MXH

(mm) Displacement (mm) 40 50 0.2 0.2 25, 30 40 Stroke 15, 20 0.15 0.15 25, 30 5, 10 0.1 0.1 15, 20 5, 10 0.05 0.05 0 0 0 0.17 0.33 0.50 0.67 0.82 0.37 0.57 0.76 0.96 0.20 0 Yaw moment My (Nm) Pitch moment Mp (Nm) MXH16 MXH16 0.16 0.3 60 50 40 0.14 60 50 40 0.25 Displacement (mm) Displacement (mm) 0.12 0.2 0.1 25, 30 Stroke 25, 30 15, 20 5,10 0.15 0.08 15, 20 5, 10 0.06 0.1 0.04 0.05 0.02

Square Tube Type Air Cylinder Series MB1

to 600 to 800 to 800 10 14 18 18 22 26 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114

MXH Series Compact Slide

socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 9 4-M4 x 0.7 Depth 10 4-M4 x 0.7 Depth 6 2-M5 x 0.8 9 5.5 17 21.5 52.5 53.5 25 25 27 5.5 26 27 6.5 6.5 16 17 5 NS 10 12.5 25 14 42 + Stroke 56 + Stroke 4-M4 x 0.7 Depth 6 12 10 + Stroke Stroke (mm) LT NS LB J LA 5 58 20 4 10 10 58 20 10 4 15 68 30 20 4 20 68 30 4 20 25 78 40 4 30 30 78 40 30 4 40 88 50 20 20 6 50 98 60 25 6 25

Cylinder with Turntable Series MGT

6 6 80 100 124 4 5 5 20 24 28 M10 x 1.5 M12 x 1.75 M14 x 2.0 D-X (mm) MGTM (Slide bearing) MGTL (Ball bushing bearing) (mm) AA A E BD Bore size (mm) 63 80 100 AA A E DB Bore size (mm) 63 80 100 Individual -X 25, 50st Larger than 50st 25, 50st Larger than 50st 25, 50st Larger than 50st 25st Larger than 100st 114 134 160 180 75st, 100st Larger than 100st 50st 75st, 100st Larger than 100st 37

E-MY2_E_D

Dowel pin holes Threaded holes for installation of work Installation of work tap Model Nominal of actuator Threaded hole dimension Effective length 16 M4 depth 7mm 4 to 7mm E-MY2C E-MY2H 25 M5 depth 9mm 5 to 9mm 16 M5 depth 9mm 5 to 9mm E-MY2HT 25 M8 depth 12mm 8 to 12mm Select screw which enables effective length of thread to enter.

HRX-OM-I051

4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen . 5-3 5.3.1 Model Indication screen . 5-3 5.3.2 Status screen 1 . 5-3 5.3.3 Status screen 2 . 5-4 5.3.4 Status screen 3 . 5-4 5.3.5 Status screen 4 . 5-5 5.3.6 Menu screen

CE

9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

CV/MVGQ

5 !6 !7 !8 !

0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

ML1C

5 5 5 7 28 26 14 44 20 16 12.5 120 42 8 D1/ 8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 8 1/ 4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51 10 -X 1113 ML1C Series Stroke Adjustment Unit EA EB EC ED EF EY S T EH EI TT h i Part no.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Air Slide Table Series MXW

moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 Maximum moment (Nm) Maximum moment (Nm) 30 40 (Nm) 50 MXW20 25 30 40 Pitch moment Yaw moment Roll moment MXW20 20 Model Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 10 15 5 5 3 MXW8 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 2 1.5 50 100 200 300 500 110 110

Compact Guide Cylinder Series MGQ

17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25 28 36 24 17.5 25 20 18.5 21 71.5 71.5 81 81 93 105 16 16 20 20 25 30 M10 x 1.5 M12 x 1.75 M14 x 2 Note) For intermediate strokes other

Pilot Operated

COM. 2 to 10 10 to 25 1.5 to 4 N.C./N.O. 1/8 to 1/2 N.C.

3

Operating Range (mm) Auto switch model Bore size 12 16 20 25 32 40 50 63 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 6.5 5 5 5 5.5 5 4 3 11 9.5 9.5 9 9 10 7.5 6 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W D-F79F/F7BA D-F7BAV/F7NT 7.5 6.5 6.5 6 6 6 Since this is a guideline including hysteresis, not meant to be guaranteed (assuming approximately 30% dispersion).

JA/JAH/JB/JS

32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

JA/JAH/JB/JS

size (mm) Nominal thread size Applicable cylinder nominal thread size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M22 x 2.5 M24 x 3 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A port) 2 5 2.5 21 2 10 5 46.9 (GZ, GS: 47.6) [48.6] 10.7 10 5 P R P R 25 26 A A A A A 2-3.5 (Lead wire length) 4-M5 X 0.8 (Mounting holes) (P/R port) G: 300 H: 600 L2 3.5 L1 Manual override Depress and turn to operate and lock override.

CXT

20 15 10 2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder

Vacuum Unit

ZK2 (Ejector System) 100 90 80 70 60 50 40 30 20 10 0 0 5 10 15 20 25 30 Suction flow [L/min (ANR)] 0.5 40 Release flow [L/min (ANR)] Vacuum pressure [kPa] Supply pressure [MPa] 0.4 0.35 0.3 30 20 0.2 10 0 0 1 2 3 4 5 6 7 8 9 10 Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.