ZQ-OM01301

ZQ-OM01301-A Vacuum Pump System Manifold ZZQ108A-S O C-A (1) (2) (3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 2) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 2) Select S for the Option Symbol (10). (4) Shipping condition (2) Vacuum pressure

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

Secondary Batteries

(A) 4 (B) 2 C *Specifications and dimensions for the 90-series are the same as standard products.

Line filter

.: AMX-OMX0018-B PRODUCT NAME Line filter MODEL / Series / Product Number AFF20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AFF30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AFF40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

Guide Cylinder/Compact Type Series MGC

Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)

Rotary Actuator/Vane Style Series CRB2

CRB2BW15/20/30-D Q3 (Thread) Q1 (Thread) Q2 (Through-hole) A port B port Body (B) Body (A) 2 x R CRB2BW15/20/30-DE A port B port 2 x R (mm) Q (Depth) 90 100 R A B C D E (g6) F (h9) G1 G2 J K L M N P Model Q1 M3 (10) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10

33

1) C 10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating fluid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated flow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2

Micro Mist Separator

.: AMX-OMX0020-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AM20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AM30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AM40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

3 41 49 75 85.5 L1 L2 L3 L4 1.12-20 VQZ1000/2000/3000 Body Ported VQZ2000 (35) (5.5) 44.5 Mounting holes VV5QZ22 C 28 (11) Station 20 (7.5) DIN rail clamp screw n-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK

Soft Start-up Valve

Caution Without light SY100-61-1 SY100-61-1-C With light Rated voltage Voltage symbol Part number Part number (For AV) (For AVL) DC24V 24V SY100-61-3-05 SY100-61-3-05-C DC12V 12V SY100-61-3-06 SY100-61-3-06-C AC100V 100V SY100-61-2-01 SY100-61-2-01-C AC200V 200V SY100-61-2-02 SY100-61-2-02-C AC110V 110V SY100-61-2-03 SY100-61-2-03-C AC220V 220V SY100-61-2-04 SY100-61-2-04-C

AHC System Series MA

1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 1-YNM5 MA3 1-YNM5-R1 MA3 1-YNM5-R2 MA3 1-YNM5-R3 MA3 1-YNM5-R4 MA3 1-YNM5-R5 MA3 1-YNM5-S6 MA3 1-YNM5-R6 MA3 0-AM3 MA3 0-AM5 500 MA Air pressure port 6 x M5 x 0.8 10 11 D35 AHC unit (Double Acting) Electrical contact points: 12 14 15 580 20 24 41 25 250 Tool adapter 270 751 Series MA3 With D-sub connector MA3-YM5Robot adapter MA310-C D-sub connector

LC6D/LC6C

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

Compact Cylinder with Air Cushion Series RQ

YU-03 RS M W T2 V J E T1 B 2-D through K ( across flats) 2-O counter bore Joint H (with locking) d2 d1 mm Bore size (mm) B D E J M O Part no. L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.

MY1

15 26 73.2 13 (Max.38) 6 5.5 1357 MY1W Series Side Support Side support A MY-SA 2 x G 2 x H E E F A B C D Side support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A 61 71.6 15 26 4.9 3 6.5 3.4 M4 x 0.7 B MY-S20A 67 79.6 25 38 6.4 4 8 4.5 M5 x 0.8 B MY-S25A 81 95 35 50 8 5 9.5 5.5 M6 x 1 B MY-S32A 100 118 45

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Compact Type Dual-Rod Cylinder Series CXSJ

H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3 through 2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

Air Slide Table Series MXJ

Mey = 1/3 x 0.56 x 9.8 x (50+11)/1000 = 0.116 We = 0.56 A3 = 11 Obtain Meay = 1.1 from V = 140 in Graph (2). 2 = 0.116/1.1=0.1 2 = Me/Mea 1.1 Meay N.m D-X 140 V mm/s 3-3 Sum of Load Factors 1 + 2 + 2' = Applicable because 0.07 + 0.07 + 0.1 = 0.24 < 1 Individual -X Possible to use if the sum of the load factors does not exceed 1. 1 + 2 < 1 171 Series MXJ Fig. (2) Allowable Static Load: F(N

IDX-OM-U010

. 10-1 10.3 CONNECTION OF POWER SUPPLY. 10-2 Chapter 11 Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter

CEx-OMQ0011

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1