Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature
Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C),
Stations: 04 (4 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 04 (4 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.
Stations: 04 (4 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 04 (0.5 to 4 L/min), Supply/Return Port Size: 03 (3/8)
Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.
Stations: 04 (4 Stations), Supply/Return Unit Layout: U (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.
Stations: 04 (4 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.
Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.
Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE
Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.
Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE
Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE
Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE
Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE
Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.
Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.
Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For
B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange 30 3B flange 9 9 10 40 4B flange 40 4B flange 60 6B flange Type Type 00 With manual drain cock 10 With auto-drain
size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.