Intrinsically Safe Valve

fluid temperature 2-position single, double 4-position dual 3 port valve 5 Max. operating frequency (Hz) 3-position 3 Non-locking push type, Push-turn locking slotted type, Push-turn locking lever type Manual override (Manual operation) Pilot exhaust method Main/Pilot valve common exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 150

HRX-OM-X084

(Up to 150 records will be recorded.) 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

HRX-OM-W002

(Up to 150 records will be recorded.) 10 Alarm history menu 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

HRX-OM-X071

(Up to 150 records will be recorded.) 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XL-OMV0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C

XL-OMY0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Micromist separator AMD900, 1000, 901 Model Connect (Flange) 2B 6B C 2B/3B/4B 400 A 280 B 760 D 150 E 270 F 1033 G 3 H 887 J 620 AMD801 AMD901 12B 445 795 300 520 1318 3 972 AMD800/900/1000 ORIENTATION Mounting Caution q Verify the direction of the flow of the compressed air and the "e" mark that indicates the inlet of the product before connecting.

VM

Inch size 1/4" 1/8" 5/32" Flow rate (l/min(ANR)) 170 100 120 150 IN OUT Effective area (mm2) 2.6 1.5 1.8 2.3 IN P1 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

Compact Guide Cylinder End Lock Type SeriesMGP

Models Standard strokes (mm) 32 40 50 63 MGP 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 M L Intermediate strokes (in 5mm increments) are produced by installing spacers of 5, 10, 15 and 20mm widths. When a special intermediate stroke body is needed, contact SMC.

Multistage Ejector (N)ZL Series

Suction flow rate Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate 250 125 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 200 100 60 60 Air consumption Air consumption 150 50 50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure

Electric Actuators

LG1 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Clean room Dust seal Deflection TSUBAKI 100 200 300 400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88 128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSC Operation Manual", section 3.6, section 3.7, section 5.4 for details of the positioning operation program for the remote register method. -120- 9. Troubleshooting 9.1 CC-Link communication error This section gives the definitions of the indications given in the communication alarm display section. The driver has four LED indications.

AP10PA

Pneumatic Actuation Pressure Regulator Low flow Series AP10PA Actuation control pressure isolated from process gas by two seals Body material: 316L SS secondary remelt High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (Option): to 120 slpm Ni-Cr-Mo alloy internals available for corrosion resistance 100 psig (0.69 MPa) outlet pressure achievable with

Multistage Ejector Series ZL112/212 1

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

-- NCM seies

It.o0 5.06 5.06 150 t]rn .375 .r-24 o.aa .471 .749 o.44 1.56 1.00 0.38 0.63 1.25 1.25 0.25 ,r-14 '|.12 1,8t 0.91 4.OO 4al (E Air Cvlinder Stainles5 Steel Cylinder Series NCM High Temperahrre,/Low Ternperature .

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

550 62.2 63.2 77 81 151 289 504 Body of rotary actuator Auto switch unit + 2 switches Angle adjuster 30 30 50 60 46.5 30 47 90 150 203 83 Series CRBU2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except standard shaft type (W).

VXA31/32

0.5 1.0 2.2 230 150 VXA3135-00 VXA3235-00 VXA3245-00 3 230 4 Note) Add the V type (VXA31) 80 g, (VXA32) 130 g Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

New

This is the same concept representing the easy to run through as sonic conductance C. (3) Formula for flow rate P1 + 0.1 P2 + 0.1 When 0.5, choked flow 293 Q = 120 x S (P1 + 0.1) .(3) 273 + t P1 + 0.1 P2 + 0.1 When > 0.5, subsonic flow 293 Q = 240 x S (P2 + 0.1) (P1 P2) .(4) 273 + t Conversion with sonic conductance C: S = 5.0 x C .(5) Q : Air flow rate [dm3/min(ANR)], dm3 (cubic decimeter

AFF

Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150