IDU/IDF

40C R407C 3B flange 16 to 18 38000 IDF190D 32000 190 4B flange 50 IDF240D 43000 240 Medium Large 13 to 15 75 IDF75C 10500 12400 R22 R 2 40C Water cooled 20 2 1/2B flange IDF120D 23000 120 25000 IDF150D 30 150 3B flange R407C 40C 16 to 18 32000 IDF190D 38000 190 4B flange 6B flange 43000 IDF240D 50 240 35C R22 54000 IDF370B 65000 370 With motor operated auto drain.

VDW

Refer to page 252 and 253 regarding manifold additions. 249 Series VDW10/20/30 Dimensions VV2DW2 (25.5) 16 1 16 Approx. 300 11 4.6 1 33 24 (19.5) 19.5 R2.3 L3 L2 L1 2 x 1/4 (IN port) (: Thread type) 4.5 9 1 Stations D side 2 3 4 5 n U side VDW23-*G-* VDW23-*G-* VDW23-*G-* VDW23-*G-* 70 31.5 21 18.5 (OUT port) n x 1/8 n x M5 x 0.8 11 P = 22 11 1.5 4.5 54 6 32 6 (19.5) 9.5 11 9.5 11 46 10 24

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Positioning distance (mm) 1 10 100 300 600 10 0.5 1.5 10.5 30.5 60.5 100 0.5 0.6 1.5 3.5 6.5 Speed (mm/s) 150 0.5 0.6 1.2 2.5 4.5 300 0.5 0.6 0.9 1.6 2.6 Values will vary slightly depending on the operating conditions.

Shot Pin Cylinder

90 9.5 13.5 10.5 4 x M10 depth 16 (Helisert) 45 G, NPT1/4 (Max. 69) 10 5 CKZP71-m Rod extended 16.1 80 40 115 + Stroke 60 + Stroke 0.05 35.8 36 1 View A-A 40 0.1 19.8 80 (Max. 34.8) 16 0.1 16 0.1 16 0.1 16 0.1 30 0.03 4 surfaces 2 x 11 4 surfaces 2 x 8 F7 Coil scraper 60 0.05 45 10 15 78 67 48 11 152 + Stroke 115 A A 60 0.03 9 30 30 Protective plate M12 connector (4 pin) 2 x 10 F7 depth

Rotary Cylinder Series MRQ Size: 32, 40 1

Since other auto switches are available other than those listed above, refer to page 11-10-16 for details on other applicable auto switches.

HRX-OM-X010

Item Descriptions Data recording stores up to 150 pieces of alarm history data.

JXCx-OMX0009

(0410)h to (041F)h Step data (No.1) 16 (0420)h to (042F)h Step data (No.2) 16 . . . . . . . . . . . . . . . (07F0)h to (07FF)h Step data (No.63) 16 Please refer to the example of the following in a detailed address of each step data.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

114 105 99 6 126 117 111 131 122 116 7 142 133 127 148 139 133 8 158 149 143 165 156 150 9 174 165 159 182 173 167 10 190 181 175 199 190 184 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245 239 267 258 252 15 270 261 255 284 275 269 16 286 277 271 301 292 286 17 302 293 287 318 309 303 18 318 309 303 335 326 320 19 334 325 319 352 343 337 Port

EXxx-OMY0004

16 Date Signature (editor) Date Signature (test engineer) 108 No.EX##-OMY0004 22.

Title not found

d" "o* 10ffoll-s t t l 16 E D Il-@ t t l 16 E D Il-@ Flat ribbon cable conneclor: 26 Dins Flal ribbon cable connecior:20 pins Flal ribbon cable connecror: 10 oins . Tie-rod base SS5V .

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

suppressor) + + + + 54.1 [61.1] A A 19.2 9.4 38.7 21 25.5 (Pitch) P=17 1/8 (A port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors A A 19.2 9.4 18.5 (Pitch) P=16 M5 x 0.8 (A port) 16 L plug connector (L) M plug connector (M) DIN terminal (D, Y) M8 connector (WO) 49 49 49 49 36.2 57.2 [59.4] 52.2 67 [69.2] 58.7 76.1 66.1

EXxx-OMY0006CN

EX245-FPS1/2/3 Table 16-1 1/2(XF1/2) No. SI Auto negotiation 1 LINK/ACT LED SI Table 16-2 PROFINET No.

Booster Regulator/Air Tank

150 500 250 250 824 846 (mm) A 531 570 494 527 B 444 479.8 444 479.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 D Note) 519 543 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

Compact

4 Dimensions MXZ12 Page 7 MXZ16 Page 8 2 Compact Cylinder with Linear Guide MXZ Series 12, 16, 20, 25 RoHS How to Order MXZ 20 20 M9BW Bore size Number of auto switches 12 12 mm 16 16 mm 20 20 mm 25 25 mm Pilot port location Nil 2 S 1 n n Front Nil * The number of auto switches that can be mounted depends on the bore size and the port location of the product.s P. 16 Pilot port Right Auto

CS1

90 43 31 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 160 161 128 212 112 255 M14 X 1.5 50 47 36 59 16 15 20 90 43 14 19 31 35 to 1000 3/4 M36 X 1.5 18.5 180 182 144 236 118 275 M16 X 1.5 53 56 20 19 40 90 59 43 14 17 36 39 to 1200 3/4 M40 X 1.5 115 18.5 200 204 162 265 132 320 M18 X 1.5 60 63 24 25 17 39 45 70 48 20 41 to 1200 Lube Non-lube 3/4 1 M45 X 1.5 115 18.5 225 226 182 280 150

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

F9PSDPC CXT Direct Body Mount 12, 16, 20, 25, 32 & 40 Bore sizes MHK, MHKL Direct Body Mount 12, 16, 20 & 25 Gripper Bore sizes MHS2/3/4 Direct Body Mount 16, 20 & 25 Gripper Bore sizes MHQ2-6 Direct Body Mount 6 mm Gripper Bore size MHR2/3 Direct Body Mount 10, 15, 20 & 30 Gripper Bore sizes (bore sizes depend on series) MHY2 Direct Body Mount 10, 16, 20 & 25 Gripper Bore sizes MHZ2 Direct

2-Color Display Digital Flow Switch Series PFM

With orifice: 10 to 150 Hz with a 1.5 mm amplitude or 19.6 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For built-in one-touch fitting One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" 63 (4.9) Station n L1 L2 Station 3 88 68 Station 12 272.5 252.5 4 108.5 88.5 5 129 109 6 149.5 129.5 7 170 150 8 190.5 170.5 9 211 191 10 231.5 211.5 11 252 232 67