Table of Contents

Model A T KKA3S-01M R 1/8 18.8 38.5 34.1 38.1 -02M R 1/4 6.1 41.8 35.1 41.1 1/8 18.5 17 20.1 -03M R 3/8 46.3 35.6 42.1 D K KKA4S-02M R 1/4 31.3 76.8 40.0 46.0 -03M R 3/8 8.1 78.5 40.5 47.0 1/4 24.2 22 M 32.8 -04M R 1/2 86.6 42.0 50.0 H KKA6S-03M R 3/8 11.0 58.0 149.1 44.9 51.4 H L -04M R 1/2 160.4 46.4 54.4 1/2 30.7 30 11.4 59.5 -06M R 3/4 184.8 46.9 56.4 D Female thread type (mm) Body size

SJ3A6

D side Component Parts / Plug-in Note Part no.

A

D E R S E R I E S ADH 4000 H E A V Y A U T O D R A I N S Y M B O L S ADH4 00 04 T H R E A D .Rc(PT) N .NPT M A X.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

Information

600 400 400 200 200 Ambient 5C Ambient 5C 0 5 10 15 20 25 30 35 40 45 0 5 10 15 20 25 30 35 40 45 [50 Hz] Circulating fluid temperature [C] [60 Hz] Circulating fluid temperature [C] 012 018 024 A W HRS -20 (Single-phase 200 to 230 VAC) 1000 1000 Ambient 40C Ambient 32C Ambient 25C Ambient 40C 800 800 600 600 Ambient 32C 400 400 Ambient 5C Ambient 20C Ambient 25C Ambient 5C Ambient 20C 200

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.

Series DXT474

Surge Suppressor Nil No light or surge suppressor R With surge suppressor (non-polar) Rated Voltage U With light and surge suppressor (non-polar) 5 24VDC S With surge suppressor 6 12VDC Z With light and surge suppressor V 6VDC U type only available for 12 and 24VDC S 5VDC R 3VDC Electrical Entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire L L type connector w/ plug and 300 mm

Shock Absorbers and Rate Controls

ADA5O5 l ( o r T q n d ( .63 2 4t0 45{} 650.000 I1.0 oz. ADA5I O l ( o r l o n d ( .63 4 450 375 850.000 13.0 or. ADA5I5 L ( o r T o n d ( .63 450 300 t.050.000 1.0 tb. ADA52O T , ( o r l o n d ( .63 I 450 200 r.250.000 l.l lbs. ADA525 I , ( o r l o n d ( .63 l0 450 125 t,450,000 1.3 lbs. 8ore (otolog llo. lliolell D!ndng Dire(lior tii.) (oldlog l{0.

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

bearing) 40 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

AS

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard Universal type 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 01 02 03 04 Applicable tubing O.D.

VS 8-2/VS 8-4

VS 8S R 2 4 IP40 compliant Using our D-sub connector greatly reduces labor, while it also minimizes wiring and saves space.

SZ3000

A 4 (B) 2 (A) 4 B 2 Manual override A SOL.b SOL.a 3 (R) 5 (R) Nil: Non-locking push type D: Push-turn locking slotted type 1 (P) 4 position dual 3 port valve: N.O./N.O. (B) 2 (A) 4 B SOL.b SOL.a 5 (R) 3 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

SZ3000

A 4 (B) 2 (A) 4 B 2 Manual override A SOL.b SOL.a 3 (R) 5 (R) Nil: Non-locking push type D: Push-turn locking slotted type 1 (P) 4 position dual 3 port valve: N.O./N.O. (B) 2 (A) 4 B SOL.b SOL.a 5 (R) 3 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-F79F D-F7NTL D-BAL D-A79W D-F7WV D-F7V D-F7BAVL D-J79 D-F7W D-J79W D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL

EX120/121/122

Internal Circuit (Brown) +5 V +24 V TD+ TD0 V q w e r VP R x D/T x D-N DGND R x D/T x D-P SHIELD q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT GND FG DC-DC converter (insulated) GND +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D Power supply for the input and for the control unit of the Gateway +24 V 0 V q w +24 V RD+ RD0 V q w e r INPUT

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

R.

Programless controller (with stroke study) Step motor (servo 24 VDC)

C c OFF OFF OFF ON OFF D d OFF OFF OFF OFF ON E E OFF OFF OFF OFF OFF The control power supply turn off Turn on the power again When multiple alarms in alarm groups A to D occur, the relevant OUT0 to OUT3 will be ON.

CQ2

D-J79W D-F7F D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V 12 to 25 CU 32 to 50 CQS CQ2 MU D-A9 D-F9 D-A9V D-F9V D-F9WV D-F9W D-F9BAL 32 to 50 Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-A73C D-A80C D-F7 D-J79 D-F7V D-J79C D-F7BAL D-F7W D-F7F D-J79W D-F7WV D-F9W D-F9WV D-F9BAL D-F9WV D-F9W