CRBU

550 62.2 289 504 63.2 77 81 151 Body of rotary actuator Auto switch unit + 2 switches Angle adjuster 30 60 46.5 30 50 30 150 203 47 90 11-3-3 Series CRBU2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except standard shaft type (W).

EtherNet/IP TM Compatible Fieldbus System

Item Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 130 130 (5) Size: Perform setting as shown below.

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

AC Servo Motor Driver (CC-Link Type)

600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Suction Filter with Case FH99 Series

75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1/2B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 2B 250 140 115 218 150 60 90 77.8 42.9 42.9 77.8 21.5 10 21.5 2B 2 1/2B M16 x 2 Thread depth 34 M16 x 2 Thread depth 34 300 170 150 268 180 80 120

VM

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

PSE550/300

(Not including sensor accuracy), Response speed: 150 ms or less Resistance Weight Analog output 0.6% F .S. or less 1.0% F .S. or less 1.5% F .S. or less Accuracy (To display value) (25C) IS Output current: 4 to 20 mA (Within rated pressure range) Current output Note 2) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 ZSM Linearity: 0.2% F .S.

IDX-OM-M051

Acid consumption [pH4.8](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L)

Compact and Lightweight

60 60 150 60 60 ZH Air consumption Suction flow rate 100 40 40 100 40 40 ZH -X267 Suction flow rate 50 20 20 50 20 20 ZHP ZU 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 20 40 60 80 Supply pressure [MPa] 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 20 40 60 80 100 120 140 0 0 Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Supply pressure [MPa] VQD-V ZH20SA ZH20LA Exhaust Characteristics Flow

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

Rotary Actuator/Vane Type

(Rotation range of single flat (key) when mounting 2 stopper blocks on the other sides groove is the opposite side from and the setting range is within either right 50 or 60 against port A and B.) Four chamfers for wrench Long groove Stopper block Section A-A (Double vane) Section A-A (Single vane) 60 50 Note) For size 40, each stopper block comes with 2 holding screws.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25, 50, 75, 100, 125, 150, 200 25 to 100 25, 50, 75, 100, 125, 150, 200, 250, 300 Intermediate strokes of 1 mm each can be produced. (The spacer is not used.)

Multistage Ejector Series ZL112.212

(l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate 250 125 Suction flow rate 80 80 70 70 200 100 60 60 ZA Air consumption Air consumption 150 50 50 75 40 40 100 50 ZX 30 30 20 20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 150 150 F 0.3MPa 0.3MPa 100 100 0.2MPa 0.2MPa 50 50 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L mm Gripping point L mm MHS2-50D MHS2-50D F 400 400 Internal gripping Pressure 0.6MPa Pressure 0.6MPa 300 300 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 200 200 0.3MPa 0.3MPa 1N: Approx. 0.102kgf

Shot Pin Cylinder

Deflection + L F F (Dimension when extended) + M Built-in coil scraper and Lube-retainer MAllowable lateral load graph MSelectable proximity switches CKZP57L TURCK P&F 400 Allowable lateral load [N] 350 300 250 200 MAdjustable connector angle 150 100 CKZP57L: 45, 90 CKZP71: 0, 45, 90 50 0 0 50 100 150 200 250 Offset distance L [mm] CKZP71 0 50 100 150 200 250 300 350 400 450 500

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

Low Differential Pressure Sensor

(not including sensor accuracy), Response speed: 150 ms or less Resistance Weight Analog output 0.6% F.S. or less 1.0% F.S. or less 1.5% F.S. or less Accuracy (to display value) (25C) Output current: 4 to 20 mA (within rated pressure range) Current output Note 2) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 Linearity: 0.2% F.S.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223