HRS100/150

/L] 0.1 or less v Iron (Fe) [mg/L] 1.0 or less v v Residual chlorine (Cl) [mg/L] 0.3 or less v Reference item Copper (Cu) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Sulfide ion (S2) [mg/L] Should not be detected. v * In the case of [Mcm], it will be 0.003 to 0.01.

Thermo-chiller

Total hardness [mg/L] 200 or less Ammonium ion (NH4+) [mg/L] 0.1 or less Calcium hardness (CaCO3) [mg/L] 150 or less Residual chlorine (Cl) [mg/L] 0.3 or less Ionic state silica (SiO2) [mg/L] 50 or less Free carbon (CO2) [mg/L] 4.0 or less Iron (Fe) [mg/L] 1.0 or less Reference item In the case of [Mcm], it will be 0.003 to 0.01.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

32 Y 6.5 8 Applicable O-ring C6 C6 (Mounting side should be machined to these dimensions.) 5 Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W Dimensions: 25, 32, 40 L (LL) PA 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K YW PB QW LW Q + Stroke PG P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) P (Port

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.4-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

A C D P PF2M705/710W-C4(-L) 86.2 7.6 18.2 2.8 depth 8.4 PF2M705/710/725/750W -C6(-L) 86.2 8 18.2 2.8 depth 8.4 8 8 PF2M725/750W-N7(-L) 86.2 11.8 18.2 2.8 depth 8.4 PF2M711/721W-C8(-L) 88 12 20 2.8 depth 6.2 PF2M711/721W-N7(-L) 88 10.3 20 2.8 depth 6.2 2 x P 2 x P 21 2-Color Display Digital Flow Switch PF2M7(-L) Series Dimensions PF2M7mS-m1/2(-L) A 76 68 58 48 Width across flats B 18 OUT1

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Symbol Bracket assembly LQ-GBL J K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L M L type M type (for short piping) Table 1 Tubing size symbols Replacement parts Tubing O.D. Metric sizes Tubing outside diameter Part No.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

IDX-OM-W035

L K H 4x0..5 (0.4[9~11mm] [4x13] [IDFB22E-11*(L=2800)] Unitinch [mm] A B C D E F G H J K L M N P 30.5 23.6 IDFB22E 1 [775] [600] 3.3 11.4 24.5 5.3 15.9 27.5 3.7 1.8 1 0.5 12.4 13.4 [290] [623] [134] [405] [698] [93] [46] [25] [13] [314] [85] [340] 26.8 33.7 IDFB37E 1/2 [855] [680] R IDFB55E/75E Q A B H G E D F C (0.4 (39.4[1000]) J L K M N P 4x0..5 [4x13] (M10) Unitinch [mm] A B C D

-fl Seies

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

CQS

l X 60 l X 65 l X 70 l X 75 l X 80 l M5 X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l 6.5 6.5 CDQSKB165D 10D 15D 20D 25D 30D 6.5 6.5 CDQSKB205D 10D 15D 20D 25D 30D 35D 40D 45D 50D 6.5 6.5 CDQSKB255D 10D 15D 20D 25D 30D 35D 40D 45D 50D 8.5 8.5 Note) The appropriate plain waher must be used for through-hole. 2.2-27 Series CQSK Dimensions/12 to 25 *Refer to P.2.2-38

VS 8-2/VS 8-4

Terminal block box (Terminal block) Terminal block box P.3, 17 P.3, 17 T kit IP65 compliant IP65 compliant IP65 compliant Electrical entry IP65 enclosure with use of multiple wire cable with sheath and waterproof connector Lead wire P.3, 19 P.3, 19 L kit 25-core cable 26 pins Circular connector Circular connector IP65 enclosure with use of waterproof circular connector P.3, 21 P.3, 21 M kit

SMC Pneumatic Clean Series

Basic style / CG1RN, CG1RN 10112122M5 x 0.8 Relief port GA GB X 2-P (Rc, NPT, G) 2-LD H1 RA Width across flats B1 D 0 -0.05 I E LH MM AL Y KA A K N H S + Stroke LX F ZZ + Stroke L Bore size (mm) I H1 H K F E A AL L B1 D Stroke range KA Y GB S GA RA LD MM LX LH 40 30 27 25 6 19 16 47 8 39 Up to 300 52.4 2 32 2219.5 18 5.5 17 12 32 6 38 Up to 200 42.4 2 25 2219.5 14 5.5 17 10 32 6 31 Up to

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 8.4 12.7 22.1 12.3 17.3 5/32" 9.3 7 9.6 28.8 30.1 25.1 8 33.8 10-32 UNF 16.5 26.1 21.3 11.4 3/16" 11.7 13.5 23.1 18.3 12 1/4" 16 1/8" 27.5 20.4 9.3 12.7 5/32" 17 13.4

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Poppet) VT 0.56 With light/surge voltage suppressor VP L plug connector (L) (A) 2 VG Body Ported Non-locking push type (Tool required) VQZ200 (Standard) 12 VDC 24 VDC VP 1 (P) 3 (R) L plug connector (L) N.C.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

N GB Rc P 2-NN Width across flats B1 H1 2-IA D MM Effective thread 3 A F NB NC K H S + Stroke ZZ + Stroke NA I 3 (mm) Effective thread length (mm) IA (tolerance) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K MM P S NN N NA NB NC ZZ -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 18 13 26 10 16 12 8 41 5 8 30 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 23 f8 15.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 3 4 4 4 4 4.5 5 5 36 51 72 78 44 60 82 88 0.050 0.093 0.065 0.117 0.065 0.117 l m L Note) When using cotter pins, flat washers are used together.

IDX-OM-Z004

200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2