 M6 x 1 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 177 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 8 14.7 9 39 173.4 79 95 6.6 9 67 76 89 50 193 202 235 14 221 20 28 22 44 14 76.5 215.7 71 83.5 M8 x 1.25 94 91 78 9 16.2 11 46 177.4 95 9 9 80 92 60 194 203 238 14 224 20 30 22 44 14 89.5 219.2 M10 x 1.5 91 84.5 97 109.5 113 107 108 DDimensions for auto
(Page 20) Communications RS-232C/RS-485 Weight Approx. 14 kg Approx. 18 kg Approx. 21 kg Approx. 31 kg Approx. 33 kg Accessories Power supply connector, Operation Manual Power supply cable should be ordered as an option (sold separately, page 22) or prepared by the user.
Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
23.5 18 12 31.8 24.5 5.5 6.5 20 33.8 26.5 14 10 17 18.8 23 12 31.8 24.5 7.5 6.5 26 14 33.8 26.5 24 7 8 30 19.3 19 14 34.3 27.5 12 27 8 9 35 97 Reference dimensions after R(PT) thread installation.
26 13 10 45 6 37.5 5.5 30 20 34.5 Up to 700 32 M10 x 1.25 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 Up to 1000 40 M14 x 1.5 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 Up to 1000 NN P RR S U Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 9 146 14 217 226 25 M26 x 1.5 Up to 700 1/8 9 146 14 221 230 32 M26 x 1.5 Up to 1000 1/8 9 159 14 234 243 40 M32 x 2 Up to 1000
Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise
M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146 14 217 226 150
258-9200-www.stevenengineering.com SOL.A 7 7 () (+) Blue None SOL.A SOL.B 20 20 () (+) Red White 7 stations SOL.B Stations are counted starting from the first station on the D side.
B6re_~i~e' Sl roke: ~~e ,:(n ;n;q) ." i\ i\L 0 8 B DC 0 E F FD FT FX FY FZ G " J V (mml M 14 x 1,5 145 160 143 157 43 43 19 19 14 20 190 212 100 230 125 )40 50 47 47 11 5 128 32 32 71 71 15 15 15 Upto 1000 : rs ,.: 50 ':liP to fP OO 11 2 255 M 14 x,:1,5' 160 Up to 1200 56 53 177 I 180 144 38 78.5 42 19 20 236 118 j 275 18 M1 6 x 1.5 15 40 141 'h stroke 267 (mm) With rod boot f h , ZZI Without
L L D D Min. bore M L Model 10.4 3 31.6 4 KK3P-04L 5.3 7.2 16 3.7 18 10 12.8 4.5 32.8 6 -06L 11.4 8.0 17 10.1 20 18.4 1/8 15.2 34 8 -08L 16.8 9.7 18.5 15.0 12 23 6 18.5 36 10 -10L 18.5 23.0 21 18.0 17 26.5 12.8 4.5 40.2 6 KK4P-06L 11.4 19.6 17 10.1 20 14 15.2 6 41.4 8 -08L 19.8 21.3 18.5 17.5 23 25.2 1/4 18.5 7.5 42.8 10 -10L 27.5 25.7 21 24.7 26.5 17 44 -12L 29.6 28.0 29.0 20.9 9 12 22
20 18 36 10 57.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 46 177.4 95 9 9 91 80 92 60 203 238 14 224 20 30 22 44 14 89.5 84.5 97 109.5 113 107 108 Dimensions for auto switch model D-F79W. 16 Series CEU Series