Clean Rodless Cylinder Series CYP

P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [P (port f)] WB WA R 4-J Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Escapements Series MIW/MIS

switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB HC HD HE JA JB KA KB LA LB LC MA MB MC NB NAB 6 8.5 6 9 M2.6 x 0.45 M3 x 0.5 M4 x 0.7 M6

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW 2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6

Rotary Table Series MSU

adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2-M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 8g6 0.005 0.014 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 9 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

Compact Guide Cylinder End Lock Type SeriesMGP

24 24 34 M8 x 1.25 20 M8 x 1.25 6.6 32 25, 50, 75, 100 125, 150, 175 200, 250, 300 350, 400 91 69 16 12 10 54 14 10 14 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.6 40 97 69 20 16 12 64 14 11 12 148 M8 32 32 46 M10 x 1.5 22 M10 x 1.5 8.6 50 102 74 20 16 12 78 16.5 13.5 16.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 63 (mm) WB WA Bore size (mm) OB OL P PA PB PW Q R S T U VA VB 75st or less

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

x 1 UB 10 12 VA VB 3 4 WA XA XB 3 4 SB 8 9.5 +0.025 0 +0.030 0 +0.025 0 +0.030 0 +0.062 0 +0.062 0 34H9 3H9 4H9 3H9 4H9 42H9 6 Series MHS 2 Finger Air Gripper Dimensions (mm) 1in = 25.4mm MHS2-50D, 63D 4-5.1, counter bore dia. 9.5 Counter bore depth SC (mounting hole) RA AA 6.4 AB AC 35 35 RA 5 VA, depth VB YC RB RB NA B XA, depth XB NB Q 4-M6 x 1, thread depth 12 (mounting threads) O 20

Serial Transmission System Series EX250 Series EX500

Contact) Branch connector Branch connector Marker (Phoenix Contact) 160 136 160 136 93.5 or less 48.8 46 10 48.8 46 10 How to Order Input manifold Input block Example M8 and M12 on a single manifold EEX500 IB1 E 8 EX500 IE 1 Input manifold Block type M8 connector, PNP specification M8 connector, NPN specification M12 connector, PNP specification M12 connector, NPN specification EEX500-IB1-M6

Single Axis Electric Actuator Serriies LJ1S Slider Guide

1000 100 a = 2000 L3 50 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 90 Standard Motor/Horizontal Mount Specification Series LJ1S20 Dimensions/LJ1S202SC Scale: 10% When two dimensions are shown, the top dimension is for 100 to 600mm stokes, and the bottom dimension is for 700 to 1200mm strokes. 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6

Air Cylinder NCA1 Series

x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1 1/2-16 73 : M12 x 1.75 This chart represents all current 13 : 1/4-20 41 : 1

Digital Flow Switches, Series PF2A, Series PF2W

x 1 9 0V 75 220 55 114 89 75 56 M6 x 1 9 50msec PF2A7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured flow rate

Digital Flow Switches Series PF2A

x 1 9 Load Black 0 V or 75 220 55 114 89 75 56 M6 x 1 9 50 msec 50 msec PF2A7H-(-M) 68 69 Analog output 1 to 5 VDC 4 to 20 mADC 20 5 Analog output [V] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Min. measured flow rate value [l/min] Max

High Power Cylinder Series RHC

x 1 x 6 40: M8 x 1.25 x 8 Nickel plated Chromium molybdenum steel Hexagon socket head cap screw 15 Nickel plated 20, 25: M5 x 0.8 x 6 32, 40: M6 x 1 x 8 Chromium molybdenum steel Hexagon socket head set screw 16 Label 17 Special resin Cushion seal 18 NBR Piston seal 19 Replacement parts: Seal kits Resin Wear ring 20 NBR Piston gasket Bore size (mm) Seal kit no.

Sine Rodless Cylinder Series REA

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

Digital Flow Switch Series PFA For Air Series PFW For Water

x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum

Air Cylinder Series MB

X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 27 31.5 31.5 38 38 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 to 500 to 500 to 600 to 600 to 800 to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 With rod boot (mm) f l 901 to 1000 h Bore size (mm) e 1 to

Guide Table Series MGF

: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places) 73 146 6 Series MGF Dimensions 100 MGF100 Scale: 35% 4-M12 x 1.75 through 170 200 160 11.5 53.5 + Stroke 10 65 + Stroke 20 9 2-Rc 1/4 port for extending cylinder When the cylinder is extended Breathing hole for guide (with element) 46 Port for retracting cylinder 4-M12 x 1.75 through M6: T-slot for hexagon bolt K 70 4 170 200

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

(Symbol 1) IN (Symbol 2) OUT Bracket can not be attached to the model without a sub-plate. 5 6 24 VDC 12 VDC Sub-plate material/Port size 14R N.O. 2 Nil Without sub-plate PFA PFA M6 1/4-28 UNF (Symbol 3) IN (Symbol 2) OUT 2 2U Wetted part material 16R N.C.

Hydraulic Filters

head cap screw (M6 x 10) 4 pcs.

High Vacuum L Type Valve

Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Port 1(P) Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening torque size wrench XLFV-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 Body -63 M10 8 15 -80 Turn ON the solenoid valve to supply air pressure of 0.4MPa (G) to the port 1(P).