High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CQSX 12, 16, 20, 25 How to Order CQSX D B 20 30 Without auto switch 30 F9BW B 20 CDQSX D With auto switch Number of auto switches Built-in magnet 2 pcs. 1 pc. n pcs.

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 Symbol 3 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 5 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 6 A Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A VM121U

CNG

seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion ring gasket B NBR 59 C type snap ring for unlocking cam

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ2000 20 ms or less Cylinder Speed Chart Pressure: 0.5 MPa/Load factor: 50% Flow Characteristics Note) Series CJ2 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Base mounted Average speed (mm/s) Metal seal Rubber seal C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 800 700 600 500 400 300 200 100 0 Perpendicular, Upward actuation Horizontal actuation SQ1000 0.63 0.11 0.14 0.80 0.20 0.19 800 700

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Operating angle Hysteresis angle Model MDSU1, 3 110 10 MDSU7, 20 90 Auto switch Table B port A port Positioning pin hole 11-5-30

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQD 24V 12V 100V 200V 110V 220V 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 To remove manifold from DIN rail: 1) Loosen the clamp screw on the A side of both ends of the manifold. 2) Lift the A side of the manifold off the DIN rail and slide it in the direction of the B side.

VQ7-6/7-8

175.5 180.5 175.5 82.5 93 98 93 82.5 56(71) 56(71) 56(71) 56(71) 16(20)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 62(72) 75(86) 62(72) 75(86) 38 50 B A 38 50 B A Cable with connector Cable with connector PA R1 R2 P PA R1 R2 P (L 500) 49(64) 49(64) Mounting hole 2-7.5 (L 500) 49 (64) 49(64) Mounting hole 2-7.5 Indicator light Indicator

AIR COMBINATION

14 4 41 AC40-B 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 1/43/81/2 AC40-06-B 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 3/4 AC50-B 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 3/41 AC55-B 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20 6 60 1 1 AC60-B 1/8 297.4 234.1 44.7 98.1 110 43.3 3.2 70 101.2 50 11 20 6 60 Optional

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

Clamp Cylinder with Lock Series CLK1

Hs B 16 14 14 26 29 (36) D-C73C 8.5 A D-H7C 8.5 A Hs B B Hs 14 36.7 38.2 D-G5NT D-B5, B6 B A Hs Hs B A 24.5 24.5 13 33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting (mm) 1in = 25.4mm Minimum strokes are as follows based on the space required for mounting auto switches.

Rotary Table/Vane Style Series MSU

For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable A B 180 Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 10 10 22.5 DSize Allowable radial load (N) Allowable thrust load (N) Allowable moment (Nm) 1 10 15 20 0.3 A B Positioning pin hole 3 15 30 40 0.7 Adjustment bolt (A) Adjustment bolt (B) 7 30 60 50 0.9 20 For 180

Applicable Auto Switch Model

(RedGreenRed) CDJ2, CDVJ3, 5 10, 16 CDQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 CDlXW Plate mounted(P), 10, 16, 20, 25, 32, Housing mounted(B), 16, 20, 25, 32 CDY1S, CY1L 6, 10, 15, 20, 25, 32, 40 RSDQ 20, 25, 32, 40, 50 MDU 25, 32, 40, 50, 63 CE1 12, 20, 32, 40, 50, 63 MK, MK2 20, 25, 32, 40, 50, 63 CXT 32, 40 Specifications PLC: Programmable Logic Controller D-F7lW/D-J79W

Slider Type/Ball Bushing Bearing

CY1L15/20/25/32/40 Z + Stroke Hollow shaft for piping Auto switch mountable 2 x P 4 x MM Depth M 4 x J Depth JK 4 x Counterbore dia. B CY3B CY3R 4 x Counterbore depth.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

Fieldbus system PROFIBUS DP compatible SI unit

-B Analogue output unit parameters (1) Parameter setting No.

HRX-OM-S004

Fig. 4-1 Position of the earth leakage breaker (This drawing is [HRS150-A-20-B].) 2. Mount the front panel. 3.

HRX-OM-W058

Table 6.1-1 Specification of earth leakage breaker Model Rated current [A] Sensitivity of leak current [mA] HRS018-A-20-B-R HRS030-A-20-B-R 10 30 HRS0-A-20-BT-R (High pressure pump[optional]) 15 30 6.2 Option J [Automatic fluid filling] 6.2.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling.

CRBB-OM00004

head screw 2 23 Cross recessed round head screw 2 22 Cross recessed round head screw 2 21 Holding block (B) 2 28 20 Holding block (A) 2 19 Magnet 1 27 20 18 Magnet lever 1 Including No.19 17 Switch block (B) 1 16 Switch block (A) 1 15 Cover (B) 1 Gap 14 Cover (A) 1 13 Hexagon nut 1 12 Joint 1 11 Hexagon socket head cap screw 2 10 Hexagon socket head cap screw 2 9 Hexagon socket head cap

Plug-in Unit

B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM. spec. Positive COM. spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special Wiring Specifications (Option) COM () (+) 26 Positive COM. spec. Negative COM. spec. COM.