C76

D-F7WV D-J79C D-F7BAL, D-F79F 32 9 83 33 58 108 40 14 138 88 38 63 113 105 110 32 40 32 40 6 11 7 12 135 80 85 81 86 30 35 31 36 55 60 56 61 D-A79WL D-H7/H7C /H7W D-H7BAL, D-H7NF 106 111 136 Aim at this number Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C Bore

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

) I J K L M N O P Model ZM ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter

3

D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-P3DW 13 11 11.5 10.5 11 12 D17 7 14.5 6 15.5 5.5 14 6 14 15.5 -X 397 MK Series Auto Switch Proper Mounting Position (Detection at Stroke End) and its Mounting Height D-F79F/F7NT D-A7/A80 D-A73C/A80C D-A7H/A80H D-A79W D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV B A U 20, 25 20, 25 U B A 32

Compact Cylinder with Lock Series CLQ

Hs A B A B Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BA D-F7W D-F7F D-J79W D-F7WV D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-A73C D-A80C D-F7V D-F7WV D-J79C D-A79W D-A7 D-A80 Bore size (mm) D-A7/A80 D-A79W Bore size (mm) Hs Hs Hs Hs Hs Hs 20 B A B A B A A B 25 20 32 34 35 38 32.5 38.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Range D B D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A C 11.5 (10) 18.5 (17) 26.5 (25) 34 (32.5) 34 (32.5) 44 (42.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D C 5.5 12.5 20.5 28 28 38 Auto switch model Bore size (mm) 6 10 15 20 25 32 9 7 9 9 9 11 6 10 15 20 25 32 5.5 2.5 5.5 3 1 1 2 5 2 4.5 6.5 6.5 4.5 7.5 4.5 7 9 9 15.5 22.5 30.5 38

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

Angle Seat Valve /

Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *

,,: ,.

KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

CLK1

Printed in Japan. 1st printing May, 2000 D-SMC.L.A. P-80 (YG)

ZSE30A(F)/ISE30A

(Reduce power consumption by up to 20%.)

HRL

Power consumption P: 20 [kW] Q = P = 20 [kW] Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = V: Power supply voltage P 24 [kW] Power consumption e Derive the heat generation amount from the output. Output (shaft power, etc.) W: 13 [kW] w Derive the heat generation amount from the power supply output.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U D-A79W D-F7WV D-F7V D-F7BAVL A B A B Proper auto switch mounting positions (mm) D-A7H, D-A80H D-A73C, D-A80C D-F7 D-F7V D-F7W, D-F7WV D-J79 D-J79C, D-J79W D-F7BA D-F9 D-F9V D-F9W D-F9WV D-A7 D-A80 D-A9 D-A9V D-F7F D-F9BAL D-A79W D-F7NTL Bore size (mm) A B A A A A B A A A B B B B B B 20 20.5 11.5 21 18 25 26 12 9 16 17 32 27 20 27.5 24.5 31.5 26 19 30 29 32.5 20.5 17.5 24.5 23 22 25.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Single Axis Electric Actuator Series LJ1H

Consult P/A.

Clamp Cylinder with Lock Series CLK1

Cylinder series Applicable bore size (mm) Operating range (Dimension l) CLK1G 63 4.5 50 4 40 4 20 Series CLK1 Clamp Cylinder with Lock Magnetic Field Resistant Reed Switches D-P70/P74/P75/P80 Auto Switch Specifications Grommet D-P70, D-P74, D-P75 (with indicator light) D-P74 D-P70 D-P75 Auto switch part no.

CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Refrigerated Air Dryer

]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N P Model Port size 30.5 [775] 23.6 [600] IDFB22E 1 11.4 [290] 24.5 [623] 5.3 [134] 15.9 [405] 27.5 [698] 3.7 [93] 1.8 [46] 1.0 [25] 0.5 [13] 12.4 [314] 3.3 [85] 13.4 [340] 33.7 [855] 26.8 [680] IDFB37E 11/2 IDFB55E, IDFB75E R Q Compressed air inlet Port size B A E D Compressed air inlet Port size H G Ventilation air outlet Illuminated