21

Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(initial value) Solenoid Specifications Electrical entry L type (for plug-in), M type plug connector (M) Rated coil voltage V Note) 24, 12, 6, 5, 3DC Allowable voltage fluctuation 10% of rated voltage Power consumption W 0.6 (with light: 0.65) Surge voltage suppressor Diode Indicator light LED Note) Only 24VDC and 12VDC are available for plug-in use.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Table of Contents

Without Auto Switch 4 6 or more One-touch fitting KJS23-M3 CQS M-3AU Hose nipple M-3ALU CQM CQ2 Bore size (mm) 4 6, 8, 10 M3 x 0.5 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size Stroke (mm) With Auto Switch RQ 6 or more 4 6 or

HRS100/150

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual. 14) In locations where strong impacts or vibrations occur. 15) In locations where a massive force strong enough to deform the

CY1F

Find the value of m max. at 300mm/s in Graph 6 for m3 on page 28. m L1 xStatic moment M2 = m x g x L1 = 0.5 x 9.8 x 0.05 = 0.245 [Nm] 2 = M2/M2 max = 0.245/3 = 0.082 Investigate M2. M1 and M3 are not required because they are not generated.

HRX-OM-R005

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

EXxx-OMN0027CN

5 6 7 SI } -43No.EX-OMN0027CN-D SI ST(M) 8 ST(M) 9 / PWR PWR(V) 10 SF,BF 11 12 13 14 -44No.EX-OMN0027CN-D EX600No. 0 SI 1 LED OFF H.T

MNB

P-76 (M)

2/3 Port Valve for Various

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

3 Port Solenoid Valve

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

With light/surge voltage suppressor (Non-polar type) : SY100-30-A U Without lead wire (with connector and 2 of sockets only) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Rated voltage 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] G H L LN LO M MN

Direct Operated

106 Pam3/sec or less 10 Note) to 60 10 Note) to 60 20 to 60 20 to 40 AC DC Note) The leakage amount (10 6 Pam 3/sec) for the V and M option are values when the differential pressure is 0.1 MPa.

SMC Electronic Switch Series Variations

Detection side nozzle: 1.0 Detection side piping: 6 X 4 tubing Detection side nozzle: 1.5 Detection side piping: 6 X 4 tubing Detection side nozzle: 2.0 Detection side piping: 6 X 4 tubing 300 300 300 Detection distance (m) Detection distance (m) Detection distance (m) 200 200 200 100 100 100 0 0.1 0.2 0.3 0.3 0.3 0 0.1 0.2 0 0.1 0.2 Supply pressure (MPa) Supply pressure (MPa) Supply pressure

Series KDM Rectangular Multi-connector

0 P M D K d e R 4 / 1 7 0 P M D K 6 6 0 P M D K 6 1 / 5 9 0 P M D K 8 8 0 P M D K Loosen the cross-recessed head machine screw using a Phillips screwdriver to remove the plate from the case.

MY1

DWX D 11.4 d 6 Y 9 S 4 Applicable O-ring C9 Bore size (mm) 25 32 40 38 -X 11.4 13.4 6 8 48 54 11 14 6 9 C9 C11.2 Technical Data 1355 MY1W Series Dimensions: 50, 63 4 x MM depth M (LL) L 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW QW LW PB Q+ Stroke PG This port is not available for use.

Manifold Specifications

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.

Digital Flow Switches

1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

Pin Clamp Cylinders

3 m D-P3DWAZ 5 m Solid state auto switch 24 VDC Note 1) PLC: Programmable Logic Controller Note 2) There are applicable auto switches other than the listed above.

1

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ The auto switch is shipped together, but not assembled.