New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Operated Type Fitting Status Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series AK3542 AK4542 N.C. 0.29 0.5 316 SS 125 (0.9) Compression Rc, R, NPT P.1 Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series 0.5 316 SS Knob with a raised section on top (indication window) 250

4/5 Port Air Operated Valve Series SYJA3000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5

Table of Contents - Tubing

TUB-20 Series PEAPP Series PEAPP Polyurethane Tubing How to Order PEAPP 07 BU 153 Linear low density polyethykene tubing, Industrial grade Length per roll Length 100 (33m) 250 (100m) 500 (153m) 1000 (305m) Symbol 33 100 153 305 Tube O.D.

Stainless Steel 316

Pulling Strength Model Without inner sleeve With inner sleeve TU1208 140 N 500 N TU1065 140 N 450 N TU0805 110 N 250 N TU0604 80 N 180 N TU0425 50 N 160 N Reference: Thrust Force Occurring at 0.8 MPa Model Load TU0425 10 N TU0604 25 N TU0805 40 N TU1065 65 N TU1208 90 N Note 3) Please consult with SMC regarding applicable tube separately.

VCL

Note 3) Vibration resistance Conditions when tested with one sweep 10 to 250 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states. No malfunction occurred when tested.

LX

LJ1 LG1 LC1 LX LC6D/LC6C Switches Series LXS Lead screw lead mm Series Brake Page Model Motor type Ball screw Slide screw Guide type LXF 2 5 6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Mass (g) D-B30 D-B30J D-B31 D-B31J D-B35 D-B35J Auto switch model 190 250 190 250 190 250 0.5 Lead wire length (m) Auto Switch Internal Circuit 3 368 368 368 D-B30 5 462 462 462 Contacts protection resistance Brown (Terminal 1) Blue (Terminal 2) Contacts (Magnetism detection) Lead wire length In case of the grommet type (J type), the lead wire length is 0.5 m.

In-line Air Filter

Maximum flow rate under positive pressure [L/min (ANR)] Inch size Metric size 100 200 300 Series ZFC5 4 5/32" 45 6 1/4" 100 ZFC7 6 1/4" 120 8 5/16" 250 10 3/8" 300 12 350 Flow rate (positive pressure) conditions: Supply pressure 0.1 MPa, Differential pressure 30 kPa Metric size: 5 sizes Inch size: 4 sizes Light gray Orange CAT.ES100-103A Series ZFC Series ZFC 2 types of transparent case

MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

MLGP

, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Series 12-REA Sine rodless cylinder ø25, ø32, ø40, ø50, ø63

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Refer to pages 19 to 23 for cylinders with auto switches. 80, 100 Intermediate strokes not listed above are produced upon receipt of order.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

FC2W-X110

Turn power off and then on again. 1.6 Over current 500 ms 500 ms 0 1.0 5.0 1.3 1.2 Input signal Voltage [V] Flashing: Two ashing cycles of 250 ms at two-second intervals Error automatically resets when the supply ow rate is recovered (LED goes off). Insufcient supply ow rate Flow rate control Position control (Fully closed) 250 ms 250 ms 2000 ms 1 A

Low Maintenance Filter Series FN1/FN4

Symbol 0 1 Cylindrical type (5 m, 20 m) Applicable model Element type FN1, FN4 Nominal filtration rating Step type (5 m) FN1 Element material Symbol Nominal filtration rating Note) Refer to Features 2 for detailed element type. 5 m (Cylindrical type, Step type) Symbol Element material 005 S Stainless steel 304 Element length 20 m (Cylindrical type) 020 Seal material Port size Symbol 1 2 l 250

IZT40/41/42

0 Bar bracket Symbol Length [mm] 16 160 22 220 34 340 40 400 46 460 58 580 64 640 Symbol Length [mm] 82 820 112 1120 130 1300 160 1600 190 1900 232 2320 250 2500 Symbol Inch size 5H 3/16" Straight 7H 1/4" Straight 9H 5/16" Straight BH 3/8" Straight 5L 3/16" Elbow 7L 1/4" Elbow 9L 5/16" Elbow BL 3/8" Elbow Symbol Type Nil Without bracket B With bracket 1 F With bracket 2 The number of intermediate

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25, 50, 75, 100, 125, 150, 200 25 to 100 25, 50, 75, 100, 125, 150, 200, 250, 300 Intermediate strokes of 1 mm each can be produced. (The spacer is not used.)

Vacuum Regulator

SET side tubing O.D. 6, 8, 10 1/4" , 5/16" , 3/8" 6, 8 1/4" , 5/16" 135 g (IRV10-C08) 125 g (IRV10A-C08) 250 g (IRV20-C10) 250 g (IRV20A-C10) Weight (Without accessories) Standard connections Single sided connections Note 1) Use caution it varies depending on the pressure in vacuum pump side.