LVQ

7 15 31.3 21 25.3 64 2 1 23.5 47 29.5 59 45.4 99 16.5 95 32 50 6 7 20 37.2 25 31.2 82 2 1 23.5 47 29.5 59 45.4 104.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 87.5 2 1 35 70 41 82 75 145 25 141 50.2 78.2 10 7 20 50.8 38.5 45 128 2 1 35 70 41 82 75 154.5 32 150 60 88 10 7 20 50.8 38.5 45 137.5 17-5-71 10 Series LVQ Dimensions With by-pass Double acting valve N M LVQ20 SMC C A B D (Max.

RHC

25 32 40 50 63 80 100 Bore size (mm) 7 12 21 33 47 84 127 196 10-6-5 5 High Power Cylinder Series RHC 20, 25, 32, 40, 50, 63, 80, 100 How to Order RHC 20 H7BW B Number of auto switches Mounting style Nil S n 2 pcs. 1 pc. n pcs.

CRBB-OM00004

Assembly / Disassembly procedure 12 4.1 With vertical auto switch unit 12 Size 10, 15 12 Size 20, 30 13 Size 40 14 4.2 With angle adjustment unit 15 4.3 With vertical auto switch unit and angle adjustment unit 16 Size 10, 15 16 Size 20, 30 17 Size 40 18 5.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

10 10 W 71 58 49 44 LZ Z Bore size 63.5 53 52 47 38.5 34 40 32 25 20 54.5 45 10 12 55 74 4.5 100 125 5 20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 50 63 70.5 5 5 40 45 4.5 4.5 17.5 17.5 75.5 22 22 11 13 5 5 67 67 66 82 218 218 86 106 82.5 75.5 14 264 95 16 264 95 Other dimensions are the same as basic type.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

Compact Guide Cylinder

30 st 100 st or less Over 100 st 12 43 22 50 37 47 33 20 40 110 15 25 60 20 3 3.5 M5 x 0.8 10 5 16 49 24 57 42 51 37 20 22 42 110 15 16 26 60 24 3 3.5 M5 x 0.8 10 5 20 60 28.5 71 49 66 44 24 44 120 30 40 78 28 3 3.5 M6 x 1 12 18 25 73 34 86 60 78 50 24 44 12 29 39 77 34 4 4.5 M6 x 1 12 17 [mm] MGPKL: A, DB, and E Dimensions Bore size [mm] A DB E 30 st or less Over 30 st 100 st or less Over

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

EXxx-OMS0026CN

Enable 1 Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 -10..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary 3 PLC Sign & Magnitude 2s complement 2 None 2AVG 2 4 4AVG 4 8AVG 8 Enable 0.5 5 Disable Enable 0.5 6 Disable Enable 7 Disable Enable 8 Disable 1 -49No.EX-OMS0026CN -10..+10 V -10.50+10.45 V -10.45+10.50 V -5..+5 V -5.25+5.22 V -5.22+5.25 V -20..+20 mA

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 29.2 30 0.3 5 8.5 4.8 19 18.5 K 5 8.5 18.5 KA NA x M4 x 0.7 thread depth 4 M 27 4H9 ( ) depth 4 +0.030 0 3 x M5 x 0.8 thread depth 8 2 N 1 x F 35 13 4 x M4 x 0.7 thread depth 6 5 F 2.5 1 10 (Extension end adjuster) 1 19.5 20 22 14.5 29 20 39 46 5 N x M4 x 0.7 thread depth 5 Note 1) Note 2) Extension end adjuster Retraction end adjuster 8 4.5 4H9

ZR

Manual override Ejector exhaust Electrical entry Rated voltage Pilot valve Components Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch unit 20 ZR1 S 1 5 M Z E C K1 Ejector unit Supply valve self-holding Vacuum switch unit 5 M Z E C K2 1 20 L ZR1 Supply

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

LEF-OM006xx

16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0

MHK2

Internal Grip External Grip MHKL2-12S MHKL2-12C 20 15 Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 15 Pressure 0.6 MPa MHZ 10 0.5 MPa 0.5 MPa 10 MHF 0.4 MPa 0.4 MPa 5 5 MHL 0.3 MPa 0.3 MPa F F 0 0 MHR 10 20 30 40 50 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

MHK2

Internal Grip External Grip MHKL2-12S MHKL2-12C 20 15 Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 15 Pressure 0.6 MPa MHZ 10 0.5 MPa 0.5 MPa 10 MHF 0.4 MPa 0.4 MPa 5 5 MHL 0.3 MPa 0.3 MPa F F 0 0 MHR 10 20 30 40 50 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Operating angle Hysteresis angle Model MDSU1, 3 110 10 MDSU7, 20 90 Auto switch Table B port A port Positioning pin hole 11-5-30

70pvpump

Note 16-9-5 16-10-1 Page 16-9-1 16-9-3 For details, refer to Best Pneumatics Vol. 16. 17-5-178 17-5-179

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

REC

10 22 19.5 40 32 13 10 45 150 to 700 26 20, 25, 32 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to 1000 26 36 40 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to 1000 32 S Z ZZ NN P H1 H2 I K MM N NA Bore size Stroke range 1 8 M20 X 1.5 20 146 191 200 150 to 700 M8 X 1.25 5 8 33.5 5 20 30 1 8 M26 X 1.5 25 146 195 204 150 to 700 M10 X 1.25 6 8 37.5 5.5 20 34.5 1 8 M26 X 1.5 32 159 208 217 150 to