Compact Guide Cylinder End Lock Type SeriesMGP

32 11 7.5 Rc1/8 38 18 38 30 104 44 118 86 106 72 124 200 300 84 122 172 46 48 40 14 9 Rc1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 48 50 14 9 Rc1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/A, DB, E dimensions (mm) (mm) DB E A Bore size (mm) Bore size (mm) X XA XB XC XL YY YL Z Over 25 to 175st 17.5 Over 25 to 175st 102

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Stroke Y Y LX ZZ + Stroke LZ (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I K 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 5 15.5 25 to 300 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 19.5 25 to 400 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48

e-Rodless Actuator

Auto Switches/Proper Mounting Position at Stroke End Detection B A (mm) D-A9, D-A9V (mm) D-M9, D-M9V (mm) D-F9W, D-F9WV A A A B B B Operating range Operating range Operating range Nominal size 16 25 Nominal size 16 25 Nominal size 16 25 3 44 116 48 112 48 112 8 8.5 3.5 54 156 58 152 58 152 Auto Switch Mounting When mounting the auto switches, they should be inserted into the actuators switch

Shock Absorbers and Rate Controls

x 1.5 l3 38 44 143 37 (LR)0Iil2.0llx2 226 243 t3 M64x2 t9 50 57 140 70 48 50 0Ifi2.0Sx4 328 345 1164 x 2 t9 50 57 l9l 96 48 t6 0t 2.0tlxd 456 413 73 M 6 4 x ? t 9 60 60 241 l 2 l 48 76 0E113.()flx2 245 265 98 il85 x 2 69 76 l{0 70 J8 5l 0tlll3.0llx3.5 323 343 98 M 8 5 x 2 22 69 76 v9 90 58 7l Otlll3.0frlx5 399 419 90 M 8 5 x ? 22 69 76 2tl r09 58 7l Otl{13.0Iir6.5 494 514 98 l{85 x ?

Compact Cylinder with Air Cushion Series RQ

Rod end nut L1 Front flange type Front flange type/RQF, RDQF mm Bore size (mm) Stroke range (mm) A L L1 15 to 50 20 46.5 14.5 28.5 15 to 50 25 51.5 15 32.5 FV mm FX 8 Bore size (mm) B FV FW FX FZ B + Stroke L FZ A + Stroke 2-6.6 20 39 48 32 40.5 60 25 42 52 36.5 44.5 64 Rod end male threads (Only dimensions A, L, and L1 are different and other dimensions are identical.)

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Note Panel mount adapter Waterproof seal, screws included ZS-26-B Front protective cover ZS-26-01 Front protective cover + Panel mount adapter Waterproof seal, screws included ZS-26-C ZS-26-D 48 conversion adapter 48 conversion adapter This adapter is used to mount Series PSE200 on the panel fitting of Series PS100. Order panel mount adapter separately.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under the manifold base part number

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting

High Purity Chemical Valve

SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc 3/8 NPT 3/8 LVA3m 36 47 77.5 56 15 41.5 17.5 7.5 34 46 5.5 37.5 Rc 1/2 NPT 1/2 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 LVA4m 46 60 96 68 22 55 18 8 42 57 5.5 48

Hydraulic Filters

56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 12 17 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 20 25 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 3.5 63 199.5 0 25 (1B) 0 1 0 1 32 (1 1/4B) 106 120 80 56 100 120 60 435 545 285 87 4 x M10 x 1.5 150 260 347 455 214 50 0 23 4.6 40 (1 1/2B) 50 (2B) 155 100 70

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

44

Width across flat Width across flat Effective area (mm2) 2 x Applicable tubing Weight (g) L M d Model H1 H2 KC M L I.D. 2.5 3 4 6 7.5 8 9 10 13 4 4 6 8 10 10 12 12 16 KFG2L0425-00 KFG2L0403-00 KFG2L0604-00 KFG2L0806-00 KFG2L1075-00 KFG2L1008-00 KFG2L1209-00 KFG2L1210-00 KFG2L1613-00 H1 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 1.6 2.6 6 17 30 35 45 57 101 7 8 13.3 5 8 13 28 47 46 51 48 89 d KK 9 12

