Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

end (E) 32 40 Head side pivot (C) 12 12 20 40 Double rod (W) Block mount (R) Note) Minimum stroke for mounting auto switches: 0.6 inch for 2 switches, 0.4 inch for one switch.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

T

Barb one-touch Reducer 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 15-6-28 5 Miniature Fittings Series M Barb fitting: M-3AU-2, M-5AU-2 Applicable tubing O.D. x I.D.

VK3000

Mixed Mounting of VK300 and Manifold Base of Series VK3000 Type VV5K3-20 Type VV5K3-40 1. In the case of VV5K3-20/40 When installing the 3 port valve on the manifold base, plug the R port at the corresponding mark side with the rubber plug (VK3000-8-1) as shown in the figures on the right. Plug Plug 2.

VK3000

Mixed Mounting of VK300 and Manifold Base of VK3000 Series Type VV5K3-20 Type VV5K3-40 1. In the case of VV5K3-20/40 When installing the 3 port valve on the manifold base, plug the R port at the corresponding mark side with the rubber plug (VK3000-8-1) as shown in the figures on the right. Plug Plug 2. Other manifold 3 port valve can be mounted without any work.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

PF2D Dimensions: Separate Type Display Unit PF2D30 -A Panel mounting type 0 1 Internal circuits and wiring examples z to , are terminal numbers. 40 41.8 OUT2 4.3 40.3 NC Sensor 8 Load 4 OUT1 Black Main circuit Main circuit 7 3 Load SMC FLOW SWITCH Brown + 6 2 35.8 36 Blue A 40 5 1 UNIT 12 to 24VDC Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimension 3 x 7.2(=21.6) 8-M3 36 +0.5

Piping: Base Mounted, Stations: 4 Stations, A, B Port: NPT1/8

Piping: Base Mounted, Stations: 4 Stations, A, B Port: NPTF1/8

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 2 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Control Unit: -, Voltage: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Control Unit: -, Voltage: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 4 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Control Unit: -, Voltage: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 6 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Control Unit: -, Voltage: -

Piping: Base Mounted, Stations: 4 Stations, A, B Port: M5X0.8

Solenoid Direction: Type 40: A Port Bottom Ported; Type 42: Opposite Side of A Port, Piping: A Port Bottom Ported, Stations: 4 Stations, Port Size: 1/8 NPTF, Bracket: -

Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 04 (1/2), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ L-Shaped Piping Adapter, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 04 (1/2), Set Pressure Range: 0.1 to 0.4 MPa, Pressure Unit of the Scale Plate: MPa, Lead Wire Length: 0.5m, Mounting Position: Right

Style: Pressure Switch with Piping Adapter, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 04 (1/2), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right