Multistage Ejector (N)ZL Series ] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate [l/min(ANR)] Suction Flow rate [l/min (ANR)] Time to reach vacuum Time to reach vacuum Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure
Mounting: L (Foot), Bore Size: 50mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9PA--Solid State, Water Resist., 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Mounting: L (Foot), Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Mounting: L (Foot), Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.
Mounting: L (Foot), Bore Size: 40mm, Thread: TN (NPT Thread), Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)
Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100/60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:
Mounting: L (Foot), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: 3 pcs.
Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100/60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:
Mounting: Foot, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 3 pcs.
Mounting: Foot, Bore Size: 50mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9PA--Solid State, Water Resist., 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -
Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 3 pcs.
Mounting: Foot, Bore Size: 40mm, Thread: NPT Thread, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -
Mounting: Both Ends Tapped, Bore Size: 40mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: F7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 3 pcs.
0.15 mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of
Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150
10 to 60 (No freezing) Dustproof and jetproof (Equivalent to IP65) Environment with no corrosive or explosive gas 0.2 or less Free 30/150 or less 24/12 VDC, 100/110/200/220 VAC (50/60 Hz) 10% rated voltage B type VCA2: 6.5 W Valve type Fluid Withstand pressure MPa Body material Seal material Ambient temperature C Fluid temperature C Enclosure Atmosphere Valve leakage cm3/min (ANR) Mounting
90 80 70 60 50 40 MK/MK2 REC40 Operating Symbol REC32 pressure RSQ/RSG Mounting bracket symbol and figure REC MPa REC25 30 Load weight M (kg) 25 32 40 20 RSH REC20 20 Front flange: F Rear flange: G 39 50 56 61 0.3 Foot: L L CE1 10 30 38 43 47 0.5 W W W CE2 F 5 24 31 36 39 0.7 11 17 19 21 0.3 ML2B 7 11 13 13 G 0.5 ML1C 1 10 50 100 200 300400 Max. speed u (mm/s) (Initial cushioning speed)
95 x 125l x 100l 125 50 (M) 50 (M) 100 x 150l CHKGB25 M5 x 55l 150 75 (M) 5 (M) 55 x 175l x 60l 175 100 (M) 10 (M) 60 M12 x 85l x 60l 85 CHKGB63 5 (M) 15 (M) 65 x 90l x 70l 90 10 (M) 20 (M) 70 x 95l x 75l 95 15 (M) 25 (M) 75 10.4 x 100l x 80l 100 20 (M) 30 (M) 80 x 105l x 85l 105 25 (M) 35 (M) 85 x 110l x 90l 110 30 (M) 40 (M) 90 16 x 115l x 95l 115 35 (M) 45 (M) 95 x 120l x 100l 120 40
MXY8 Table deflection mm Table deflection mm Table deflection mm MXY8 DMXY8 MXY6 0.04 MXY6 MXY6 0.03 -X 0.02 0.01 200 Load N 0 20 40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 Data 8-9-9 9 Series MXY Table Deflection Table deflection due to pitch moment load Displacement at A when load is applied F Table deflection due to yaw moment load Displacement at A when load is