Piping: 42 (Base Mounted), Stations: 3 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted), Stations: 4 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted), Stations: 5 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted), Stations: 6 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted), Stations: 12 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted), Stations: 18 Stations, A, B Port: C6 (ø6 One-touch Fitting)

HRX-OM-W002

21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

One-touch Fittings

[mm] 1 D Weight [g] Nylon Urethane X D Round type 4 1/8 KQ2U04-01GS 10 8.2 7.7 36.5 33.4 13.3 8.2 5.7 6 3.2 4.2 4.2 3.6 9.3 1/4 KQ2U04-02GS 14 8.2 7.7 40.9 36.2 13.3 8.2 5.7 6 3.2 4.2 4.2 3.6 19.1 4 to 12 6 1/8 KQ2U06-01GS 12 10.4 9.7 37.6 34.5 13.3 10.4 6.8 6 3.2 13.4 10.6 5.4 10.3 1/4 KQ2U06-02GS 14 10.4 9.7 42 37.3 13.3 10.4 6.8 6 3.2 13.4 10.6 5.4 19.2 3/8 KQ2U06-03GS 17 10.4 9.7 43.4

HRX-OM-X084

State (7): AL.14 report since 45 sec has elapsed since the circulating fluid temperature deviated, because it is outside the upper temperature monitoring range. TEMP OUT output ON. State (8): The alarm is reset manually, the temperature monitoring upper and lower limit range is out, so "AL.14", "AL.15" warning continue.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

30 19 14 Up to 1400 Lube Non-lube Air-hydro 255 232 160 161 128 90 212 112 255 16 M14 x 1.5 98 1/2 M30 x 1.5 110 75 40 133 50 36 59 15 35 47 43 14 31 24 19 20 Up to 1400 0.2 x Stroke 273 252 40 180 182 144 90 236 118 275 18.5 M16 x 1.5 106 3/4 M36 x 1.5 120 75 141 56 40 59 17 39 53 43 36 14 26 19 20 Up to 1400 295 277 45 200 204 162 115 265 132 320 18.5 M18 x 1.5 111 3/4 M40 x 1.5 135 85

Series H, DL, L, LL Self-align Fittings

Weight (g) A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DY04-01 15 6.9 32 DY04-02 17 19 4 23.5 10 10 36.5 40 DY06-01 16 36 DY06-02 16 17 10 36.5 23.5 6 19 42 14 12 DY06-03 22 66 26.5 42.2 38.5 39.5 42.2 43.5 42.2 47.3 47.5 47.2 47.3 119 DY08-01 18 44 32 8 14 DY08-02 16 21 51 14 12 24.5 DY08-03 22 69 26.5 56 10 17 DY10-02 23 70 14 26.5 DY10-03 17 22 77 DY10-04 27 28.5 116 DY12

HRX-OM-X071

output is set) Elapsed time Alarm manual reset Alarm manual reset State : An alarm "AL.14" is issued when the chiller is activated.

CM2

I-020B I-032B I-040B E1 L1 MM H A1 MM +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 9 14 10 16 20 36 M8 X 1.25 9 9 10 14 18 46 66 41 9 M8 X 1.25 M10 X 1.25 9 14 10 18 20 38 9 9 10 14 22 48 69 45 9 M10 X 1.25 M14 X 1.5 15.5 16 20 14 22 24 55 12 16 20 24 69 92 50 12 M14 X 1.5 Double Knuckle Joint (mm) Bore size 20 25/32 40 A L NX2 R2 U2

Serial Transmission System Series EX250 Series EX500

-05B-C6 1 set (manifold part no.)

SMC Pneumatic Clean Series

58 70 9 11 9 9 80 104 40 3 82 11 11 100 128 50 3 100 14 14 Bore size 20 25 32 40 Note) End boss is machined on the flange for E.

E-P HYREG ® Series VY1 1

(With spring washer) ( ) View A 14-10-12 13 E-P HYREG Series VY1 Related Products: Precautions Silencer (Series AN) Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reducing effect: 30 dB or more.

CS1

Eliminate the unnecessary parts. 1.10-14 Air Cylinder Series CS1 Rear Flange/CS1G Lube (CS1G), Non-lube (CS1GN), Air-hydro (CS1GH) CJ1 CJP CJ2 CM2 C85 With auto switch/CDS1G CG1 MB C95 CA1 CS1 (mm) Style Bore (mm) Stroke range (mm) J B AL A FX FT FD MM FA N E F KA B C D EA FY FZ G K P 125 140 160 180 200 250 300 1/2 M30 X 1.5 145 145 115 190 100 230 M14 X 1.5 50 47 36 59 16 15 14 19 14 35

IDX-OM-W053

T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 . 14-3 15 V 15-1 . 15-1 15-2 . 15-2 15-3 . 15-2 16 16-1 . 16-1 2 i i i 1 () OFF 3 ON OFF i 1 1 3 i 1 i i 2 5 i 2 1 i-2 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-3 i i 2 6 WARNING !



Set pressure (MPa) 14-6-14