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0.1 to 0.6 -10 to 6OC Anbient and flull 0.1 Lubrication Eflective gdpping lorce (N) at 0.5 MPa Noie) Gripping point = Bo rc siz 1 O, 1 6, m, : 40 mm, Bore size 52, 40: BO mm. to ] a a a a a a a a a a a o Parallel Gripper Series MHZ2 Standard Body o6 to o40mm Bore Size 6: MHZ 2 6 ffi Auto swilch model Reler lo catalog lor swiich selection. 1 Single-acr ng only 'D S acton, basic afd N type

5 Port Air Operated Valve

) 1/8 (Pilot port: Upward) 4 A A 4 (1.6) 6 45.5 (6) 40.5 55.5 (13.4) (13.4) 1/8 [Pilot port: Lateral (-P)] (Distance between ports) (Distance between ports) 1/8 [Pilot port: Lateral (-P)] 3EB EB 3 14.5 (5.5) 6 6 14.5 (45) (55) 36 36 35 17.5 17.5 5 EA EA 5 12 M5 x 0.8 [5 (EA), 3 (EB) port] 11.8 12 (16) M5 x 0.8 [5 (EA), 3 (EB) port] (40) (26) 2 x 4.5 (For mounting) (50) 2 x 5.5 (For mounting

ZPT/ZPX

M8 x 1.25 40 41.4 28.4 43.2 20.5 32 62 13 40 41.4 28.4 43.2 20.5 32 13 ZPT50HB-A14 -B10 M10 x 1.5 50 51.9 35.7 54 24 35.5 65.5 16.5 ZQ ZPT50HB-B8 M8 x 1.25 50 51.9 35.7 54 24 35.5 16.5 -B10 M10 x 1.5 ZF ZP ZPT HB-A16 (Male thread) ZPT HB-B (Female thread) 63 80 63 80 ZCU M16 x 1.5 AMJ Rc 1/8 Hexagon width across flats 22 6 6 Misc.

180° Angular Style Air Gripper Series MHY2/MHW2

= 9.0 x 10-6 (kgm2) Moment of inertia around Z axis = Z1 m1r12 X 10-6 z r2 z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis Z2 = {m2 (d2 + e2)/12} x 10-6 Z2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) B = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) = 9.0 x 10-6

1

Face seal fitting Compression fitting Female thread (Rc, NPT) Variations Model Orifice diameter Fitting/Port size (inch) Minimum operating pressure Pa(abs) Leakage Pam3/s Face seal fitting 2 3 4.5 6 1/4 3/8 Internal External XSA1 Compression fitting 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Model Orifice diameter Female thread (Rc, NPT) Minimum operating pressure Pa(abs) Leakage Pam3/s 2 3 4.5

PA3000/5000/PAX1000

PAX1000, PA3000, PA5000 Proper tightening torque Nm Connection threads 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 PB1000 Proper tightening torque Nm Connection threads 1/6 turn after tightening by hand M5 2 to 3 Rc 1/8 Since the threaded sections of the PB1000 are resin, take particular care not to tighten any more than necessary.

VVXA21/22

Rc VXA32 5-00 1 8 1 4 PA All common ports are Rc 1/4.

Safety Instructions

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

REGULATOR

6 6 6 e Flow direction Nil Downward Y Upward f Handle Nil Name plate, pressure gauge MPa Z Name plate psi, Pressure gauge MPa / psi Pressure unit g Please refer to the catalog when you select the model. 6 5.

Speed Controller with Indicator

For Flow Control Equipment Precautions, refer to the Handling Precautions for SMC Products and Operation Manual on the SMC website, http://www.smcworld.com Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

2/3 Port Valve for Various

) $ % *%+ * ,* VX021-003BTZ-05 Coil Combination Made to Order Specifications . / / 0 1 " 1 / / 2Splashproof Specifications ( ) ) @" A ) "=A" 1 ( 5 % / / 33 1 '4 % ) 3 ) / & / / 0 5 % / / 5 % * ,* -5 % ) / *% 5 % *%+ * ,* -6 6 7 8 6 6 8 6 6 7 8 6 6 ) 9 9 9: 9; 79 79 79: 79; ! 6 6 6 !"# !9 !9 !9: !9; -/& ,* $ % *%+ * ,* -3$ < ) ( !

VCA

Proper tightening torque N m Tightening torque for piping Connection threads Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 5. Connection of piping to products When connecting piping to a product, avoid mistakes regarding the supply port, etc. 13 Series VCA 2 Port Solenoid Valve for Fluid Control Precautions 3 Be sure to read before handling.

CL

6 !7 No.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

Clamp Cylinder Series CK1

D-P4DWSC D-P4DWSE D-P4DWL D-P4DWZ BA8-032 Dimensions 25 28 5 6 12 3 x Rc 1/8 3 x Rc 1/8 9.5 20 4 Speed controller valve Cushion valve 4 32 12 4 45 45 M10 x 1.25 Max. 26.5 12 40 26 41.5 Width across flats 36 12 R12 12 +0.5 +0.2 Shaft: 10 0.040 d90.076 28 26 Hole: 10 +0.022 H8 0 41.2 38 5 20 34 + Stroke 70 + Stroke 55 137 + Stroke Double knuckle joint Single knuckle joint 10 +0.022 H8 0 3

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5 H9 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 5.5 38 23 15.5 10.5 40 4.5 33h9 34 h9 17H9 5 6 H9 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 5.5 45 30 18.4 12.2 50 5 39h9 40 h9 20H9 6 7 H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

E-P HYREG

VEX1-17 1 pc. 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 Note 1) 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 Piping thread type 2 Common external pilot 8 2 8 stations Nil Rc G Note 2) A B C 3 8 1 4 2 stations 1 F N Internal pilot 0 1 For VY140 4 3 8 NPTF NPT 2 Common external pilot T 6 3 8 1 2 6 stations VY manifold pilot type Body size B, 2 Note 1) In the case

VZ5000

F N G PE port 3(R) port NPT T NPTF 3 position exhaust center 4 Rated voltage 4(A), 2(B) port size 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Rc 1 8 01 C6 C8 One-touch fitting for 6 One-touch fitting for 8 3 position pressure center 4 Note) P , R1, R2 port: Rc 1/8 5 24 VDC 12 VDC 5 6 9 Manual override Other Option Electrical entry Nil: Non-locking push

Manifold Specifications

VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9