48

Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 CAT.NAS100-78 CAT.NAS100-101 Front matter 2 Electric Actuators RotaryTable Step Motor (Servo/24 VDC) Miniature Step Motor (Servo/24 VDC) Rod type Slide table type Basic type High precision type Series LEPY Series LEPS Series LER Series LERH Stroke

SFOD-OMT0009CN

mm mm mm 1 ABS 100 50.00 1000 1000 0 0 0 0.5 2 ABS 100 50.00 1000 1000 0 0 0 0.5 1 3 ABS 100 50.00 1000 1000 0 0 0 0.5 4 ABS 100 50.00 1000 1000 0 0 0 0.5 1 INC 50 10.00 1000 1000 0 0 0 0.5 2 INC 50 10.00 1000 1000 0 0 0 0.5 2 3 INC 50 10.00 1000 1000 0 0 0 0.5 4 INC 50 10.00 1000 1000 0 0 0 0.5 57 No.SFOD-OMT0009CN-B () ... ...

Pilot Operated

N.O. 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz 1 2 3 VXD21 VXD22 VXD23 Symbol Nil 2 Valve Symbol Nil 2 Valve N.C. N.O.

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

EX120/121/122

How to Order EX9-FU EX510-DX EX510-DY3 EX510-DY4 10 Applicable model Rated current Rated insulation capacity Fuse resistance value 1 A 5 A Fuse rated current 48 VAC/DC 50 A 0.145 18 m 10 50 1 A 5 A 1721 Series EX510 Ordering Examples Shown is an example for ordering the EX510 series.

3

moment of inertia [kgm2] Allowable moment of inertia [kgm2] 102 102 MK 103 103 50, 63 Standard arm single unit 32, 40 Standard arm single unit 104 50 100 200 104 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 386 Model Selection MK Series Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed.

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 ABS 100 50.00 1000 1000 0 0 0 0.5 2 ABS 100 50.00 1000 1000 0 0 0 0.5 1 3 ABS 100 50.00 1000 1000 0 0 0 0.5 4 ABS 100 50.00 1000 1000 0 0 0 0.5 1 INC 50 10.00 1000 1000 0 0 0 0.5 2 INC 50 10.00 1000 1000 0 0 0 0.5 2 3 INC 50 10.00 1000 1000

MGP

1.87 2.17 2.41 2.64 2.88 50 MGP50 1.84 2.19 2.31 2.72 2.78 2.96 3.15 3.33 3.83 4.20 4.57 4.94 63 MGP63 2.18 2.53 2.65 3.06 3.12 3.30 3.49 3.67 4.18 4.55 4.91 5.28 80 MGP80 4.58 4.58 4.81 5.10 5.38 5.67 5.96 6.25 7.08 7.66 8.23 8.81 100 MGP100 7.26 7.26 7.33 7.74 8.52 8.94 9.36 9.77 10.9 11.7 12.5 13.4 7-3.MGPS-( (kg) (mm) (mm) 25 50 75 100 125 150 175 200 50 MGPS50 2.69 3.03 3.64 3.98

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100

60

Rated voltage Note) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Rated voltage Note) Coil insulation type Note) 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC Nil H Class B Class H DIN terminal and DC spec. are not available.

pa

Ratio of discharge rate against fresh water (%) PAX PB 50 0 1 10 100 1000 Viscosity (mPas) Caution Viscosities up to 1000 mPas can be used.

Booster Regulator/Air Tank

50 Drain port 1/4 100 200 100 400 674 200 696 (mm) A 481 520 444 477 B 394 429.8 394 429.8 C 3/8 1/2 3/8 1/2 D Note) 469 493 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

0.4

K Note 2) Negative common N Note 3) Coil voltage CE-compliant External pilot R Note 3) Note 5) 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 381 for power consumption of AC type.

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

MXF

0.12 0.04 0.04 MXF16-50 CX MXF16-50 0.03 0.03 0.08 MXF16-30 D0.02 0.02 MXF16-30 0.04 0.01 0.01 -X 20 40 60 80 100 0 0 20 40 60 80 100 120 60 0 40 80 100 20 20Load (N) Load (N) Load (N) Data MXF20 Lr = 50 mm 0.10 0.10 0.28 MXF20-100 MXF20-100 Table displacement amount (mm) Table displacement amount (mm) 0.24 Table displacement amount (mm) 0.08 0.08 MXF20-75 0.20 0.06 0.06 0.16 MXF20-50 MXF20

CNG

2 2 MNB 1 1 CNA 0.5 100 500 400 300 200 100 0.5 500 400 300 200 1000 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 200 200 CLQ 100 100 40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100

Digital Flow Switch (Integrated display type) ( compatible)

A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L