Air Suction Filter Series ZFA 1

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3

High Vacuum L Type Valve

H4 Initial power / 100 VAC 200/40 200/50 400/100 600/150 Power Symbol 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Air Suction Filter

ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 Manifold Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 Number of manifold stations Symbol Single unit Note) Model 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10

P-E99-4A Air Cylinder with Drop Prevention Mechanism — Cylinder with End Lock & Cylinder with Lock — Prevents dropping when air supply decreases or residual pressure is exhausted  Cylinder with End Lock Pick and place Locking door Drop prevention at stro

Bore size (mm) 16 20 25 32 40 50 63 80 100 125 140 160 180 200 250 Series Locking method Locking direction Best Pneumatics 2 Lever + Wedge CLJ2 Both directions Best Pneumatics 2 Lever + Wedge CLM2 Both directions Catalog Ball + Taper ring CNG Both directions Best Pneumatics 2 Ball + Taper ring CNA Both directions Air cylinders Catalog Ball + Taper ring MNB Both directions Catalog Ball + Taper

TL/TIL

Max. operating pressure (at 20C) Burst pressure (at 20C) Min. bending radius (mm) Max. operating temperature (Fixed use) Material Note 1) 1 MPa 1 MPa 0.7 MPa 0.9MPa 0.7 MPa 0.6 MPa 0.5 MPa 4.9 MPa 6.9 MPa 4.7 MPa 3.6MPa 2.9 MPa 2.6 MPa 6.4 MPa 9.9 MPa 6.7 MPa 7.9 MPa 6.7 MPa 4.6 MPa 2.8 MPa 2.0 MPa Note 2) 20 40 65 110 12 20 6 30 60 160 160 290 260C Super PFA Note 1) The maximum operating

2/3 Port Valve

24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160

VQ7-6/7-8

CAT.E154A ISO Standard Solenoid Valve Series VQ7-6/7-8 (Size 1) (Size 2) Conforms to ISO Standard 5599/I Series VQ7-6, Series VQ7-6, (Size 1) Large flow capacity 100 (VQ7-6, Size 1) 160 (VQ7-8, Size 2) Cv factor VQ7-6: 1.7 VQ7-8: 3.2 Ideal for driving cylinders up to Conforms to ISO standard 5599/I Interfaces conform to ISO standard Size 1 (VQ7-6) and Size 2 (VQ7-8).

TL/TIL

Max. operating pressure (at 20C) Burst pressure (at 20C) Min. bending radius (mm) Max. operating temperature (Fixed use) Material Note 1) 1 MPa 1 MPa 0.7 MPa 0.9MPa 0.7 MPa 0.6 MPa 0.5 MPa 4.9 MPa 6.9 MPa 4.7 MPa 3.6MPa 2.9 MPa 2.6 MPa 6.4 MPa 9.9 MPa 6.7 MPa 7.9 MPa 6.7 MPa 4.6 MPa 2.8 MPa 2.0 MPa Note 2) 160 290 20 40 65 110 12 20 6 30 60 160 260C Super PFA Note 1) The maximum operating

Air-hydro Unit CC Series

Moving forward Moving backward 160 L Actuator 1168 A

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Type Length 10 m 20 m 50 m 100 m Symbol 10 20 50 100 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

4 Port Solenoid Valve Series VQD1000

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Base mounted Series CJ2 Series CM2 Series CM2 Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm TU0425 x 1m VQD1151U AS1201F-M5-04 AS2201F-02-04 AN120-M5 Tube bore x Length Series Average speed (mm/s) Speed controller Silencer 6 10 16 20 25 32 40 400 450 500 Perpendicular, upward actuation Horizontal actuation 350 300 250 200

CLA

Off-DeJ av 200 50 mS Off-Delay time 20 -Auto SWitch Series eLA Reed Type Internal Circuit 0-853, 0-A53 0-A64, 0-864 D-A59W, D-859W Choke COIl a,own (t-) (red) Z8M! dod, ZOl'ler 0I0de '--c:::=~J_~ Blue t-)(b!

SI unit for Ethernet POWERLINK

OFF Note 1: ON/OFF 50 ms flashing Note 2: ON 200 ms single flash, OFF 1 s Note 3: ON/OFF 200 ms double flash, OFF 1 s Note 4: ON/OFF 200 ms triple flash, OFF 1 s Note 5: ON/OFF 200 ms flashing -15No.EX-OMV0023-A Switch setting The switches should only be set with the power supply turned off.

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

Bore) BT-18 (180 Bore) BT-20 (200 Bore) our new part # C95D Tie Rod Mounting BT-03 (32/40 Bore) BT-05 (50/63 Bore) BT-06 (80/100 Bore) -F5PSDPC NCDA1 Tie Rod Mounting NBT-150 (1.5" Bore) NBT-200 (2" & 2.5" Bore) NBT-325 (3.25" & 4" Bore) "SC" auto switch CDQ2/NCDQ Direct Body Mount BQ-2 (32/40/50/63/80/100 Bore) Screw & Nut Kit included with cylinder "SC" auto switch CDRA1 Rail Mounting

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 69 56 32 24 Station L1 L2 L3 L4 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 20 341 328 304 296 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQ4 Response time Life VQZ VQZ1000 10ms 200 million cycles Built-in One-touch fittings for easier piping VQZ2000 12ms VQD VQZ3000 15ms VZS Dispersion accuracy2ms Metal seal, Single solenoid with light and surge voltage suppressor lntegral One-touch fittings save on installation time and labor and can be easily removed if necessary.

ZP

0 to 60 0 to 250 0 to 100 10 to 200 X X X X X X X X X X X X X X X X X X X X X X X The above table covers only general characteristics of subject rubber materials.

0.4

300 200 600 500 250 150 Flow rate 100 L/min type Note 1) 24 VDC, Duty ratio 1:1 80 W: Current needs to be limited by using an energy saving driver circuit. 40 W: Current needs to be limited by using an energy saving driver circuit. 10 W: Energizing time is one second at a maximum.

VCHN

die-casted Hexagon bolt Stainless steel C B D Width across flats PAT. 7 A Freeze reduction type/Option VCHNF Sleeve guide Resin Sleeve Copper tubing -06 to 14 3 4 AN VCHN (mm) AMC Model Port size (R) A B C D Mass (g) VCHN3-06 VCHNF3-06 VCHN3-10 VCHNF3-10 VCHN4-10 VCHNF4-10 VCHN4-12 VCHNF4-12 VCHN4-14 VCHNF4-14 3/4 200 72 74 41 590 AMV 3/4 200 72 74 41 710 1 200 72 74 41 605 AMP 1 200 72

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DC Specification Temperature increase (C) Note) Power consumption (W) (Holding) 24 VDC 0.19 0.29 0.44 Inrush current (A) (Inrush time: 200 ms) Model 12 VDC 0.38 0.58 0.88 25 25 30 1.5 2.3 3 VXE21 VXE22 VXE23 Note) Value for ambient temperature at 20C and when the rated voltage is applied.