0.4

K Note 2) Negative common N Note 3) Coil voltage CE-compliant External pilot R Note 3) Note 5) 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 381 for power consumption of AC type.

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

MXF

0.12 0.04 0.04 MXF16-50 CX MXF16-50 0.03 0.03 0.08 MXF16-30 D0.02 0.02 MXF16-30 0.04 0.01 0.01 -X 20 40 60 80 100 0 0 20 40 60 80 100 120 60 0 40 80 100 20 20Load (N) Load (N) Load (N) Data MXF20 Lr = 50 mm 0.10 0.10 0.28 MXF20-100 MXF20-100 Table displacement amount (mm) Table displacement amount (mm) 0.24 Table displacement amount (mm) 0.08 0.08 MXF20-75 0.20 0.06 0.06 0.16 MXF20-50 MXF20

CNG

2 2 MNB 1 1 CNA 0.5 100 500 400 300 200 100 0.5 500 400 300 200 1000 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 200 200 CLQ 100 100 40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100

Digital Flow Switch (Integrated display type) ( compatible)

A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0EX500-AC 050 DN 7 1 2 5 14.9 Cable length (L) 4 3 40.7 50 Socket connector pin assignment 010 1000 mm 050 5000 mm L Terminal no.

IP8101 Series

= 81.0% ( ) (75A) 100% position = 100.0% ( ) 100% 100 Quick opening 50 Linear Stroke (Y) User Equal percentage 50 0 0 100 100% 0% Input current (X) Fig. 29 7: Be sure to set all 11 date items.

Table of Contents

Series CQ2 Compact Cylinder: Long Stroke Type Double Acting, Single Rod 32, 40, 50, 63, 80, 100. How to Order . Precautions. Specifications. Construction. Dimensions . Series RQ Compact Cylinder with Air Cushion 20, 25, 32, 40, 50, 63, 80, 100. Features. Series Variations. Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod 20, 25, 32, 40, 50, 63, 80, 100 .

Cylinder with Lock Series CNS

500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 2000 600 CNS 500 160 160 CLS 140 400 1000 140 700 800 900 CLQ 125 320 Load mass: m (kg) Load mass: m (kg) 125 300 RLQ 600 500 MLU 400 200 300 MLGP ML1C 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

/

VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115 VAC] 50/60 Hz 220 VAC [230 VAC] 50/60 Hz 24 VDC 12 VDC Note 1) Refer to the below table (1) for combinations with light/surge voltage suppressors.

HRL

50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating

Low Profile Slide Table Series MXF

(N) Load (N) Load (N) MXF20 MTS Lr = 50 mm 0.10 0.06 0.28 Table displacement amount (mm) Table displacement amount (mm) MXF20-100 MXF20-100 Table displacement amount (mm) 0.24 0.08 MXF20-100 MXF20-75 MXF20-50 MXF20-30 MXF2075 0.20 0.06 0.04 0.16 MXF2050 MXF2075 0.12 MXF2030 0.04 0.02 MXF2050 0.08 MXF2030 0.02 0.04 50 100 150 40 80 120 240 200 160 200 50 100 150 200 0 0 0 Load (N) Load (N

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 7) Fixed unit: kPa 100 to 100 kPa/PNP open collector 2 outputs, with suction filter 100 to 100 kPa/NPN open collector 1 output + analog voltage, with suction filter 100 to 100 kPa/PNP open collector 1 output + analog voltage, with suction filter Suction filter only !

Air Slide Table/Long Stroke Type Series MXY

Nil 6 50, 100, 150, 200 1 pc.

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Low Friction Cylinders Series MQ

, 75, 100 54 M6 x 1.0 M6 x 1.0 42 12 12 (11.8) 45 8.5 Rc 1/8 NPT 1/8 G 1/8 49.5 60 7 7 4.5 10 12 34 5.5 9 23 10 30 10 to 50, 75, 100 60.5 M8 x 1.25 M6 x 1.0 48.5 13 16 (15.8) 52 8.5 Rc 1/8 NPT 1/8 G 1/8 57 69 7 10 5 14 12 40 5.5 9 26 10 40 10 to 50, 75, 100 62 M8 x 1.25 M8 x 1.25 50 13 16 (15.8) 64 12 Rc 1/4 NPT 1/4 G 1/4 71 86 8 10 7 14 12 50 6.6 11 26 14 Note) ( ): Rod end dimensions With