ZR

PV PS/PD RV2 Symbol PV/PS PD RV3 PV/PS/PD RV4 Rc Air supply port 1 8 Manifold Unit Rc Vacuum pad connection port 1 8 Rc Air supply port 1 8 Common specifications M5 Pilot valve connection port Release valve connection port M5 Common exhaust port Rc 1 2 Rc 1 8 External vacuum supply port Refer to pages 13-3-9 to 13-3-20 for further specifications of each unit.

PA3000/5000/PAX1000

3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10 Process Pump Automatically Operated Type with Built-in

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZPT HJ-01-A18 (With buffer) 63 80 Hexagon width across flats 14 1/8 (Rc, NPT, NPTF) 1/8 (Rc, NPT, NPTF) Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 M18 x 1.5 M18 x 1.5 Width across flats 16 Width across flats 16 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 Model A 40 ZPT40HJ25-01-A18 D 118.5 40 ZPT40HJ50-01-A18 42 98 153.5 B 42 C 63 Model

Process Pump Series PA3000/5000/PAX1000 Series PB1000

3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10 Process Pump Automatically Operated Type with

Modular Type Filter Regulator Series AW

It must be operated manually. 0.1 0.1 0 600 800 400 200 0 1000 Flow rate L/min (ANR) 0 500 1500 0 Flow rate L/min (ANR) AW40K-06 Rc 3/4 AW40K Rc 1/2 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 Caution 1. Be sure to unlock the knob before adjusting the pressure and lock it after setting the pressure.

Modular Type Regulator Series AR

, NPT, G 1/8 Set pressure + 0.05MPa Note 3) [at relief flow rate of 0.1L/min (ANR)] 5 to 60C (with no freezing) Relieving type 0.29 AR20 1/8, 1/4 AR25 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 3/4 AR50 3/4, 1 AR60 1 0.05 to 0.7MPa Rc 1/16 Note 2) Note 1) Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 0.06 0.26 0.21 0.44 0.47 1.17 1.22 Note 1) Pressure

Vacuum Filter AFJ Series

drop [kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No

XL-OMV0002

XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y

High Purity Fluoropolymer

28 30 1/2" 54 (M) N 1/2" 26 43 40 32 36 H 3/4" Class 4, 5 Inch sizes Connection threads Rc/NPT Model Applicable tubing O.D.

VXA21/22

ports are Rc(PT) 3/8.

Compact Cylinder with Lock Series CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.

3 Port Air Operated Valve Series SYJA300

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

Air Tank Series AT 1

1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc(PT)1/8 Mounting/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 Pad diameter (mm) 20 to 32 Rc(PT)1/8 M8 x 1.25 40, 50 Rc(PT)1/8 Ball joint rotation 15 Pad Types Ball joint Pad

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 6 tube M14 x 1 ZX Rc 1/8 20 to 50 8 tube Ball joint rotation 15 ZR ZM Buffer Type ZH 10 to 16 20 to 50 ZU Pad dia.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 125 psig (0.9 MPa) Proof pressure 200 psig (1.4 MPa) Ambient and operating temperature 14 to 160F (10 to 71C) (No freezing) Cv 0.29 0.5 Leak rate 1 x 1010 Pam3/sec Connections Compression, Rc, R, NPT Actuation pressure 60 to 110 psig (0.4 to 0.76 MPa) Actuation port connection M5 x 0.8 Actuation port

Clean Air Module

resin fitting (no metal) for Rc and NPT thread.

Series PF2W Digital Flow Switch For Water

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1, 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Supply voltage > Internal voltage drop of switch Minimum operating voltage of load 2. Apply a wrench only to the metal part of the piping when installing the flow switch onto the system piping.

VVXA21/22

Rc VXA32 5-00 1 8 1 4 PA All common ports are Rc 1/4.