3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

42

40 0.6 Outlet pressure [MPa] B EB 37 19 37 0.5 Note 1) Set the pressure within the operating pressure range of the valve.

Air Catch Sensor

Station L1 L2 2 110 3 145 36 4 180 71 5 215 106 6 250 141 Unit Manifold With DIN rail Deflection level indicator Terminal block box 35 40 L1 Deflection level indicator 75 40 Terminal block box Rc1/8 SUP. 25 DIN rail center 70 (94.4) 90 25 (94.4) SUP 70 4.5 90 40 (4.5) 30 4.5 Adjusting knob Gauge Electrical entry Applicable O.D. 6.5 to 8.5 12 L2 L3 Gauge 105 Electrical entry Applicable O.D

VCA

48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

Series VCS

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).

Coolant Valve

6.1 9.3 7.9 13.2 14.3 20.0 14.3 20.0 22.5 29.3 25.7 34.3 35.4 53.6 35.7 57.1 42.4 60.6 63.1 86.5 7 0.3 0.2 11 15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 45 65 56 80 3 8 0.7 0.5 1 2 3 4 0.8 1.0 1.2 1.4 1 1 4 1 2.2 2.4 5.0 5.2 32 1 2 1 3.6 3.8 Symbol 6.8 7.0 40 Valve type Operation N.C.

VCA

48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers

VXA31/32

Construction/ Principal Parts Material Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Water (Standard) Air (Standard) Oil (Standard) (V, M) Maximum Minimum 40 1 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

3

35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67

PFxx-OMJ0005CN

60% 40% 92% 8% 1.050.0 L/min 1.052.5 L/min 052.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20% 1.040.0 L/min 1.042.0 L/min 042 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2100 L/min 2105 L/min 0105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 290 L/min 295 L/min 095 L/min 4.60 V 18.4 mA 70% 30% 280 L/min 284 L/min 084 L/min 4.20 V 16.8 mA 60% 40% 420 mA 15V [mA] [V] -76No.PF-OMJ0005CN-I Revision

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).

T

Burst pressure Operating temperature 20 to 60C 3 Polyurethane Material 2 1 Maximum operating pressure Maximum operating pressure 0 20 0 20 Operating temperature (C) 40 60 Precautions How to Order Be sure to read before handling.

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 225/85, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 225/85, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 225/110, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 225/110, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 250/135, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 260/110, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 260/110, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 225/85, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: