Sine Rodless Cylinder Series REA/REB

A F F For the double axis type, this is the cylinders central axis.

9.8

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

Table of Contents

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Tubing material Symbol Bore size (mm) 125 to 160 180 to 300 125 to 160 Tubing material Aluminum tube Steel tube Steel tube Nil F Cylinder stroke (mm) (Refer to Maximum Stroke on page 6-9-3.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

AMX-OM-L025_e

N ever f ai l t o use dry ai r. D eodori zat i on m ay det eri orat e i f w at er drop i s cont ai ned i n com pressed ai r. N o back f l ow Pl ace w here ai r f l ow s backw ards I N El em ent O ri ng G asket ( N ew ) ( N ew ) O ver rat ed f l ow Year 2008 2009 2010 2021 M ont h J an Feb M ar D ec SYM BO L M N o Z SYM BO L o P Q Z I nst al l vert i cal l y.

modular-press-e

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.

SX

Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

Air Pilot Operated

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

Valve Single Unit

Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.

Valve Single Unit

Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.

CG1

Basic Axial foot Front flange Rear flange U T D Front trunnion Rear trunnion Clevis B L F G Mounting brackets are included, not mounted.

Digital Gap Checker

Function number Function name Default setting Page F 0 (Unit) Unit selection [ PA] kPa Page 49 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 50 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot:

Modular F.R.L. Pressure Control Equipment

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.

Air Pilot Operated Series NVSA

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard