PSxx-OMV0003CN

Y OUT1 () ISE710x03E80x0C9F (10003231) 1017 0x03F9 0 R/W dtH1 (ON ) U16 0 Y 0x0x1770 (06000) OUT1 ON 0.01 s 1018 0x03FA 0 R/W dtL1 (OFF ) U16 0 Y OUT1 OFF 0.01 s -67No.PS-OMV0003CN-G () 1 3 dec hex 2 0HYS() 1Wind() 2Err() 3oFF oUt2 () U8 0 Y OUT2 1020 0x03FC 0 R/W 1021 0x03FD 0 R/W 2ot () U8 0 Y 02_P() 12_n() OUT2 ISE700x02440x1450 (5805200) 1022 0x03FE 0 R/W P_2(n_2) () U16 3000

PSxx-OMV0008CN

0rEd() 1Grn() 21SoG (OUT1 on ) 31Sor 1002 0x03EA 0 R/W CoL () U8 2 Y (OUT1 on ) 42SoG (OUT2 on ) 52Sor (OUT2 on ) bit ON OUT2 0 1 2 1003 0x03EB 0 R/W diAG () U8 1 Y ON 0HYS () 1Wind oUt1 () U8 0 Y 1010 0x03F2 0 R/W OUT1 () 2Err() 3oFF 1011 0x03F3 0 R/W 1ot () U8 0 Y 01_P() 11_n() OUT1 ISE70G0x02440x1450 (5805200) ISE75G0x03160x1450 (7905200) 1012 0x03F4 0 R/W P_1(n_1) () U16 3000

VEX-OMY0001

(P2) () 3) 4) 5) 23 5 No.VEX-OMY0001 VEX3 3 / DC () 5 20N 1) 2) 1 ()ISO VG32 2 ISO VG32 ,(SDS) 6 No.VEX-OMY0001 VEX3 3 / () 30 ( ) , 1 VG32 2 ()ISO VG32 7 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 ,300mm DXT170-80-A1) 2) Lmm 2 300 6 600 1 (2 ) AC100V 10 1000 2 (2 ) AC200V 15 1500 3 (2 ) AC 20 2000 DC L 4 :+ :DC 25 2500 DXT170-71-1 30 3000 0.20.33mm ( 1.7mm) DC : M 3.23.7mm

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.

This serial interface is compatible with series VQC1000/2000/4000 and SV1000/2000/3000 valves. Available protocols include DeviceNet, CC-Link, AS-i, Profibus-DP, and CANopen.

typeRated flow range Note 1)Minimum set unit Note 1)Note 2)Display unitsOperating pressure rangeProof pressurePressure lossAccumulated flow rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A703HDry air, NitrogenHeater type150 to 3000

, 2" , NPN or PNP open collector, 1 output + analog , Flow rate (l/min): 150~3000, 300~6000, 600~12000, DIGITAL FLOW SW, INTEG SENSOR, INSTRUMENTATION, IF/PFA FLOW SWITCH, HX, IF/PFA 1 INCH MISC.

typeRated flow range Note 1)Minimum set unit Note 1)Note 2)Display unitsOperating pressure rangeProof pressurePressure lossAccumulated flow rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A703HDry air, NitrogenHeater type150 to 3000

Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

Pilot Operated 5 Port Solenoid Valve Series VF1000/3000/5000 Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

Modular F.R.L. Unit

Use an air filter with 5m or less filtration rating on the inlet side of the valve to avoid any damage to the seat caused by dust when mounting a 3-port valve for residual pressure release on the inlet side. 0.3 0.2 0.1 Piping 0 1000 2000 3000 0 Flow rate L/min (ANR) Warning 1.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Piston Note 3) speed H (High speed/ High frequency type) 5 to 3000 mm/s (Refer to page 20.) 250 cm3/min or less 300 cm3/min or less 150 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 1000 cm3/min or less 1200 cm3/min or less 800 cm3/min or less Supply pressure 0.3 MPa 2500 cm3/min or less 3000 cm3/min or less 1500 cm3/min or less Supply pressure 0.5 MPa Note 1) Value when

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

thread tolerance JIS class 2 +1.0 0 Stroke length tolerance Piston speed Note 3) 0.3 to 300 mm/s (Refer to page 19.) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less 400 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less 1600 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000

Low Friction Cylinders Metal Seal Type

Actuation speed (mm/s) Series MQQT Standard type 0.005 to 0.5 0.3 to 300 0.5 to 500 MQQL Lateral load resisting type (Built-in ball bushing) 0.005 to 0.7 Lateral Load Resisting Low Friction Cylinder Series MQM Series Bore size (mm) Operating pressure range (MPa) Actuation speed (mm/s) MQML Standard type 6(Standard only) 10 16 20 25 6: 0.02 to 0.7 10 to 25: 0.005 to 0.7 0.5 to 1000 5 to 3000

Serial Transmission System Series EX250 Series EX500

Applicable protocol Applicable valve manifold Unit series SV1000 2000 3000 DeviceNet Serial Wiring with Input/Output Unit EX250 PROFIBUS-DP CC-Link VQC1000 2000 4000 AS-i CANopen Decentralized Serial wiring Series EX500 Applicable valve manifold Applicable protocol Unit series Remote I/O (Rockwell Automation) SV1000 2000 3000 4000 Decentralized Serial wiring EX500 DeviceNet PROFIBUS-DP VQC1000

Electric Actuator Triple Axis P&P Unit

Matsushita Electric Industrial Co., LTD Mitsubisi Electric Corporation, Yaskawa Electric Corporation, OMRON Corporation Matsushita Electric Industrial Co., LTD Ball screw allowable rotation Y axis specifications 200 5 10 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 5 10 Allowable rotation rpm 20 32 20 32 4000 High rigidity direct acting guide 3000 1000

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

HT Standard stroke (mm) Bore (mm) Model Guide 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1200 MY2C 16 Cam follower guide High precision guide Single axis MY2H 25 High precision guide Double axes MY2HT 40 Manufacturable max. stroke (mm) Made to order Bore (mm) Model Guide 1400 1600 1800 2000 Intermediate stroke (MY2C: Standard) MY2C 16 Cam follower guide (16: up to 3000

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa ARG20 Rc1/4 ARG30 Rc3/8 ARG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 500 1000 1500 0 1000 2000 3000 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.