VQ7-6/7-8

VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Mini Free Mount Cylinder

15, 20 25, 30 4 4, 6 4, 6, 8 4, 6, 8, 10 6 Single acting, spring return 8 10 Mass: Double Acting Made to Order (Refer to page 24 for details.)

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

REA/REB

6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

6 mm.

NCM

Option Compatibility Option Compatibility (1) NCDM Description Note S T NCDM S T C XB6 XB7 XB9 XC6 B C E R O O O S S N S O O O S Auto switch capable Spring return Spring extend Bumper Heat resistant Cold resistant Low speed Stainless steel rod Front nose mount Rear pivot mount Double end mount Block mount 1, 6 1, 6 1, 6 1, 2, 6 1, 6 1, 6 1, 6 1, 3, 6 1, 6 1, 6 1, 6 1, 5, 6 N O S S N S O

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

ZP3

3 Pad diameter Buffer specifications 78.5 3 6 10 15 20 46 6 6 109.5 Rotating, Non-rotating Rotating Rotating, With bushing Non-rotating 56 10 10 1.5, 2, 3.5 114.5 59 15 15 4, 6, 8 10, 13, 16 66.5 20 20 124.5 25 25 Wide selection of piping For 2 piping!

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

In case of ZQ1000M-E G-00, the overall length is 112. 5 6 5 6 5 6 5 6 Circuit diagram PE PE Left Right PS PV PD PD V V V 5 6 5 6 5 6 E F E F E F V ZQ1000M-K1 ZQ1000M-K2 ZQ1000M-J1 -FZQ1000M-Q1 24 Series ZQ Dimensions Fittings / Fitting type filter dimensions after installation V port Applicable tubing O.D.: 6 Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum

ARM10/11

Accessory 6.

EX120/121/122

6 !7 !8 !

ARM10/11

Accessory 6.

HRX-OM-Y098

6.

Fieldbus System

P-tight screw (4 x 14) 2 pcs. w Valve Plate EX600-ZMV1 EX600-ZMV2 (Specialized for SY series) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. Enclosed parts Round head screw (M4 x 6) 2 pcs.

CG5-S

18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 124 25 to 300 22 19.5 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 129 32 to 300 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 131 40 to 500 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 149 50 to 600 109 35 32 27 75 32 20 58 9 9 21 14 58

SMC

6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 134 MXS Air slide table 1322Dimensions: MXS6 13221322Axial piping type (6): MXS6-P Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.