New

Fluid and Ambient Temperature Valve Leakage Internal Leakage Fluid temperature (oC) Ambient temperature (oC) Seal material Leakage rate Note) Size 106 Pam3/sec or less Size 1, 2 20 to 60 FKM 1 Note) to 60 Size 3 20 to 40 External Leakage Note) No freezing Seal material Leakage rate Note) 106 Pam3/sec or less FKM Note) Leakage (106 Pam3/sec) is the value at differential pressure 14.7 psi (

1

CS1 Dimensions C76 C85 4-0 through C95 Bore size (mm) L M N O CP95 20 25 32 40 50 80 25 45 M6 x 1 NCM 100 35 54 M6 x 1 106 35 60 M6 x 1 NCA 134 50 75 M8 x 1.25 152 56 90 M10 x 1.5 DExternal dimensions other than above are the same as standard type.

Table of Contents

MY1C (Cam follower guide type) B A (mm) 16 20 Mounting position A 74 94 B 86 106 Operating range l Note) 8.5 (6.5) 6.5 (7) Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.

5

Grease pack (10 g) 1 pc. 16 CQSY16-PS 12 6 IN 84.8 25 42 59 20 CQSY20-PS OUT 113 34 57 79 25 CQSY25-PS 16 8 IN 151 45 75 106 When maintenance requires only grease, use the following part numbers to order.

AC

106 106 106 106 11 11 11 11 11 25 18 16 35 35 66 66 66 66 66 70 70 70 70 70 210 210 210 210 210 90 90 90 90 90 13 13 13 13 13 3.2 3.2 3.2 3.2 3.2 106 106 106 106 106 AL3000-02 to 03-1 AL4000-02 to 04-1 AL4000-06-1 AL5000-06 to 10-1 AL6000-10-1 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 ( ): With float switch 1.17-7 Large Flow Lubricator Series AL800/900 Standard Specifications Individual lubrication

MGG

Consequently, the operating frequency can be increased depending on the energy absorption. 2 Series MGG Theoretical Output OUT IN (Unit: N) Operating pressure (MPa) Rod size (mm) Operating direction Bore size (mm) Piston area (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 62.8 94.2 126 157 188 220 251 283 314 314 OUT 20 8 52.8 79.2 106 132 158 185 211 238 264 264 IN 98.2 147 196 246 295 344 393

Smooth Cylinder/Low Speed Cylinder

Grease pack (10 g) 1 pc. 84.8 IN 25 42 59 CQSY16-PS 12 6 113 OUT 34 57 79 CQSY20-PS REA 151 IN 45 75 106 CQSY25-PS 16 8 201 OUT 60 101 141 When only grease for maintenance is necessary, please order by the following part numbers.

Pin Clamp Cylinders

Guide Pin Diameter Symbol 075 076 077 078 079 080 085 086 087 088 089 090 095 096 097 098 099 100 105 106 107 108 109 110 Guide pin diameter [mm] 7.5 7.6 7.7 7.8 7.9 8.0 8.5 8.6 8.7 8.8 8.9 9.0 9.5 9.6 9.7 9.8 9.9 10.0 10.5 10.6 10.7 10.8 10.9 11.0 Applicable hole diameter of workpiece [mm] For 8 For 9 For 10 For 11 Guide pin shape Round type Round type/Diamond type Symbol 115 116 117 118

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

106 46 46 47 47 Motor cable (7) Motor cable (7) Dimensions [mm] Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Refer to page 174 for the connector assembly with cover for L and M plug connectors. 106 Body Ported 10-SY3000/5000/7000 Type 60 Specifications Response Time Note) Based on dynamic performance test, JIS B 8375-1981.

Lubrication Equipment

106 106 106 106 53 70 75 90 95 70 70 70 70 70 66 66 66 66 66 25 18 16 35 35 11 11 11 11 11 3.2 3.2 3.2 3.2 3.2 13 13 13 13 13 90 90 90 90 90 210 210 210 210 210 106 106 106 106 106 AL3000-l02 to 03-1 AL4000-l02 to 04-1 AL4000-l06-1 AL5000-l06 to 10-1 AL6000-l10-1 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 ( ): With float switch 1.17-7 Large Flow Lubricator Series AL800/900 Standard Specifications

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(;le';'106 T C,O 73 71 76 61 II> ~ 102 59 62 50 135 44 11 9 147 ~... > C .. S ' 101 73 111 89 74 102 84 91 Rod flange: Head llange: 301 267 44 330 Foot: L,.

CJ2

MM NA NN S T Z Bore size (mm) A GA H FZ FY FX FT FC FB F D 6 15 M3 x 0.5 16 M6 x 1.0 61 (66) 3 117 (122) 10 16 32 14 24 1.6 3 4.5 13 8 14.5 28 12.5 49 8 M4 x 0.7 32 14 24 1.6 4 4.5 13 8 15 28 M8 x 1.0 105 12.5 50 8 M5 x 0.8 42 20 33 2.3 5 5.5 19 8 15 28 M10 x 1.0 106 ( ) in S and Z dimensions: With auto switch With Air Cushion/Dimensions other than the table below are the same as the

Compact 5-Port Solenoid Valve

(IP67): FW p. 27 D-sub Connector (IP20/Compact Type): FC p. 29 Flat Ribbon Cable (IP40/Connector Entry Direction Adjustable): P/PG/PH p. 32 Flat Ribbon Cable (IP20/Compact Type): PC/PGC/PHC p. 36 Electrical Wiring Specifications: D-sub Connector Cable p. 39 D-sub Connector/Flat Ribbon Cable (IP20/Compact Type) p. 104 Spring Type Terminal Block Box p. 105 Terminal Block Box p. 106

Table of Contents

Graph (3) 20 x 9.8 x (0.07 + 0.05) x 10/1000 = 0.24 20 x 9.8 x (m1 + m2) x H/1000 0.24 Nm < Effective torque OK < Effective torque (Nm) Find the moment of inertia, "IR" for the load + attachments (2 pcs.) 7 IR = K x (a2 + b2 + 12h2) x (m1 + m2)/(12 x 106) IR = 2 x (202 + 302 + 12 x 102) x (0.07 + 0.05)/(12 x 106) = 0.05 kgm2 (K = 2: Safety factor) Kinetic energy 8 Confirm that the kinetic

VZ100/300/500

.: 4, 6 (Pitch) Stations n L1 L2 19 330 321 20 346 337 18 314 305 15 266 257 16 282 273 17 298 289 14 250 241 11 202 193 12 218 209 13 234 225 10 186 177 7 138 129 8 154 145 9 170 161 6 122 113 3 74 65 4 90 81 5 106 97 2 58 49 L3 43 59 75 91 107 123 139 155 171 187 203 219 235 251 267 283 299 315 331 L plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length) (Lead wire

SY

Page 106 Type45 Stacking type/DIN rail Plug-in type Stations can be changed on the DIN rail. A variety of centralized wiring methods are possible. Page 115 Standard Option Order made (See "Order Made Specifications" pages.)

CL

38 20 168 25 M26 x 1.5 5.5 24 M10 x 1.25 15 30 24 27 137 195 41 25 182 32 M26 x 1.5 5.5 24 M10 x 1.25 15 34.5 24 27 139 197 41 32 184 40 M32 x 2 7 24 M14 x 1.5 21.5 42.5 24 29 167 233 41 40 217 With Rod Boot h l Bore size (mm) e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 12.5 68 81 93 106

CM2

15 34.5 1/8 40 50 11 16 32 154 14 24 7 M32 x 2 88 21 22 41 8 10 46.5 M14 x 1.5 21.5 42.5 1/4 With Rod Boot l ZZ h Symbol f e B3 Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size (mm) 20 17 36 30 68 81 93 106

VQ5000

Nil B Side ported Bottom ported Enclosure Nil W Dust-protected Dusttight/Low jetproof type Note) Note) Not required for plug lead type. 2-6-5 Base Mounted 6 Series VQ5000 Plug-in Type Conduit terminal 2 position single: VQ5100 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 4(A) port 17.5 13.5 2(B) port 2-Rc 3/8 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000