3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

R 13.7 2-M5 x 0.8 (ports P, R) 24 See grommet type for other dimensions.

LVQ

1/8 (NPT 1/8) N LVA M LVH LVD C B A LVQ D LQ LVN TI/ TIL Double acting valve PA P Pilot port LQ1 integral fitting 1/8 (3), (4) PAX Pilot port Rc 1/8 (NPT 1/8) R PB Sensor (breathing) port Rc 1/8 (NPT 1/8) Pilot port LQ1 integral fitting 1/8 (3), (4) Pilot port Rc 1/8 (NPT 1/8) A B A B SMC SMC LVQ -S Dimensions (N.O. valve, double acting valve) 2 1 (mm) A B C D E F G H J K L M N P Q R W Model

Slider Type/Ball Bushing Bearing

D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1515.)

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !

IDX-OM-Z004

G MADE IN IDF100150F-W i.2 i-6 IDX-OM-Z004 i i.3 HFC IDF100150F-W i.3 i-7 IDX-OM-Z004 i i.4 / 1 1.5 () IDF100150F-W i.4 / i-8 IDX-OM-Z004 1 1 1.1 i.2.9 1 2 IDF100F-30-W C,RV IDF100F-30-CRVW4 IDF 100 F 30 W 4 C 5 G ) K 100kW 100 P 125kW 125 150kW 150 R ) V AC200V(50Hz) AC200/220V(60Hz) 30 1 4 5 C G K P R V 1.1 IDF100150F-W 1 1 IDX-OM-Z004 1 1.2 1.2.1 (C) 1.2.2 G 1.2.3

RHC

Note Material Rod cover White anodized Aluminum alloy q RZQ Head cover White anodized Aluminum alloy w Cylinder tube Hard anodized Aluminum alloy e MI W S Piston rod Hard chromate plated Carbon steel r Piston Hard anodized Aluminum alloy t CEP1 Bumper Urethan y Plastic magnet u CE1 Bushing i Relief valve assembly L o CE2 Relief valve assembly R !0 Plate !

VCA

r.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

AC Servo Motor Driver (Pulse input type/Positioning type)

When the servo motor rotation speed of point table No.3 is changed from 2500 (r/min) to 1000 (r/min) . display a. When the "MODE" button on the driver operation is pressed, the display will be shifted as shown below. Select "P-1". U UP P D DO OW WN N b.

NCA1

E TH TF WF LF + Stroke UF ZJ + Stroke A Bore Size (in) MM KK A B E EE FB LF+ P+ R TF TH UF W WF ZJ+ 500 (5") 1.000 3/4-16 1.13 1.500 5.50 1/2 NPT .50 4.50 2.88 4.10 6.63 2.75 7.63 .75 1.38 5.88 600 (6") 1.375 1-14 1.63 2.000 6.50 3/4 NPT .50 5.00 3.13 4.88 7.63 3.25 8.63 .88 1.63 6.63 MF2 Head side rectangular flange (G) P + Stroke 4-FB 2-EE KK MM B R E TH WF LF+ Stroke TF ZJ + Stroke UF

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Rc1/8, Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Hand Valve Series VH

3 (R) 1 (P) 62 74 49 62 2 (A) 4-5.5 4-6.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102 88 89 VlA SlA 4-6.6 4-6.6 VlA 81

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Cushion adjustment screw 4-J GA Air release GA V V Width across flats G Width across flats G MM MM R (max.) d W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) A a B C d E F G GA J K M MA MM NA P R S T V W H ZZ D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0

SL5200

Ports 2 ports 3 ports 4 ports Code w q w q 2PW 3PW 4PW 2) Refer to gauge guide (P.94) for gauge specifications. 2PW 3PW Sample Order Number Port r e SL5502S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 4PW 40 Specifications SL5502mmA SL5502 SL5510 SL5506 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 1 to 30

rep-modular-e

7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ZR

Lead wire length 3.0 m C Lead wire length 0.6 m CL Lead wire length 3.0 m CN W/o lead wire Pilot valve Connector type Nil DC: 1 W (With indicator light: 1.05 W) AC Refer to page 13-3-5 for part no. of lead wire with connector. Y DC: 0.45 W (With indicator light: 0.5 W) Combination of vacuum switch/Suction filter Electrical entry 24 VDC and 12 VDC are applicable to 0.45 W.