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Note 2) DIN is applicble to VQZ 200 and 300. Note 3) Electrical entry of pilot valve for VQZ100(L and M) is opposite side of valve body part number.

Nominal filtration rating: 0.01 m [Filtration efficiency: 99.9%] Oil mist density at outlet: Max. 0.1 mg/m3 (ANR) [0.08 ppm] 150C 1/8, 1/4 200 250C 1/4, 3/8 500 350C 3/8, 1/2 1,000 Piping support type 450C AMH 1/2, 3/4 2,000 550C 3/4, 1 3,700 1, 1 1/2 650 6,000 1 1/2, 2 850 12,000 AMH150C to 550C AMH650/850 150C 1/8, 1/4 200 Dust filtration, Oil mist adsorption Dust filtration, Oil mist adsorption

(Ex.) 972A.2003 50411 (Matsuo Electric Co.,Ltd. 200VAC rating) Outline drawing [Unit: mm] Rated voltage C [ F] R [ ] Test voltage AC[V] Vinyl sheath AC[V] 18 1.5 Blue vinyl cord Red vinyl cord 200 0.5 50 Across 6 (1W) T-C 1000(1 to 5s) 10 or less 10 or less 4 10 3 10 3 15 1 31 200 or more 200 or more 48 1.5 Note that a diode should be installed to a DC relay, DC valve or the like.

Note 2) For manifold dimensions including elbow fitting, refer to page 23. 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 L3 L4 185.5 198 210.5 210.5 223 223 235.5 248 248 260.5 260.5 273 285.5 285.5 123 135.5 135.5 148 148 160.5 173 173 185.5 112.5 125 125 137.5 137.5 150 162.5 162.5 175 175 187.5 200 200 212.5 212.5 225 237.5 237.5 250 250

Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw

This parameter is fixed when shipped, and cannot be modified. (200) Operation direction Direct*3 (dir) or Reverse*4 (rvS) can be selected. The default when shipped is direct (dir). setting 100% 200=dir 200=rvS Stroke 0% 0% 100% 0% 100% Input current Fig. 23 When the operation direction is modified, it is reflected on each item in accordance with Table 10.

2 Slide screw 0.05 Without motor brake Series LXF 30 Direct acting guide Ball screw 0.03 80 3 100 0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 Slide table

Note 2) Except double (latching). 5 6 Low wattage type Y (2) Note) 200/220 VAC models are applicable to the F and L kits.

When selecting a converter by its nominal diameter, the converters oil level speed should be 0.2 m/s or less. 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 Step (3) Select required function for valve unit 100 100 80 CRA1H63-90 Select a model from data (B), by determining

Please contact SMC in this case. 392 Guide Cylinder/Compact Type Series MGC JIS Symbol Specifications Standard Stroke Model (Bearing type) Bore size (mm) Standard stroke (mm) Long stroke (mm) 20 250, 300, 350, 400 75, 100, 125, 150, 200 25 350, 400, 450, 500 MGCM (Slide bearing) 32 350, 400, 450, 500, 600 350, 400, 450, 500, 600, 700, 800 75, 100, 125, 150, 200, 250, 300 MGCL (Ball bushing

CM3 CG1 Symbol Specifications -X446 PTFE grease -X773*1 Short pitch mounting Standard Strokes CG3 [mm] -X2838*2 Double clevis (With one-touch connecting pin) Bore size Standard stroke Maximum manufacturable stroke 6 15, 30, 45, 60 200 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 *1: 6 only *2: 10 and 16 only Made to Order Click here for details

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

the weight of the work piece and the body. 2) Values in parentheses are those for side mount specification. 100 200 300 400 500 600 700 800 Stroke (mm) 900 1000 1100 1200 1300 1400 1500 Weight of body without motor (kg) 650 Stroke(mm) X axis 100 13.6 150 200 15.7 250 300 17.8 350 400 19.9 450 500 22.0 550 600 24.1 1500 43.0 Stroke(mm) X axis 700 26.2 750 800 28.3 850 900 30.4 950

2 0.05 Slide screw Without motor brake Series LXF 30 Direct acting guide 0.03 Ball screw 80 3 100 0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 0.03 Ball screw 6 80 Ball bushing guide 100 0.05 Slide screw 200 2 200 3 0.05 Slide screw 100 4 With motor brake 30 0.03 Ball screw 5 80 100 0.05 Slide screw 200 3 Slide table

200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 L3 Z 500 500 500 500 0 0 0 0 0 10 20 30 40 50 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg]

230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

Flow rate (slpm, N2) AZ1400T 2000 psig (13.8 MPa) 200 psig (1.4 MPa) Inlet pressure: 600 psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA

When selecting a converter by its nominal diameter, the converters oil level speed should be 0.2 m/s or less. 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 200 150 CRA1H80-90 50 CRA1H63

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.