VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Table of Contents

Unit Series AC10B to 60B Dimensions A AC10B/20B Pressure gauge port size F P E K Q N B C G G OUT IN T T K H Pressure gauge (Option) J L F.R.L.

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

Fluoropolymer Piping Equipment

reducing LQ1E-T-R 3 4 5 P.905 6 2 Tubing extension union tee reducing LQ1T-T-R 3 4 5 P.906 6 Note) Basic size With reducer 868 Fluoropolymer Fittings Hyper Fittings Tubing O.D.

7

A B M G1/2 IN OUT 2 x M4 x 0.7 Thread depth 8 2 x P Port size L K I F 18 (D) J Conduit U E 280 C (42) 45 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier T A B IN OUT M 2 x P Port size L K F I (D) J (mm) Model Conduit terminal Conduit Grommet Electrical entry Port size P A B C E F I J K L T V 1/4, 3/8 1/2 88 (93.5) 22.5 30 D M T 55.5 (61) U T 49.5 (55) U U 50 20 4.5 5

Stability of suction position,

E N T S 1 Page 383 Features and Precautions for Vacuum Adsorption 2 Page 383 Vacuum Pad Selection P Vacuum Pad Selection Procedures P Points for Selecting Vacuum Pads A.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

High Vacuum Angle Valve

XLS-16XLS-16-P XLS-25XLS-25-P Description w y r e-1 e-2 XLS16-20G, C, T, D XLS16-20-P G XLS25-20G, C, T, D XLS25-20-P G Coil assembly Core assembly Armature assembly O-ring O-ring XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V Note 1) In case of coil assembly, please enter voltage symbol in .

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 C6 One-touch fitting for 6 N7 One-touch fitting for 1/4" Type 43 (5 port / base mounted) How to Order 10 SS5YJ5 43 05 C4 Clean series Manifold stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 20 stations A, B port C4 Nil F N T Rc G NPT NPTF P port 1/8 A, B port size One-touch fitting for 4 C4 One-touch fitting

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ1000 Series P.1.10-124 P.1.10-128 P.1.10-132 Plug-in Plug lead VQ2000 Series P.1.10-124 P.1.10-128 P.1.10-132 VQ0 Series P.1.10-170 P.1.10-174 VQ1000 Series P.1.10-170 P.1.10-174 P.742 1.10-114 Manifold Variations T L C S Port size SUP EXH port Cylinder port kit kit kit Lead wire Direct electrical entry style Serial transmission unit Terminal box (Terminal block) SY P, R A, B Enables single-wire

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

ZP

W = P x S x 0.1 x 1/t W = 1 g = 0.0098 N 0.0098 = P x 0.13 x 0.1 x 1/4 S = P/4 x (0.4)2 = 0.13 cm2 P = 3.0 kPa t = 4 (Horizontal lifting) According to the calculation, 3.0 kPa or more of vacuum pressure can adsorb the workpiece. (3) Based on the workpiece shape and type, select: Pad type: Flat Pad material: Silicone (4) According to the results above, select a vacuum pad part number ZP3-04US

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Best Pneumatics Vol. 14

Unit Series AC10B to 60B Dimensions A AC10B/20B Pressure gauge port size F P E K Q N B C G G OUT IN T T K H Pressure gauge (Option) J L F.R.L.

Air Cylinder NCA1 Series

T I O N S A U T O S W I T C H E S R E E D T Y P E O P T I O N S M O U N T I N G B R A C K E T S F O R S W I T C H E S O P T I O N S A U T O S W I T C H E S S O L I D S T A T E T Y P E MODEL OPERATING MAX CURRENT OR INDICATOR MODEL OPERATING MAX CURRENT OR INDICATOR NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE MODEL BORE SIZE RANGE (MA) OUTPUT

Modular F.R.L. Units

High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for

CJ2

Perpendicular In-line R Refer to p.1.3-67 for the configuration. Not applicable to single acting/spring extend (T). Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Table of Contents

P) IDG3/5 IDG3H/5H IDG10/20 IDG10H/20H Option specifications With fitting for purge air discharge (Option: P) i t t Plug } IN OUT OUT IN q o q Plug y Purge air for dehumidification u Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.

Modular F.R.L. Unit

t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.