Electric Rotary Table

q Check the actuator label for model number. This matches the driver. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

KQ2

Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon 53 Series KQ2 Delta Branch: KQ2UD H (width across flats) Applicable Effective area (mm2) Nylon Urethane Connection Note) Mass (g) A D1 D2 L I Q M P tubing O.D.

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

CRBU

M3: L = 6mm (mm) (mm) Size 15 20 30 Size 15 20 30 Q Q M3 M3, M4 M3, M4, M5 X 1.5 to 18 1.5 to 20 2 to 22 Y 1.5 to 19 1.5 to 10 2 to 13 M3 M3, M4 M3, M4, M5 Symbol: A3 Symbol: A4 Symbol: A5 The shaft can be further shortened by machining male threads on the long end of the shaft. (If the shaft is not to be shortened, leave the Y dimension blank.)

Angle Seat Valve /

In the case of liquids: DP Q = 1.9 x 106Av (9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av DP(P2 + 0.1) (10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 11

CM2

168 181 206 231 256 25 36 19 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 36 19 32 12.5 25 37.5 50 75 100 125 72 85 97 110 135 160 185 149 162 174 187 212 237 262 40 46 22 41 12.5 25 37.5 50 75 100 125 77 90 102 115 140 165 190 181 194 206 219 244 269 294 Boss-cut Style With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) ZZ Q

Fieldbus system EtherCAT compatible SI Unit

IOL_Autostart DI_C/Q Set as digital input. DO_C/Q Set as digital output -74No.EX-OMA1023 IO-Link master unit parameters (3) No.

rep-filter-e

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

3

Without arm Q R M MK MK 20 MK2T 8 19 CK1 17 0.1 0.2 Q (mm) CLK2 Q (mm) Rod state Clamp stroke 10 mm Model Q 10 mm 20 mm Clamp stroke CLKG Rod state Bore size 50 mm 20 mm 30 mm 50 mm Retracted 146.5 175.5 166.5 205.5 186.5 235.5 226.5 295.5 R M Q 82 82 83 83 91.5 91.5 85 85 96.5 96.5 100 100 R 33.5 63 35.5 65 50 85 57.5 92.5 65.5 104.5 65 104 M Q 126.5 126.5 130 130 R 95.5 164.5 95 164 M MK63

VM

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Booster Regulator/Air Tank

When the inlet pressure is 0.4 MPa: 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 8 Series VBA Construction/Replacement Parts VBA10A VBA11A q r e w t r e u q t w VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q t y r w e q VBA22A, 42A Replacement Parts/Kit No.

ITV

9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !

Stainless Steel 316 Fittings

Construction e q r q q Principal Parts Material Description No.

Base Mounted Metal Seal/Rubber Seal Series VQ

w e Note q w e Material Material No.

Industrial Filters Replacement Procedure

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Compact

q Check the actuator label for model number.

AR20-B to AR60-B

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

EXxx-OMW0014CN

LED EX245-LA1/LB1 LED LED . 9-15 4 (C/Q) LED No.0,2,4,6 LED Port deactivated (L+) (ON/OFF1Hz) IO-Link IO-Link (ON/OFF2Hz) IO-Link Device IO-Link (L+C/Q) OFF Digital input ON (L+) OFF Digital output ON (L+C/Q) . 9-16 2 (I/Q) LED No.1,3,5,7 (EX245-LA1A) LED status Description I/Q OFF Digital input (I/Q) I/Q ON . 9-17 2 (P24) LED No.1,3,5,7 (EX245-LB1B) LED status Description