Fieldbus System

Dimensions n: Stations (Maximum 16 stations) (mm) 1 L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 234 L1 L2 131 156 181 206 231 256 281 306 331 356 381 406 431 456 481 506 209 259 284 309 334 359 384 409 434 459 484 509 534 559 584 48 Series EX600 Specific Product Precautions 1 Be sure to read this before handling.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FSG-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FSG-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4

Round Type Hydraulic Cylinder

B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(8.1) 15.5 (13) 3.6 (1.1) 3.9 (1.4) 16.4 (13.9) 16.7 (14.2) 20.6 (18.1) 25.5 (23) 3.6 (1.1) 8.9 (6.4) 26.4 (23.9) 26.7 (24.2) 30.6 (28.1) 35.5 (33) 13-/22-MXS6 13-/22-MXS8 13-/22-MXS12 13-/22-MXS16 13-/22-MXS20 13-/22-MXS25 5.9 4.5 5.6 5.6 5.6 17.6 23.6 45.9 (43.4) 39.4 (36.9) 36.7 (34.2) 29.6 (27.1) 34.5 (32) 7.6 5 47.9 6.9 10.9 5.9 14.9 22.9 68.4 (65.9) 59.7 (57.2) 57.6 (55.1) 50.5 (48

SMC

8.1) 15.5 (13) 3.6 (1.1) 3.9 (1.4) 16.4 (13.9) 16.7 (14.2) 20.6 (18.1) 25.5 (23) 3.6 (1.1) 8.9 (6.4) 26.4 (23.9) 26.7 (24.2) 30.6 (28.1) 35.5 (33) 13-/22-MXS6 13-/22-MXS8 13-/22-MXS12 13-/22-MXS16 13-/22-MXS20 13-/22-MXS25 5.9 4.5 5.6 5.6 23.6 5.6 17.6 45.9 (43.4) 39.4 (36.9) 36.7 (34.2) 29.6 (27.1) 34.5 (32) 7.6 5 47.9 6.9 5.9 22.9 10.9 14.9 68.4 (65.9) 59.7 (57.2) 57.6 (55.1) 50.5 (48

Rotary Actuator

[mm] Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC CA CB Note 2) Key dimensions S SB SC SD SE S b L1 Size D50 Rc1/8 62 48 46 15 25 2.5 36 M8 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 9.5 7.5 5 0 0.030 25 63 Rc1/8 76 60 57 17 30 2.5 41 M10 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 11 8

1

VX021S-1-16FB 12 VDC 100 VAC 110 VAC 200 VAC C18312G6GCU None 220 VAC 230 VAC 240 VAC 24 VAC 48 VAC 24 VDC GDM2A-L5 12 VDC GDM2A-L6 100 VAC GDM2A-L1 110 VAC GDM2A-L1 200 VAC GDM2A-L2 220 VAC GDM2A-L2 230 VAC GDM2A-L2 240 VAC GDM2A-L2 24 VAC GDM2A-L5 48 VAC GDM2A-L15 With light * Select an appropriate DIN connector suitable for the coil insulation type. 7 XSA Series Specific Product Precautions

ZU

Model Nozzle diameter (mm) Maximum suction flow rate (/min(ANR)) Max. vacuum pressure Air consumption (/min(ANR)) Weight (g) Type Model (kPa) High vacuum type Large flow type ZU05S 0.5 7 6.5 85 9.5 ZU07S 0.7 12 7.0 85 19.0 ZU05L 0.5 12 6.5 48 9.5 ZU07L 0.7 21 7.0 48 19.0 Supply pressure: 0.45 MPa Construction Dimensions ZU05S/ZU05L 59 EXH Diffuser Body 12.8 VAC SUP ZU07S/ZU07L 66 One-touch